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Issue 12 ， 2017
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A displacement measurement system for ultra-precision heterodyne Littrow grating interferometer
Abstract：The ultra-precision displacement measurement was researched for the work table of a Scanning Beam Interference Lithography (SBIL) tool to improve its environmental robustness. For the displacement measuring requirement of the work table of the SBIL tool, a novel heterodyne Littrow Grating Interferometer (GI)displacement measurement system with high environmental robustness was proposed. The measuring principle of the heterodyne Littrow grating interferometer was introduced, and the design of the system and Keywords：scanning beam interference lithography;displacement measurement;grating interferometer;heterodyne interferometer;environmental robustness- 125
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Published：2020-07-07 -
Ultraprecision microgroove machining of nickel phosphorous plating mold for glass molding
Abstract：The optimal adjacent amount range is an importance parameter in ultra precision microgroove machining of nickel phosphorous (Ni-P) plating mold for glass molding. This paper proposes a method by using small cross angle microgroove cutting to test the optimal adjacent amount range in the process of single point diamond cutting of microgrooves rapidly. In this method, the limits of the adjacent amount range is forecasted based on the similarity of the material removal form between the small cross angle microg Keywords：mold manufacturing;nickel phosphorous plating;microgrooves cutting;brittle-ductile transition;glass molding- 72
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Published：2020-07-07 -
Optical system of echelle spectrometer based on DMD
Abstract：An echelle spectrometer with a new optical path based on a Digital Micro Device (DMD)was proposed and a new spectrum receiving method was used to reduce the cost of the grating spectrograph and the complexity of data processing. The DMD with single wavelength getting function and an one-dimensional photomultiplier (PMT) were combined to receive spectral information of the echelle spectrometer. By which, the cost of the instrument was reduced and the spectral restore algorithm for the echelle spectrometer an Keywords：echelle spectrometer;optical design;Digital Micromirror Device (DMD);Photomultiplier Tube (PMT)- 126
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Published：2020-07-07 -
Aberration correction technique of Offner imaging spectrometer
Abstract：The working principle, structure characteristics and advantages of the optical system in an Offner imaging spectrometer are introduced based on a concentric structure. The research and development of the Offner imaging spectrometer are overviewed. It describes in detail the commonly used three kinds of correction aberration ways, namely by changing optical element adjustable structure to correct the aberration, by aberration theory analysis based on single grating to correct the aberration and by design of Keywords：Offner concentric structure;imaging spectrometer;aberrations;convex grating- 99
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- 27
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Published：2020-07-07 -
Analysis and verification of diffraction rules of blazed transmission grating
Abstract：Based on the scalar theory, the influence of the blazed transmission grating with different groove angles or different groove densities on the used wavelength was researched and the energy distribution of the diffraction light of the blazed transmission grating was deduced. It was concluded that the relationship between the diffraction angle and the incident angle of the diffracted grating in the diffraction direction with the strongest energy could satisfy the Snell's law. The relationship among the angle Keywords：transmission grating;blazed grating;diffraction efficiency;blazed angle;blazed wavelength- 117
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Published：2020-07-07 -
Freestanding non-periodic GaN gratings in visible wavelength region
Abstract：On the basis of Rigorous Coupled Wave Analysis(RCWA), an array of freestanding non-periodic GaN gratings were proposed to control the phase of an incident beam in the visible wavelength region. Firstly, the Finite Difference Time Domain(FDTD) method was used to calculate the optical responses of non-periodic GaN gratings based on the parameters such as period and duty cycle. Then, a double-sided process and nitride back thinning technology were developed to fabricate freestanding non-periodic GaN gratings o Keywords：non-periodic GaN gratings;membrane grating;freestanding membrane;angular resolved micro-reflectance;photoluminescence- 69
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- 15
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Published：2020-07-07 -
Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic
Abstract：A measuring path for grating replication and mosaic was designed based on interferometric method. In consideration of the difficulty of measuring incident light angles in the optical path for grating replication and mosaic, the influence of the angle error of the incident light on the grating replication and mosaic was analyzed. A mathematical model of mosaic grating errors was established, and the tolerance of the mosaic grating errors was given. According the requirement of incident light angle in the opt Keywords：grating mosaic;grating replication;mosaic error;error analysis- 120
