Parallelism measurement and trajectory planning of multi-channel double crystal monochromator

LU Haolin; LIU Maomao; HE Siyu; FENG Zhao; ZHANG Xiaowei; TANG Lin; HE Jianhua; XIAO Xiaohui

doi:10.37188/OPE.20243215.2374

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Parallelism measurement and trajectory planning of multi-channel double crystal monochromator

Modern Applied Optics | 更新时间：2024-08-31

- Parallelism measurement and trajectory planning of multi-channel double crystal monochromator
- Optics and Precision Engineering Vol. 32, Issue 15, Pages: 2374-2386(2024)
- 作者机构：
  
  1.武汉大学动力与机械学院，湖北武汉 430072
  2.武汉大学先进光源研究中心，湖北武汉 430072
  3.中国科学院高能物理研究所，北京 100049
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20243215.2374
  CLC： TH74;TP273
- Published：10 August 2024，
  
  Received：03 April 2024，
  
  Revised：31 May 2024，
- 稿件说明：
移动端阅览
鲁浩林,刘卯卯,何思宇等.多通道双晶单色器平行度测量与运动轨迹规划[J].光学精密工程,2024,32(15):2374-2386.

LU Haolin,LIU Maomao,HE Siyu,et al.Parallelism measurement and trajectory planning of multi-channel double crystal monochromator[J].Optics and Precision Engineering,2024,32(15):2374-2386.
鲁浩林,刘卯卯,何思宇等.多通道双晶单色器平行度测量与运动轨迹规划[J].光学精密工程,2024,32(15):2374-2386. DOI： 10.37188/OPE.20243215.2374.

LU Haolin,LIU Maomao,HE Siyu,et al.Parallelism measurement and trajectory planning of multi-channel double crystal monochromator[J].Optics and Precision Engineering,2024,32(15):2374-2386. DOI： 10.37188/OPE.20243215.2374.

摘要

针对双转轮多通道双晶单色器的平行度误差补偿问题，提出一种基于光电自准直仪的多通道双晶单色器准静态双晶衍射面平行度测量方法以及一种S型曲线轨迹规划方法。分析多通道单色器的结构及运动特点，基于光电自准直仪提出多通道双晶单色器平行度测量系统的总体框架及测量具体流程。结合多通道双晶单色器运动特点，提出一种S型曲线轨迹规划方法，并基于平行度测量结果对单色器运动轨迹进行优化设计。最后，在搭建的实验平台上开展准静态平行度测量实验及运动轨迹跟踪实验。结果表明：所搭建的平行度测量系统的平行度分辨率达0.5″，相邻两组晶体角度跃迁差值在百角秒量级；所提S型曲线轨迹规划算法将轨迹跟踪误差抑制在6.1″，相比传统5阶多项式及未规划轨迹，跟踪误差分别降低58.7%和63.9%。实验结果验证了所提方法有效性，对改进双转轮多通道双晶单色器性能具有良好的实际应用价值。

Abstract

To address parallelism error compensation in a dual-rotation multi-channel double crystal monochromator (DCM)

we propose a method using an autocollimator to measure the quasi-static parallelism of diffraction surfaces and an S-curve trajectory planning method. First

we analyze the structure and motion of the monochromator. Then

we present a measurement system framework using the autocollimator. We also propose an S-curve trajectory planning algorithm to optimize the motion trajectory based on parallelism measurements. Finally

experiments on the constructed platform show that the measurement system achieves a 0.5" resolution

with crystal angle transitions varying by hundreds of arcseconds. The S-curve planning algorithm reduces trajectory tracking error by 58.7% and 63.9% compared to a 5th order polynomial and unplanned trajectories

respectively

with a 6.1" tracking error. These results confirm the method's efficacy in enhancing the performance of the monochromator.

关键词

同步辐射X射线双晶单色器误差补偿平行度测量轨迹规划

Keywords

synchrotron radiation X raydouble crystal monochromatorerror compensationparallelism measurementtrajectory planning

references

ZHAO X J， ZHAO Y D， ZHENG L， et al. Optical design and optimization study of metrology sector at high energy photon source［J］. Radiation Detection Technology and Methods， 2021， 5（2）： 174-180. doi: 10.1007/s41605-021-00241-0http://dx.doi.org/10.1007/s41605-021-00241-0

NEWVILLE M. Fundamentals of xafs［J］. Reviews in Mineralogy and Geochemistry， 2014， 78（1）： 33-74. doi: 10.2138/rmg.2014.78.2http://dx.doi.org/10.2138/rmg.2014.78.2

WU J X， GONG X P， SONG Y， et al. Improvement of the performance of a cryo-cooled monochromator at SSRF. Part II： angular stability of the exit beam［J］. Nuclear Instruments and Methods in Physics Research Section A： Accelerators， Spectrometers， Detectors and Associated Equipment， 2021， 988： 164872. doi: 10.1016/j.nima.2020.164872http://dx.doi.org/10.1016/j.nima.2020.164872

赵相国. 同步辐射单色器晶体热缓释技术研究［D］. 西安：中国科学院西安光学精密机械研究所， 2013.

