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Machining process and compensation for variable removal function with fine-diameter ion beams
Modern Applied Optics | 更新时间：2026-02-14

    • Machining process and compensation for variable removal function with fine-diameter ion beams

    • “In the field of high-precision optical processing, experts have established a compensation model for the removal function of fine beam diameter ion beams. By controlling the residence time and feed rate, the convergence rate of processing has been effectively improved, providing a stable and reliable solution for sub nanometer optical processing.”
    • Optics and Precision Engineering   Vol. 34, Issue 3, Pages: 353-364(2026)

    • DOI：10.37188/OPE.20263403.0353    

      CLC： TN305.2
    • CSTR：32169.14.OPE.20263403.0353    

    • Received：09 December 2025，

      Revised：2025-12-29，

      Published：10 February 2026

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  • MAO Xu,ZHANG Feng,TANG Wa,et al.Machining process and compensation for variable removal function with fine-diameter ion beams[J].Optics and Precision Engineering,2026,34(03):353-364.

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