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Published：2020-07-07 -
Fabrication of bilayer metallic nano gratings in mid-infrared region based on flexible nanoimprint lithography
Abstract：In nanoimprint lithography of infrared metallic gratings, the grating structure is easily damaged by hard template nanoimprint lithography and their polarization characteristics would be reduced. This paper proposes a flexible nanoimprint lithography as the alternative method to fabricate the bilayer metallic nano grating with a height of 100 nm and a thickness of 40 nm. The grating is suitable for working at 3-5 μm and its main parameters are the period in 200 nm, line width in 100 nm, and the aspect ratio Keywords：nano grating;mid-infrared grating;metallic grating;flexible nanoimprint lithography;IPS (Intermediate PloymerSheet);thermal evaporation- 73
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- 19
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- 5
Published：2020-07-07 -
Design of KBBF crystal grating coupler in deep ultraviolet band
Abstract：The double frequency characteristics of KBe2BO3F2(KBBF) crystals were analyzed. A new KBBF crystal grating coupler was designed with combination of the base wave grating coupling and the total reflection properties of KBBF crystals. The design principle of KBBF crystal grating coupler was introduced.By etching diffraction grating on the surface of a KBBF crystal, the diffraction order matching with the grating was chosen to generate double frequency. The total reflection in the KBBF crystal was used to incr Keywords：KBBF crystal;deep ultraviolet nonlinear optical crystal;laser crystal;SHG conversion;coupling device- 108
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- 12
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Published：2020-07-07 -
Parylene-enhanced SAW sensor and its temperature response
Abstract：According to the requirement of Surface Acoustic Wave (SAW) sensors for quality factors, long life and low costs, a Parylene enhanced SAW sensor was developed. In consideration of metal stripping process, the LOR stripping rubber and AZ5214 double-layer spin-coating process were used to produce a trapezoidal structure, and the traditional optical lithography was used to fabricate a 2 μm superfine fork finger electrode. By utilizing MEMS technology, the sensor implements the miniaturization, but also the qua Keywords：Surface Acoustic Wave (SAW) sensor;trapezoidal structure;metal stripping;parylene enhancement;temperature- 61
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- 15
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Published：2020-07-07 -
Circular grating filters with multiple resonant peaks
Abstract：A guided mode resonant Circular Grating Filter (CGF) was proposed to realize its multiple band filter in the visible light regions. The reason for the formation of multiple resonance peaks in the CGF was analyzed theoretically under the polarization of the same incident beam. The freestanding CGFs with the thickness of 70 nm were realized on HfO2-on-silicon by micro/nano machining technology. An 1D linear grating was used to simulate the reflection spectrum of the circular grating. By changing the polarizat Keywords：diffraction grating;subwavelength structure;micro-nano machining;guided mode resonance;grating filter- 58
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- 15
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Published：2020-07-07
Grating Micro/Nano Fabrication
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Femtosecond laser induced surface micro-and nano-structures by orthogonal scanning processing
Abstract：With controlling the femtosecond (fs) laser polarization and scanning direction, the regular distribution of composite micro/nano structures was induced on the surfaces of silicon and stainless steel by Orthogonal Line Scanning Processing (OLSP). The influence of laser fluence on the micro/nano structures was studied. The experimental results show that two-dimensional (2D) composite structures nested with periodic ripples and nanoholes are induced on the silicon wafer surface, however, nanorod arrays at the Keywords：femtosecond pulsed laser;laser ablation;nanostructured materials;micromachining- 75
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- 18
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Published：2020-07-07 -
Subsurface damage of sapphire crystal after lapping with boron carbide abrasives
Abstract：The formation mechanism of subsurface damage of sapphire materials was introduced. In consideration of the boron carbide abrasives with advantage of smaller subsurface damage, the subsurface damage of a sapphire crystal after lapping by boron carbide abrasives with different particle sizes was studied based on the loose abrasive lapping method. The lapped sapphire wafer was etched by KOH chemical corrosion processing technology, the subsurface damage morphology of the sapphire crystal was indirectly reflect Keywords：sapphire crystal;subsurface damage;loose boron carbide abrasive;KOH chemical corrosion;surface roughness- 58
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Published：2020-07-07 -
3D geometric topographic measurement and error evaluation of arc diamond wheel
