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Design and experiment of micro-arrayed beam blanker
更新时间：2024-06-28
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    • Design and experiment of micro-arrayed beam blanker

    • “微型阵列束闸研究取得新进展，成功设计并制作3×3阵列束闸，实现多束电子束快速曝光控制，为电子束曝光技术发展提供新方案。”
      ”
    • Optics and Precision Engineering   Pages: 1-9(2024)
    • CLC： TN16;

    • Published Online：28 June 2024，

      Received：09 April 2024，

      Revised：19 June 2024，

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  • ZHANG Lixin,SUN Botong,LIU Xingyun,et al.Design and experiment of micro-arrayed beam blanker[J].Optics and Precision Engineering, DOI：10.37188/OPE.XXXXXXXX.0001

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