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Low signal-to-noise ratio spectral interferometry film thickness measurement based on self-attention neural network
Modern Applied Optics | 更新时间：2025-07-03

    • Low signal-to-noise ratio spectral interferometry film thickness measurement based on self-attention neural network

    • “In the field of thin film thickness measurement, researchers have proposed a measurement method based on self attention neural networks, which effectively improves the measurement stability of low signal-to-noise ratio spectral data.”
    • Optics and Precision Engineering   Vol. 33, Issue 9, Pages: 1341-1352(2025)

    • DOI：10.37188/OPE.20253309.1341    

      CLC： TH741
    • CSTR：32169.14.OPE.20253309.1341    

    • Received：03 March 2025，

      Revised：25 March 2025，

      Published：10 May 2025

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  • WANG Chen,WANG Zizheng,LIU Zhaoran,et al.Low signal-to-noise ratio spectral interferometry film thickness measurement based on self-attention neural network[J].Optics and Precision Engineering,2025,33(09):1341-1352. DOI： 10.37188/OPE.20253309.1341. CSTR： 32169.14.OPE.20253309.1341.

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