小孔节流气体静压推力轴承微振动机理研究

王伟; 王超; 郑越青; 崔海龙

doi:10.3788/OPE.20202808.1761

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小孔节流气体静压推力轴承微振动机理研究

微纳技术与精密机械 | 更新时间：2020-08-14

- 小孔节流气体静压推力轴承微振动机理研究
- Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing
- 光学精密工程 2020年28卷第8期页码：1761-1774
- 作者机构：
  
  1.电子科技大学机械与电气工程学院, 四川成都 611731
  2.中国工程物理研究院机械制造工艺研究所, 四川绵阳 621000
- 作者简介：
  
  [ "王伟(1980-), 男, 河南洛阳人, 博士, 教授, 博士生导师, 2002年于武汉大学获得学士学位, 2007年、2010年于哈尔滨工业大学分别获得硕士、博士学位, 主要从事精密、超精密机床精度保障技术(空间精度分析、动态精度测试、气浮轴承流体仿真)。E-mail:wangwhit@163.com" ]
  [ "王超(1996-), 男, 山西大同人, 硕士研究生, 2018年于电子科技大学获得学士学位, 2018年于电子科技大学继续深造, 主要从事机械系统动力学、静压支承优化设计方面的研究。E-mail:871300353@qq.com" ]
- 基金信息：
  
  NSAF联合基金资助项目(U1830110027);国家自然科学基金青年资助项目(51705486);中国工程物理研究院院长基金资助项目(YZJJLX2018010)
- DOI：10.3788/OPE.20202808.1761
  中图分类号： TQ021.1;TH133.36
- 收稿日期：2020-03-12，
  
  修回日期：2020-04-15，
  
  录用日期：2020-4-15，
  
  纸质出版日期：2020-08-25
- 稿件说明：
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王伟, 王超, 郑越青, 等. 小孔节流气体静压推力轴承微振动机理研究[J]. 光学精密工程, 2020,28(8):1761-1774.

Wei WANG, Chao WANG, Yue-qing ZHENG, et al. Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing[J]. Optics and precision engineering, 2020, 28(8): 1761-1774.
王伟, 王超, 郑越青, 等. 小孔节流气体静压推力轴承微振动机理研究[J]. 光学精密工程, 2020,28(8):1761-1774. DOI： 10.3788/OPE.20202808.1761.

Wei WANG, Chao WANG, Yue-qing ZHENG, et al. Study on nano-vibration mechanism of orifice throttle aerostatic thrust bearing[J]. Optics and precision engineering, 2020, 28(8): 1761-1774. DOI： 10.3788/OPE.20202808.1761.

摘要

为了揭示气体静压轴承微振动的产生要素，从微观流场角度出发通过计算流体动力学（CFD）对气膜流场进行三维数值大涡模拟（LES）与分析。首先，设计不同单一变量从而相对气容不同的五组仿真实验组，通过仿真研究内部气容对微观流场的影响。接着，通过观察不同结构的仿真结果，从各种参数中找出可能引发微振动的激励振源。最后，采用不同压力的供气进行仿真说明内部压强对内部流场的影响。计算结果表明，当相对气容约在1%时，一定的内部气容就会明显导致气体静压轴承微振动；均压腔附近的压力波动是诱发微振动的激励振源；内部压强的高低则与振动幅度有着一定的联系。总之，气体静压轴承的微振动与微观流场的变化有着直接的联系，而流场转捩产生的涡旋是其主要原因。

Abstract

To reveal the factors responsible for generation of the nano-vibration of aerostatic bearings

computational fluid dynamics and three-dimensional numerical large eddy simulations were employed herein for the analysis of the air film flow field from the perspective of the microscopic flow field. First

five simulated experimental groups were designed to investigate the effect of the internal gas volume on the microscopic flow field using different single variables and under different relative gas capacities. Subsequently

the simulation results of different structure parameters were analyzed

according to which the excitation sources that can result in generation of nano-vibrations were determined. Finally

the influence of internal pressure on the flow field was illustrated via the simulation of different supply pressures. A certain internal gas volume leads to the nano-vibration of aerostatic bearings when the relative gas capacity is approximately 1%. The pressure fluctuation near the equalizing cavity may be the excitation source responsible for inducing nano-vibration; the internal pressure also influences the amplitude of the vibration to a certain extent. In conclusion

the changes in the microscopic flow field directly in fluence nano-vibration

while the vortex generated uponflow field transition is the major factor causing it.

关键词

Keywords

references

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