Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage

WANG Wenwen; LAI Leijie; LI Pengzhi; ZHU Limin

doi:10.37188/OPE.20243206.0833

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Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage

Micro/Nano Technology and Fine Mechanics | 更新时间：2024-03-31

- Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage
- Optics and Precision Engineering Vol. 32, Issue 6, Pages: 833-842(2024)
- 作者机构：
  
  1.上海工程技术大学机械与汽车工程学院，上海 201620
  2.格鲁斯特大学计算与工程学院，英国切尔滕纳姆 GL50 2RH
  3.中国科学院长春光学精密机械与物理研究所，吉林长春 130033
  4.上海交通大学机械与动力工程学院机械系统与振动国家重点实验室，上海 200240
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20243206.0833
  CLC： TP273
- Published：25 March 2024，
  
  Received：12 November 2023，
  
  Revised：06 December 2023，
- 稿件说明：
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王雯雯,赖磊捷,李朋志等.压电微动台数据驱动迭代前馈补偿与自适应抑振[J].光学精密工程,2024,32(06):833-842.

WANG Wenwen,LAI Leijie,LI Pengzhi,et al.Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage[J].Optics and Precision Engineering,2024,32(06):833-842.
王雯雯,赖磊捷,李朋志等.压电微动台数据驱动迭代前馈补偿与自适应抑振[J].光学精密工程,2024,32(06):833-842. DOI： 10.37188/OPE.20243206.0833.

WANG Wenwen,LAI Leijie,LI Pengzhi,et al.Data-driven iterative feedforward compensation and adaptive vibration suppression of piezoelectric micro-motion stage[J].Optics and Precision Engineering,2024,32(06):833-842. DOI： 10.37188/OPE.20243206.0833.

摘要

为消除压电驱动柔性微定位平台高精控制对平台不确定动力学模型的依赖性，提出了一种数据驱动无模型迭代前馈补偿和自适应陷波滤波结合的控制方法来提高平台的跟踪性能。首先，建立了数据驱动无模型迭代前馈控制器，提高系统对噪声和其他干扰的鲁棒性，同时，证明了在无模型迭代前馈作用下，连续参考输入跟踪误差的有界性和闭环系统的稳定性；其次，构建了自适应陷波滤波器来消除平台谐振的影响，对误差信号进行快速傅里叶变换，并设计谐振频率在线提取算法，实现对陷波滤波器参数的在线实时整定，来进一步提升轨迹跟踪精度；最后，利用所设计的无模型迭代前馈控制器和自适应陷波滤波器对压电微动台进行轨迹跟踪实验。实验结果表明：在跟踪三角波信号时，与单独比例-积分（Proportional Integral，PI）控制和结合自适应陷波滤波器的PI控制相比较，最大跟踪误差分别减小78.25%和70.83%，能够有效提升平台的稳定性和跟踪精度。

Abstract

In order to eliminate the dependence of the high-precision control of the piezoelectric driven compliant micro-positioning stage on its uncertain dynamic model， a data-driven model-free iterative feedforward compensation and adaptive notch filtering control method were proposed to improve the tracking performance of the stage. Firstly， a data-driven model-free iterative feedforward controller is established to improve the robustness of the system to noise and other interferences， and at the same time， the boundedness of the tracking error with continuous reference input and the stability of the closed-loop system under the action of model-free iterative feed-forward are demonstrated. Secondly， an adaptive notch filter was constructed to eliminate the influence of stage resonance， a fast Fourier transform was performed on the error signal， and an online resonant frequency extraction algorithm was designed to realize the online real-time tuning of the notch filter parameters to further improve the trajectory tracking accuracy. Finally， the trajectory tracking experiment of the piezoelectric micro-motion stage was carried out by using the designed model-free iterative feedforward controller and adaptive notch filter. The experimental results show that when tracking the triangular wave signal， the maximum tracking error is reduced by 78.25% and 70.83%， respectively， compared with the PI controllor alone and the PI controllor combined with the adaptive notch filter， which can effectively improve the stability and trajectory tracking accuracy of the stage.

关键词

压电微动台数据驱动迭代前馈在线谐振抑制自适应陷波滤波器

Keywords

piezoelectric micro-motion stagedata-driven iterative feedforwardonline resonance suppressionadaptive notch filter

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