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Research progress of full-spatial frequency error measurement and defect detection technology for extreme ultraviolet optical components
Modern Applied Optics | 更新时间：2025-09-30

    • Research progress of full-spatial frequency error measurement and defect detection technology for extreme ultraviolet optical components

    • “Focusing on ultra precision manufacturing of optical components, the mechanism of surface error formation and detection technology challenges were analyzed, providing technical references for the localization of high-performance optical components.”
    • Optics and Precision Engineering   Vol. 33, Issue 17, Pages: 2661-2690(2025)

    • DOI：10.37188/OPE.20253317.2661    

      CLC： TN247
    • CSTR：32169.14.OPE.20253317.2661    

    • Received：20 June 2025，

      Revised：2025-07-29，

      Published：10 September 2025

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  • LI Jiahui,KUANG Cuifang,XU Yueshu,et al.Research progress of full-spatial frequency error measurement and defect detection technology for extreme ultraviolet optical components[J].Optics and Precision Engineering,2025,33(17):2661-2690. DOI： 10.37188/OPE.20253317.2661. CSTR： 32169.14.OPE.20253317.2661.

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