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1.School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
Published:10 February 2023,
Received:08 September 2022,
Revised:11 October 2022,
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吴春霞,马剑秋,高志山等.基于像差补偿的近红外显微干涉硅通孔测量[J].光学精密工程,2023,31(03):301-312.
WU Chunxia,MA Jianqiu,GAO Zhishan,et al.Measurement of through silicon via by near-infrared micro interferometry based on aberration compensation[J].Optics and Precision Engineering,2023,31(03):301-312.
吴春霞,马剑秋,高志山等.基于像差补偿的近红外显微干涉硅通孔测量[J].光学精密工程,2023,31(03):301-312. DOI: 10.37188/OPE.20233103.0301.
WU Chunxia,MA Jianqiu,GAO Zhishan,et al.Measurement of through silicon via by near-infrared micro interferometry based on aberration compensation[J].Optics and Precision Engineering,2023,31(03):301-312. DOI: 10.37188/OPE.20233103.0301.
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