Abstract：For the purpose of detecting 3D geometric topography of an arc diamond wheel precisely and efficiently in aspheric element processing, the methodology of on-machine measurement and the error evaluating of 3D geometric topography were proposed. Firstly, the mathematical model of screw-scanning track for the diamond wheel was established, and the profile data of the diamond wheel were acquired by a displacement sensor. After data filtering and interpolating, the 3D geometric topography of the diamond wheel wa Keywords：aspheric grinding;arc diamond wheel;3D topography error;on-machine measurement;screw-scanning measurement- 72
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Published：2020-07-07 -
Simple harmonic vibration sensor with symmetrical electrode metal-core PVDF fibers
Abstract：Inspired by the structure and function of spider hair receptors, a simple harmonic vibration sensor with Symmetrical Electrode Metal-core Piezoelectric Fiber (SMPF) was designed and fabricated. The fiber body was prepared by extrusion-stretch method, and the symmetrical conductive adhesive was used as the external electrode in the longitudinal surface. After polarization, the simple harmonic vibration sensor with the SMPF was prepared. Based on the piezoelectric equation and the vibration theory, the theore Keywords：PVDF fiber;simple harmonic vibration sensor;extrusion stretching;surface symmetrical electrode- 66
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- 16
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Published：2020-07-07
Micro/Nano Technology and Fine Mechanics
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A portable retroreflection coefficient detector
Abstract：A portable retroreflection coefficient detector was designed according to relevant national standards to measure the retroreflection coefficients of the traffic signs, vehicle body markings and high visibility warning clothes. The measuring principles of retroreflection coefficients were analyzed and compared, and the retroreflection coefficient detector was developed based on the relative measurement method. White reflecting light was used as the divergent light source of the retroreflection coefficient de Keywords：retroreflector;coefficient of retroreflection measure;coefficient of retroreflection measurement system;relative method- 73
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Published：2020-07-07 -
Medical miniature fiber grating temperature sensing probe encapsulated with glass
Abstract：For body inner temperature measurement, especially for tumor hyperthermia temperature real-time monitoring, temperature sensing probes should have smaller volume, good toughness and resistance to electromagnetic interference ability. This paper focuses on a medical small optical fiber grating temperature sensing probe. The glass tube was used to encapsulate short fiber Bragg gratings to allow the probes to effectively avoid the error caused by stress and to eliminate the influence of metal packages on the d Keywords：temperature sensing;optical sensing;medical sensor;fiber Bragg grating;hyperthermia treatment- 66
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Published：2020-07-07 -
Measurement of cerebral blood flow parametres based on PDD-NIRS
Abstract：When thermal dilution method and indicator dilution method are used to measure Cerebral Blood Flow (CBF)parameters, it requires catheter insertion and timing blood collection, which will cause some damage to the human body. To solve their invasive and complex operations, a new noninvasive and rapid method for measuring the CBF was proposed based on Fick's law and Lambert's law. On the basis of Pulse Dye Densitometry/Near Infrared Spectrometry(PDD/NIRS), Indocyanine Green(ICG) was used as an indicator, and t Keywords：PDD-NIRS;cerebral blood flow;noninvasive detection;indocyanine green- 62
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- 17
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Published：2020-07-07 -
A two-dimensional photoelectric level inclination measuring system
Abstract：For error measurement and error compensation of large-scale machine tools in high-end equipment manufacture, a two-dimensional photoelectric level inclination measuring system was established based on the principle of optical auto-collimation and liquid surface reflection to measure the roll angle and the pitch angle of a machine tool. Firstly, a laser diode was used as a source of the system, and the inclination was doubled on the surface of the silicone oil through an optical auto-collimation system. Then Keywords：level inclination measuring;auto-collimation;liquid surface reflection;mean filtering;curve fitting- 343
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Published：2020-07-07 -
Terahertz CMOS transistor model and experimental analysis
Abstract：As the commercial CMOS (Complementary Metal Oxide Semiconductor) transistor model will lose the accuracy in a high frequency range, a nonlinear RCL transmission line model based on classic kinetic theory was developed with ADS software. The accuracy of proposed model and the working principle of the CMOS in THz range were discussed based on measured data. A simulation system for the nonlinear RCL transmission line model was constructed, and simulation results were compared with that of commercial model and Keywords：Terahertz CMOS;transistor detector;transistor detector model;scattering effect- 97
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Published：2020-07-07 -
Fabrication and optical performances measurements of flexible chalcogenide imaging fiber bundles