ZHAO X G. Study on Thermal Slow Release Technology of Synchrotron Radiation Monochromator Crystal［D］.Xi’an： Xi’an Institute of Optics and Precision Mechanics， Chinese Academy of Sciences， 2013. （in Chinese）

朱晔，张小威，石泓，等. 一种快扫X射线吸收精细结构谱学单色器： CN112748136B［P］. 2022-04-01. doi: 10.29172/de07dc02fb0a4fdb8d0f544f975831bbhttp://dx.doi.org/10.29172/de07dc02fb0a4fdb8d0f544f975831bb

ZHU Y， ZHANG X W， SHI H， et al.. A fast scanning X-ray absorption fine structure spectroscopy monochromator： CN112748136A ［P］. 2022-04-01. （in Chinese）. doi: 10.29172/de07dc02fb0a4fdb8d0f544f975831bbhttp://dx.doi.org/10.29172/de07dc02fb0a4fdb8d0f544f975831bb

何思宇，鲁浩林，冯朝，等. 基于平行度误差补偿的多通道双晶单色器运动控制［J］. 光学精密工程， 2023， 31（9）： 1335-1346. doi: 10.37188/ope.20233109.1335http://dx.doi.org/10.37188/ope.20233109.1335

HE S Y， LU H L， FENG ZH， et al. Motion control of multi-channel double crystal monochromator based on parallelism error compensation［J］. Opt. Precision Eng.， 2023， 31（9）： 1335-1346.（in Chinese）. doi: 10.37188/ope.20233109.1335http://dx.doi.org/10.37188/ope.20233109.1335

刘石磊，王丽，徐中民，等. 同步辐射双晶单色器平行度测量方法研究［J］. 核技术， 2011， 34（6）： 411-414.

LIU S L， WANG L， XU ZH M， et al. A new method to measure the parallelism error of synchrotron radiation from double-crystal monochromator［J］. Nuclear Techniques， 2011， 34（6）： 411-414.（in Chinese）

FAN Y C， QIN H L， ZHU W Q， et al. Angular stability measurement of a cryocooled double-crystal monochromator at SSRF［J］. Nuclear Instruments and Methods in Physics Research Section A： Accelerators， Spectrometers， Detectors and Associated Equipment， 2020， 983： 164636. doi: 10.1016/j.nima.2020.164636http://dx.doi.org/10.1016/j.nima.2020.164636

WU J X， GONG X P， SONG Y， et al. Improvement of the performance of a cryo-cooled monochromator at SSRF. PartI： double-crystal parallelism［J］. Nuclear Instruments and Methods in Physics Research Section A： Accelerators， Spectrometers， Detectors and Associated Equipment， 2021， 985： 164654. doi: 10.1016/j.nima.2020.164654http://dx.doi.org/10.1016/j.nima.2020.164654

LIM J， RAH S. Measurement of the parallelism error of a double crystal monochromator by the pencil beam interferometer［J］. Review of Scientific Instruments， 2005， 76（6）. doi: 10.1063/1.1928188http://dx.doi.org/10.1063/1.1928188

李龙辉，张芷齐，郭振，等. 柔性扫描平台最优阶多项式速度曲线控制［J］. 光学精密工程， 2021， 29（10）： 2400-2411. doi: 10.37188/OPE.2021.0099http://dx.doi.org/10.37188/OPE.2021.0099

LI L H， ZHANG ZH Q， GUO ZH， et al. Optimal order polynomial motion profile for high-precision flexible scanning platform［J］. Opt. Precision Eng.， 2021， 29（10）： 2400-2411.（in Chinese）. doi: 10.37188/OPE.2021.0099http://dx.doi.org/10.37188/OPE.2021.0099

龙樟，李显涛，帅涛，等. 工业机器人轨迹规划研究现状综述［J］. 机械科学与技术， 2021， 40（6）： 853-862.

