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Issue 9 ， 2018
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Impedance matching of MEMS double-channel microwave power sensor
Abstract：To reduce the reflection loss of Micro-Electro-Mechanical System (MEMS) double-channel microwave power sensors and improve their measurement accuracy, it is necessary to investigate the impedance matching of MEMS cantilever beams. First, an analytical model of the S-parameters was constructed using the structure of the MEMS double-channel microwave power sensor. The impedance matching of the MEMS double-channel microwave power sensor was analyzed, and the relationship between the spacing of the MEMS cantile Keywords：Micro-Electro-Mechanical System (MEMS);power sensor;double-channel;cantilever;impedance matching;return loss- 63
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Published：2020-08-13 -
In-line thermal compensation of industrial robots based on binocular stereo vision
Abstract：When an industrial robot is operational continuously at a high speed, the heating of the motor and joint friction heat will result in a higher temperature in the manipulator; furthermore, the position of the end flange will drift and significantly influence the robot's repeatability and accuracy. To deal with these problems, in this paper, an in-line thermal compensation method based on binocular stereo vision was presented for an industrial robot working in the manufacturing field. A thermal compensation m Keywords：stereo vision;industrial robot;link parameter;thermal error;in-line compensation;vision sensor- 91
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Published：2020-08-13 -
Current status and trends in precision reducer lost motion measurement
Abstract：Lost motion is the key index for describing the performance of precision reducers. Although its definition appears simple, it involves complex measurement and evaluation problems. In this paper, the principle and method of precision reducer lost motion measurement were discussed from the aspects of static and dynamic measurements. The similarities and differences of different measurement methods, and their respective advantages and disadvantages were analyzed. In addition, the commonly used evaluation metho Keywords：precision reducer;lost motion;static measurement;dynamic measurement;evaluation method- 78
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Published：2020-08-13 -
High-accuracy digitized phase-sensitive demodulation ASIC design for silicon microgyroscope
Abstract：In order to remove the flicker noise introduced by phase-sensitive demodulation and realize a digitized silicon microgyroscope, a phase-sensitive demodulation Application Specific Integrated Circuit (ASIC) was designed. First, a low flicker noise digitized phase-sensitive demodulation scheme was proposed, and the system level analysis model of a third-order Cascade-Resonator-Feedforward (CRFF) sigma-delta ADC was defined. Then, the circuit level realization method of the sigma-delta ADC was detailed; the lo Keywords：silicon microgyroscope;Application Specific Integrated Circuit(ASIC);sigma-delta ADC;phase sensitive demodulation;flicker noise- 57
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Published：2020-08-13 -
Preparation and properties of reinforced transparent electronic encapsulant
Abstract：To improve the mechanical property of transparent electronic encapsulant, reinforced transparent electronic encapsulant was obtained by additional method at room temperature. Firstly, vinyl-terminated polysiloxane was synthesized by ring-opening polymerization. Using Si-H-terminated polysiloxane as crosslinking agent and platinum complexes as catalyst, the transparent gum that cured at room temperature was prepared and subsequently reinforced by filling in MQ silicone resin. The influence of the amount of M Keywords：MQ silicone resin;encapsulant;transmittance;mechanics;insulation- 65
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Published：2020-08-13 -
Measurement of full-field strain incell phone dropping test by high-speed 3D digital image correlation method
Abstract：A three-dimensional deformation method was proposed based on digital image correlation and binocular stereovision to measure the deformation and strain in a cell phone drop test and a 3D full field strain optical measuring system was developed. To solve a problem inherent in the process of collision due to falling in mobile phones, where the change in angle led to a high rate of failure in speckle matching leading to a serious defect in the strain field, high-speed cameras were used for rapid data acquisiti Keywords：high-speed 3D digital image correlation method;successive-frame benchmark;dropping test;full-field strain- 289
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Published：2020-08-13 -
Two-dimensional vibration energy harvester with radially distributed piezoelectric array
Abstract：In order to effectively collect vibration energy from multiple directions, a Piezoelectric Vibration Energy Harvester (PVEH) with a radially distributed piezoelectric array was proposed for scavenging two-dimensional (2D) vibration energy. By employing an arc-shaped piezoelectric array that was radially distributed on a flexible cylinder, the proposed harvester could scavenge vibration energy from various directions in a 2D plane. A novel concept, termed angle bandwidth, has also been introduced for describ Keywords：piezoelectric vibration energy harvester;two-dimensional vibration;radially distributed piezoelectric array;angle bandwidth- 88