Abstract：The academic meanings of infrared imaging fiber bundles were researched and their fabrication technologies were given. A kinds of flexible chalcogenide infrared imaging fiber bundles were fabricated, and their characteristics were tested. By taking As40S58Se2 and As40S60 as the rod and tube materials, the fibers were drawn by rod-in-tube technique. The infrared imaging fiber bundle with a core diameter of 40 μm and a cladding diameter of 50 μm was prepared by man-machine-integration technique and it shows s Keywords：infrared imaging fiber bundle;infrared imaging technology;transmission efficiency;chalcogenide glass fiber;MTF- 76
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Published：2020-07-07 -
Optimum design of measuring sensor for circumference liquid film in gas-liquid annular flow
Abstract：By taking the circumference liquid films of cross-sectional pipe in gas-liquid two-phase annular flow for measuring objectives, a novel visual sensor with virtual two-visual angles was designed and optimized by combining a single high-speed camera and planar reflectors. Based on the virtual binocular stereo vision principle, a measurement model for visual sensor with two-visual angles was established. To maximize the effective measurement angle and to obtain much liquid film flow informations, the model of Keywords：vision sensor;annular flow;circumference liquid films;effective visual angle;optimization- 69
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Published：2020-07-07
Modern Applied Optics
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Design of tracker for mobile smart devices
Abstract：To apply augmented reality technology in mobile smart devices, a novel target tracker for the embedded system of a smart mobile device was proposed. In the stage of feature description, the binary feature was segmented rapidly and discriminative binary descriptors were established by fast brightness segment. In the stage of feature matching, a sparse searching template was proposed to improve the execution efficiency of the tracking algorithm. Initial target information was stored in a static library establ Keywords：binary feature;design for tracker;smart mobile device;sparse searching template;augmented reality- 85
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Published：2020-07-07 -
MEMS gyro signal reconstruction via layerwise and adaptive MP
Abstract：When noisy signals from a Micro-electromechanical System(MEMS) gyro are reconstructed by wavelet decomposes, it is difficult to choose the wavelet coefficients corresponding to the real signals. Therefore, a kind of Layerwise and Adaptive Matching Pursuit-based(LAMP-based)algorithm was proposed to solve the problem mentioned above. A sparse extraction construction of wavelet coefficients from the real MEMS gyro signal was established by recovering the sparsity of the wavelet coefficients of the noisy gyro s Keywords：MEMS gyro;signal reconstruction;wavelet transform;layerwise and adaptive MP algorithm- 47
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Published：2020-07-07 -
Feature-preserving scattered point cloud denoising
Abstract：To move the outliers and noisy points away from 3D point cloud data and to maintain the sharp features of the model simultaneously, a feature-based weighted fuzzy C-means point cloud denoising algorithm was proposed. Firstly, the point cloud was organized by K-D tree data structure and the large-scale outliers were removed by the statistics of r radius neighboring points. Then, the principal component analysis method was adopted to estimate the curvature and normal vector of point cloud data and the patches Keywords：point clouds de-noising;weighted fuzzy c-means;curvature weight;feature preserving;bilateral filter- 75
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Published：2020-07-07 -
Super-pixel calibration method of pixelated polarization camera
Abstract：For the non-uniformity of polarizer array caused by the difference of the lithography accuracy and the transmission of each pixel polarizer in a pixel polarized camera, a least squares based super-pixel calibration method with angle constraint was proposed. A mathematical model of calibration optimization algorithm with angle constraint was established, meanwhile, scalar gain and dark compensation parameters were added in the model. Finally, an integrating sphere calibration system by taking a micro-polariz Keywords：pixelated polarization camera;polarization imaging;super-pixel;angle constraint;non-uniformity calibration;convex optimization- 69
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Published：2020-07-07 -
Assessment of image quality for spot-detecting camera with anisotropic Gaussian fitting
Abstract：To evaluate quantitatively the image quality of a spot-detecting camera, a 2D anisotropic Gaussian fitting method was proposed. A spot-detecting camera was used to collect the infinity point target coming from a star simulator, and a certain area of energy distribution was obtained. Based on the correlation of the Gaussian energy distribution and the original distribution, this energy distribution was used in anisotropic Gaussian fitting to solve the parameters such as Gaussian radius and anisotropic factor Keywords：spot-detecting camera;pixel-phase error;background threshold;anisotropic Gaussian fitting;correlation;anisotropic factor- 60
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Published：2020-07-07
Information Sciences
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