LONG ZH， LI X T， SHUAI T， et al. Review of research state of trajectory planning for industrial robots［J］. Mechanical Science and Technology for Aerospace Engineering， 2021， 40（6）： 853-862.（in Chinese）

穆海华，周云飞，周艳红. 步进扫描光刻机扫描运动轨迹规划及误差控制［J］. 机械工程学报， 2010， 46（2）： 166-171. doi: 10.3901/jme.2010.02.166http://dx.doi.org/10.3901/jme.2010.02.166

MU H H， ZHOU Y F， ZHOU Y H. Trajectory planning and precision control of scan-move for step-scan lithography stage［J］. Journal of Mechanical Engineering， 2010， 46（2）： 166-171.（in Chinese）. doi: 10.3901/jme.2010.02.166http://dx.doi.org/10.3901/jme.2010.02.166

李爱琳，李璟. 纳米级运动轨迹规划和控制［J］. 光学精密工程， 2023， 31（17）： 2534-2545. doi: 10.37188/ope.20233117.2534http://dx.doi.org/10.37188/ope.20233117.2534

LI A L， LI J. Trajectory planning scheme for ultra-precision system［J］. Opt. Precision Eng.， 2023， 31（17）： 2534-2545.（in Chinese）. doi: 10.37188/ope.20233117.2534http://dx.doi.org/10.37188/ope.20233117.2534

FANG Y， HU J， LIU W H， et al. Smooth and time-optimal S-curve trajectory planning for automated robots and machines［J］. Mechanism and Machine Theory， 2019， 137： 127-153. doi: 10.1016/j.mechmachtheory.2019.03.019http://dx.doi.org/10.1016/j.mechmachtheory.2019.03.019

祁超，谢馨，陈凌宇，等. 精密转台S曲线轨迹规划及高精度控制［J］. 光学精密工程， 2018， 26（12）： 2971-2981. doi: 10.3788/ope.20182612.2971http://dx.doi.org/10.3788/ope.20182612.2971

QI CH， XIE X， CHEN L Y， et al. S-curve trajectory planning and high-precision control of precision servo turntable［J］. Opt. Precision Eng.， 2018， 26（12）： 2971-2981.（in Chinese）. doi: 10.3788/ope.20182612.2971http://dx.doi.org/10.3788/ope.20182612.2971

LU H L， HE S Y， FENG Z， et al. High precision fixed time 4-order S-curve trajectory planning for multi-channel double crystal monochromator［C］. 2023 International Conference on Advanced Robotics and Mechatronics （ICARM）. July 8-10， 2023. Sanya， China. IEEE， 2023： 786-791.

BIAGIOTTI L， MELCHIORRI C. Optimization of generalized S-curve trajectories for residual vibration suppression and compliance with kinematic bounds［J］. ASME Transactions on Mechatronics， 2021， 26（5）： 2724-2734. doi: 10.1109/tmech.2020.3045504http://dx.doi.org/10.1109/tmech.2020.3045504

LAMBRECHTS P， BOERLAGE M， STEINBUCH M. Trajectory planning and feedforward design for electromechanical motion systems［J］. Control Engineering Practice， 2005， 13（2）： 145-157. doi: 10.1016/j.conengprac.2004.02.010http://dx.doi.org/10.1016/j.conengprac.2004.02.010

ACHARYA P， NGUYEN K D， LA H M， et al. Nonprehensile manipulation： a trajectory-planning perspective［J］. ASME Transactions on Mechatronics， 2020： 1. doi: 10.1109/tmech.2020.3038591http://dx.doi.org/10.1109/tmech.2020.3038591

樊奕辰. 液氮冷却双晶单色器稳定性测试技术研究［D］. 上海：中国科学院中国科学院上海应用物理研究所， 2020.

FAN Y CH. Study on Stability Testing Technology of Liquid Nitrogen Cooled Double Crystal Monochromator［D］.Shanghai： Shanghai Institute of Applied Physics， Chinese Academy of Sciences， 2020. （in Chinese）

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Related Author

LU Haolin

LIU Maomao

HE Siyu

FENG Zhao

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TANG Lin

HE Jianhua

XIAO Xiaohui

Related Institution

School of Power and Mechanical Engineering， Wuhan University.， Wuhan 430072， ChinaAdvanced Light Source Research Center， Wuhan University.， Wuhan 430072， ChinaInstitute of High Energy Physics， Chinese Academy of Sciences

武汉大学先进光源研究中心

中国科学院高能物理研究所

College of Mechanical Engineering and Automation， Huaqiao University

Fujian Key Laboratory of Green Intelligent Drive and Transmission for Mobile Machinery

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