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微流道精密磨削技术及自驱动检测芯片实验研究
Experimental study on grinding technology of microchannel for self-driven detection chip
- 光学 精密工程 2020年28卷第8期 页码：1743-1750
- 作者机构：
华南理工大学 机械与汽车工程学院, 广东 广州 510640;广州迪澳生物科技有限公司, 广东 广州 510663
- 作者简介：
[ "谢晋(1963-), 男, 山西榆次人, 博士, 教授, 博士生导师, 2002年于日本北见工业大学获得博士学位, 主要从事磨削技术、精密微细制造技术及过程控制等方面的研究。E-mail:jinxie@scut.edu.cn" ]
[ "郭奥钿(1996-), 男, 广东茂名人, 硕士研究生, 2018年于华南理工大学获得学士学位, 主要从事微细加工与微流控芯片加工等方面的研究。E-mail:aodianguo@163.com" ]
- 基金信息：国家自然科学基金资助项目(51975219);广东省自然科学基金资助项目(2020A1515010807);广东省国际科技合作项目资助(2020A0505100003)
DOI：10.3788/OPE.20202808.1743
中图分类号： TH16;O65收稿日期：2020-01-06，
修回日期：2020-03-13，
录用日期：2020-3-13，
纸质出版日期：2020-08-25
- 稿件说明：
移动端阅览
谢晋, 郭奥钿, 卢阔, 等. 微流道精密磨削技术及自驱动检测芯片实验研究[J]. 光学 精密工程, 2020,28(8):1743-1750.
Jin XIE, Ao-dian GUO, Kuo LU, et al. Experimental study on grinding technology of microchannel for self-driven detection chip[J]. Optics and precision engineering, 2020, 28(8): 1743-1750.
谢晋, 郭奥钿, 卢阔, 等. 微流道精密磨削技术及自驱动检测芯片实验研究[J]. 光学 精密工程, 2020,28(8):1743-1750. DOI： 10.3788/OPE.20202808.1743.
Jin XIE, Ao-dian GUO, Kuo LU, et al. Experimental study on grinding technology of microchannel for self-driven detection chip[J]. Optics and precision engineering, 2020, 28(8): 1743-1750. DOI： 10.3788/OPE.20202808.1743.
摘要
针对病原体检测用芯片需要蠕动泵和离心机外加驱动的问题，设计微V槽流道的自驱动芯片，研究微液体流动的微流道拓扑结构及其精密磨削技术。因为激光等物理加工难以保证微拓扑结构精度，所以采用金刚石磨削技术实现石英玻璃表面的微V槽流道精密加工。基于多轴联动技术和机械物理去除原理开发了砂轮微尖端的高效精密在位修整工艺，可将磨粒精密修尖至同一角度，进行机械精密复制的塑性域微磨削。然后，实验分析微V槽流道的尖角、表面粗糙度、梯度等对微液体流速的影响。最后，制造出病原体检测的微流控芯片。研究结果显示，更大梯度、更小尖角和更小粗糙度以及尖角端分布的纳米流道可以大幅提高微液体流速。而且，微流道的V槽尖端半径为15
μ
m，表面粗糙度为30 nm，可诱导微液体运动。在此基础上，研发的自驱动微流控芯片不需离心机就能够检测出布鲁氏菌的病原体核酸，检测灵敏度可以小于100 ag/
μ
L。
Abstract
Pathogen detectionrequires additional driving witha peristaltic pump and centrifuge. Hence
a self-driven microfluidic chip was designed with micro-V-groove channels
and its topologic structure and precision grinding were studied in relation to flow.Because it is difficult for physical processing
such as laser processing
to ensure topologic microform accuracy
diamond grinding was employed to machine the micro-V-groove channelsprecisely on a quartz glass surface. The key was to develop efficient and precision on-machine truing of a wheel-V-tip with the same grain-tip angle through multiaxis control and mechanical physical removal and subsequently to perform ductile-modemicrogrinding with mechanical precision copy. Furthermore
the influence of themicro-V-groove angle
roughness
gradient
etc. on microliquid flowing velocity were experimentally investigated. Finally
a microfluidic chip was manufactured for pathogen detection. It was found that larger gradient
smaller angle
finer surface roughness
and at-V-tip distributed nanochannels lead to a much larger flow velocity in the microfluidic chip. Accordingly
the micro-V-grooves can be ground to attain a surface roughness of 30 nm and tip radius of 15
μ
m
which induces microliquid flow. As a result
the developed self-driven microfluidic chip can detect Brucella pathogen nucleic acids with a detection accuracy of 100 ag/
μ
Lor lesser without a centrifuge.
关键词
Keywords
references
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