考虑应力分布约束的压电全向加速度计梁结构优化设计

王岩; 夏阳; 刘蓬勃

doi:10.3788/OPE.20202808.1751

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考虑应力分布约束的压电全向加速度计梁结构优化设计

微纳技术与精密机械 | 更新时间：2020-08-14

- 考虑应力分布约束的压电全向加速度计梁结构优化设计
- Optimization of supporting beams of piezoelectric omnidirectional accelerometer under stress constraint
- 光学精密工程 2020年28卷第8期页码：1751-1760
- 作者机构：
  
  大连理工大学工业装备分析国家重点实验室汽车工程学院, 辽宁大连 116081
- 作者简介：
  
  [ "王岩(1985-), 男, 山东济南人, 博士研究生, 2012年于桂林电子科技大学获得硕士学位, 主要从事高性能压电加速度计、声、触觉传感器研究。E-mail:m1114f914@163.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(U1930206);国家自然科学基金资助项目(61874019);国家重点研发计划资助项目(2018YFA0703200)
- DOI：10.3788/OPE.20202808.1751
  中图分类号：
- 收稿日期：2020-03-02，
  
  修回日期：2020-04-20，
  
  录用日期：2020-4-20，
  
  纸质出版日期：2020-08-25
- 稿件说明：
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王岩, 夏阳, 刘蓬勃. 考虑应力分布约束的压电全向加速度计梁结构优化设计[J]. 光学精密工程, 2020,28(8):1751-1760.

Yan WANG, Yang XIA, Peng-bo LIU. Optimization of supporting beams of piezoelectric omnidirectional accelerometer under stress constraint[J]. Optics and precision engineering, 2020, 28(8): 1751-1760.
王岩, 夏阳, 刘蓬勃. 考虑应力分布约束的压电全向加速度计梁结构优化设计[J]. 光学精密工程, 2020,28(8):1751-1760. DOI： 10.3788/OPE.20202808.1751.

Yan WANG, Yang XIA, Peng-bo LIU. Optimization of supporting beams of piezoelectric omnidirectional accelerometer under stress constraint[J]. Optics and precision engineering, 2020, 28(8): 1751-1760. DOI： 10.3788/OPE.20202808.1751.

摘要

针对全向加速度计柔性支撑结构应力集中问题，以压电加速度计高灵敏度为目标，建立了考虑应力分布状态的新型全向加速度计柔性支撑结构优化设计模型。借助遗传算法，通过协同优化初始长度15 mm压电曲梁不同部位的曲率和直径，得到了具有变截面特征的压电全向加速度计曲梁支撑结构。数值实验结果表明，所得到的3压电曲梁支撑加速度计解算的全向灵敏度为传统3直梁支撑加速度计的2.5倍，且结构的最大应力仅为传统直梁结构的70%~90%。由于应力降低，曲梁加速度计的加速度线性测量范围扩大为传统直梁加速度计的1.2倍。在1~81 Hz加速度下，曲梁加速度计解算的全向灵敏度为0.7~1.3 V/g，为直梁加速度计的1.6~2.9倍。该设计解决了通过直接改变梁结构形式难以实现传统梁结构加速度计高灵敏低应力响应的问题。

Abstract

To solve the problem regardingthe stress concentration offlexible supporting structures of omnidirectional accelerometers

an optimization model was established herein

considering the constraint of the stress distribution. By means of optimizing the curvatures and diameters of different parts of a piezoelectric curved beam

a novel axially polarized optimized omnidirectional accelerometer with a curved beam of variable crosssection was obtained using the genetic algorithm. The numerical results show that the omnidirectional sensitivity of the optimized curved-beam accelerometer is 2.5 times that of the initial straight-beam accelerometer

and its maximum stress is 0.7-0.9 times that of the initial straight-beam accelerometer. Therefore

the linear measurement range of the curved-beam accelerometer is 1.2 times that of the initial straight-beam accelerometer. The omnidirectional sensitivity of the curved-beam accelerometer is 0.7-1.3 V/g under acceleration in the range of 1-81 Hz. Overall

the design method forthe curved-beam accelerometer can overcome the difficultiespresented regardingoptimization of the sensitivity and stress distribution simultaneously.

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references

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