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Published：2020-08-13 -
Design of vision detection algorithm and system for BGA welding balls
Abstract：A vision inspection system was proposed for realizing automated detection of Ball Grating Array (BGA) solder balls. An algorithm for solder ball feature extraction, defect recognition, and classification based on the Gaussian mixture model was developed. The recognition and classification algorithm analyzed weld ball defects according to the shape and size characteristics of the welding ball, and the identification algorithm analyzed typical defects by considering excessive solder, solder deficiency, and bu Keywords：computer vision;defect detection;Ball Grating Array(BGA);roundness;solder ball;classifier- 82
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Published：2020-08-13 -
Hydrophilic retention process of micro nozzle on polyimide surface
Abstract：When processing the polyimide material used to fabricate the nozzles of an inkjet printer head, it is necessary for the inner wall of the nozzle to be hydrophilic so that the operating frequency of the print head can be maximized. Currently, laser drilling followed by hydrophilic polymer filling is commonly used to achieve this. In an attempt to simplify the nozzle preparation process, the present study set out to devise a plasma-based method using a mixture of oxygen and argon, to simultaneously introduce Keywords：inkjet printing;mixed gas;plasma;polyimide;micro nozzle;hydrophilic- 68
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Published：2020-08-13 -
Development of wirelessly controlled atomic force microscope
Abstract：This paper proposes a contact mode Atomic Force Microscope (AFM) based on an embedded system and WiFi control. This AFM utilizes a portable power supply to drive the scanning/feedback circuit and an embedded system. The embedded system, which consists of a micro-computer (Raspberry Pi) and a micro AD & DA module, realizes WiFi-based communication with a laptop computer. Using this approach, a wirelessly controlled AFM is developed and experiments are performed using different samples. The results indica Keywords：Atomic Force Microscope(AFM);embedded system;WiFi;wirelessly controlled;portable power supply- 60
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Published：2020-08-13 -
Fluorescence detection of polycyclic aromatic hydrocarbon pollutants based on second-order calibration methods
Abstract：In order to achieve qualitative identification and quantitative analysis of complex systems of Polycyclic Aromatic Hydrocarbons (PAHs), fluorescence detection based on second-order calibration methods was proposed. The spectral data of complex systems of PAHs were identified and decomposed by exploiting second-order calibration methods to analyze three-dimensional fluorescence data. The fluorescence spectra of acenaphthene (ANA), naphthalene (NAP), and their mixture were obtained using a FS920 steady-state Keywords：fluorescence spectrum detection;polycyclic aromatic hydrocarbons;concentration detection;second-order calibration method;PARAFAC algorithm;SWATLD algorithm- 57
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Published：2020-08-13 -
Fabrication of ZnO flexible nanogenerator by electrodeposition
Abstract：In the present study, ZnO nanogenerators were fabricated on PET-ITO flexible substrates by electrochemical deposition. The ZnO nanorods were examined using an X-ray diffractometer, a scanning electron microscope, and an electrochemical workstation. The results show that the ZnO nanorods exhibit a preferred orientation of the (002) peak that varies with the deposition time. SEM images show that the ZnO nanorods that were electrodeposited in under 2 h exhibit a significant hexagonal wurtzite structure. SEM cr Keywords：ZnO nanogenerator;electrochemical deposition method;flexible substrate- 61
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Published：2020-08-13 -
Self-heating effect and its modification of high power bulk acoustic-wave resonators
Abstract：In order to study self-heating effects in the design of high-power bulk acoustic-wave resonators, an acoustic electromagnetic thermal multiphysics co-simulation method was proposed to simulate frequency shifts caused by self-heating. A corresponding design modification scheme was proposed to eliminate these frequency shifts. First, an initial resonator that satisfies the resonant frequency requirement was designed from the commonly used Mason model. Then, the frequency shifts caused by self-heating were obt Keywords：high power bulk acoustic-wave resonator;self-heating effect;frequency shifts;multi-physics co-simulation;design modification- 64
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Published：2020-08-13 -
High-throughput miniature multi-parameter oil contamination detection sensor
Abstract：To shorten the relative time required for detecting hydraulic oil contaminants and improving detection accuracies of solid contaminants, a high-throughput annular flow channel sensor with a built-in glass tube was designed. A pair of silicon steel plates was embedded in the glass tube to polymerize the magnetic field in the detection zone to improve the detection accuracy. The flow path passed through the inner bore of the double planar coil. By changing the manner in which the planar coil connects to the c Keywords：microfluidics;sensors;hydraulic fluids;contaminant detection- 79
