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Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-08-04

    • Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction

    • “In the field of microelectronics manufacturing and surface analysis, experts have developed a micro beam spot RHEED parallel beam electron gun, analyzed the characteristics of the electron optical system, designed a low aberration focusing lens through simulation, and experimentally obtained clear diffraction spots.”
    • Optics and Precision Engineering   Vol. 33, Issue 12, Pages: 1876-1888(2025)

    • DOI：10.37188/OPE.20253312.1876    

      CLC： TN16
    • CSTR：32169.14.OPE.20253312.1876    

    • Received：10 March 2025，

      Revised：15 May 2025，

      Published：25 June 2025

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  • ZHAO Weixia,SHI Lina,LIU Junbiao,et al.Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction[J].Optics and Precision Engineering,2025,33(12):1876-1888. DOI： 10.37188/OPE.20253312.1876. CSTR： 32169.14.OPE.20253312.1876.

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ZHANG Lixin
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Fei LI
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Related Institution

School of Instrument Science and Optoelectronics Engineering， Beijing Information Science and Technology University
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