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Published：2020-08-13 -
High-temperature corrosion resistance property of nano Fe-Al/Cr3C2 composite coating
Abstract：Nano composite coatings of the intermetallic compound Fe-Al/Cr3C2 were prepared and their high-temperature corrosion resistance was tested, in order to overcome the corrosion problems of easily corroded parts in power plants by thermal spraying. Using the reunion-granulation system we developed independently, highly active nano Fe-Al/Cr3C2 composite spraying materials successfully underwent reunion-granulation. High-velocity flame spraying was employed to spray the nano Fe-Al/Cr3C2 composite coating on the Keywords：nano;Fe-Al/Cr3C2;composite coating;reunion-granulation;high-temperature corrosion resistance- 69
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Published：2020-08-13 -
Molecularly imprinted based on CdTe quantum dots for the determination of sulfonamide residues in water
Abstract：Sulfonamides are widely used in aquaculture and pose a hazard to the environment. In order to detect the concentration of such drugs in the water environment, this study synthesized a sulfa drug quantum dot molecular imprinting sensor for rapid detection of sulfa antibiotics in water samples. On the surface of CdTe quantum dots, a molecularly imprinted fluorescent sensor with good optical properties was synthesized by the sol-gel method using sulfadiazine as a dummy template. Characterization of the polymer Keywords：quantum dots;sulfadiazine;molecular imprinting;fluorescence sensor- 89
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Published：2020-08-13 -
Structure improvement of tapped-line in microstrip interdigital filter
Abstract：According to the theory of coupled resonant circuits, the design of the microstrip interdigital filter is quite flexible. However, when the substrate thickness and the center frequency increase to a certain value, the external quality factor Qe cannot reach the theoretical value when using the traditional 50 Ω tapped-line. In order to increase the Qe in the actual design and match the source and load, the traditional tapped-line structure was improved to an SIR-like tapped-line, with the combination of a 50 Keywords：Micro-Eletro-Mechanical System(MEMS);coupled resonant circuit theory;microstrip filter;interdigital;tapped-line;structure improvement- 108
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Published：2020-08-13 -
Inversion of tikhonov and truncated singular value decomposition regularization for noisy dynamic light scattering data
Abstract：Tikhonov and truncated singular value decomposition regularization (TSVD) are two important methods in the dynamic light-scattering (DLS) data inversion. Different regularization methods will have different effects on the results of noisy measurement data. By using the Tikhonov of second-order differential matrix and TSVD method, the unimodal and bimodal distribution particles with different widths were retrieved under six kinds of noise levels. The results show that Tikhonov had better smoothness, the peak Keywords：light scattering;Tikhonov regularization;truncated singular value decomposition regularization;particle size inversion- 70
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Published：2020-08-13 -
Thin film Lamb wave sensors for pepsinogen Ⅰ detection
Abstract：To achieve the requirements of high sensitivity, high efficiency, simple operation, and low sample size for the detection of pepsinogen Ⅰ (PGI) in large-scale early screening of gastric cancer, a thin-film Lamb wave device with PGI antibody functionality was constructed in this study. The thin film in the device detection cavity was modified with self-assembly of the PGI antibody, which specifically captured and immobilized the PGI antigen in the samples on the surface of the thin film. The resultant increa Keywords：gastric cancer;thin film Lamb wave sensor;pepsinogen Ⅰ;immune- 65
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Published：2020-08-13 -
Thin film Lamb wave sensors for pepsinogen I detection
Abstract：To achieve the requirements of high sensitivity, high efficiency, simple operation, and low sample size for the detection of pepsinogen I (PGI) in large-scale early screening of gastric cancer, a thin-film Lamb wave device with PGI antibody functionality was constructed in this study. The thin film in the device detection cavity was modified with self-assembly of the PGI antibody, which specifically captured and immobilized the PGI antigen in the samples on the surface of the thin film. The resultant increase of mass on the surface led to change of the A0 mode center frequency, and the variation was positively correlated with the increment of mass absorbed on the chamber surface. Thus, the PGI antigen concentration in the samples was detected. The results showed that, when measuring the level of the PGI antigen, the thin-film resonance Lamb wave biosensor with PGI antibody functionality had a sensitivity of about 102.114 Hz/lg (ng/mL), theoretical limit of detection (LOD) of 0.176 ng/mL, and detection time for one sample of 40 min. Compared with the existing PGI detection technology based on optical detection, the Lamb wave sensor has the advantages of being a simple detection system with simple operation and no need for professional operators, and lower LOD than most optical detection methods, two orders lower than that of the electrochemical method of PGI detection. In conclusion, the thin-film resonance Lamb wave biosensor with PGI antibody functionality proposed in this paper has the advantages of low LOD, high sensitivity, high detection efficiency, and simple operation, which can satisfy the basic requirements of large-scale early gastric cancer screening.Keywords：gastric cancer;thin film Lamb wave sensor;pepsinogen I;immune- 42
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Published：2020-08-13 -
Uncertainty analysis of MEMS force gauges based on Monte Carlo method
Abstract：Due to their small size, the performances of microelectromechanical systems (MEMS) are susceptible to uncertainties associated with the micro-fabrication processes; thus, it is necessary to consider these uncertainties during the design stage. By conducting an uncertainty analysis of a typical MEMS force gauge, a load-deflection model was first derived based on the comprehensive elliptic integral solution. The model showed that the force gauge exhibits a nonlinear load-deflection relationship when the defle Keywords：MEMS force gauge;elliptic integral solution;uncertainty prediction;Monte Carlo method- 61
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Published：2020-08-13 -
Nanoparticle colloid self-induced pulsed cavitation jet polishing
Abstract：An optical surface processing method using the cavitation effect, termed as nanoparticle colloid self-induced pulsed cavitation jet polishing (NPCJP), has been proposed to precisely machine complex optical surfaces with enhanced machining efficiency. The NPCJP system has been developed and simulated by fluid dynamics simulation. The dynamic pressure, static pressure, fluid velocity and cavitation effect of the polishing flow field corresponding to a pulse period of 0.3 s, have been determined. NPCJP jet exp Keywords：self-induced pulse;cavitation;nano particle colloid;jet;polishing- 90
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Published：2020-08-13 -
Parylene-C enhanced quartz crystal microbalance based dissipation detecting system for aPTT measurement
Abstract：To address the need to rapidly detect blood coagulation in daily administration of anticoagulant for atrial fibrillation and thrombus patients and others, a Parylene-C enhanced quartz crystal microbalance (QCM) sensor and a dissipation detection system were designed and manufactured for the measurement of coagulation parameters. Parylene-C was used to enhance the peak-to-peak value and reusability of the QCM sensor. A dissipation detection system for piezoelectric sensors was designed using the principle of Keywords：Parylene-C;Quartz Crystal Microbalance (QCM);dissipation factor;blood coagulation detection;activated partial thromboplastin time (aPTT)- 87
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Published：2020-08-13 -
Effect on energy drift from temperature fluctuation at the Dreamline monochromator
Abstract：In order to ensure that energy drift from temperature fluctuation of the grating monochromator does not affect apparent energy resolution of the beamline, a high-accuracy constant temperature environment (CTE) was built for the monochromator. Combined with the design of Dreamline beamline at Shanghai Synchrotron Radiation Facility, the relationship between the temperature difference at the monochromator and the energy drift was established by the grating equation. Based on that, the CTE of the monochromator Keywords：grating monochromator;temperature fluctuation;energy drift;gas absorption spectra;energy resolution- 94
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Published：2020-08-13 -
Film structureenergy conversion components for MEMS initiators
Abstract：In order to meet the requirements of miniaturization, integration, and low energy of MEMS initiators, based on MEMS technology, a planar film structure energy conversion component with a "snake-shape" was designed. Using magnetic sputtering and other MEMS production technologies, we prepared energy conversion components with different resistive and base materials. Then, using scanning electron microscopy (SEM), atomic force microscopy (AFM), a low resistance tester, an infrared thermal imager, and other equ Keywords：MEMS;film structure;energy conversion components;film thickness- 81
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Published：2020-08-13 -
Optical design of a co-aperture system for 3-D remote sensing payload
Abstract：3-D remote sensing based on the combination of ladar and 2-D remote sensing data is one of the most important emerging trends in the field of remote sensing. We design a co-aperture optical system to be used for 3-D remote sensing payload. In order to use the spatial limitation of the satellite as input conditions, we modify the initial equation of the three-mirror system. The original parameters are determined from the solution of the modified equation and then a coaxial three-mirror system is designed. Th Keywords：coaxial three-mirror system;bias field;front tertiary mirror;3-D remote sensing;optical design- 98
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Published：2020-08-13 -
Optical-system design for large field-of-view three-line array airborne mapping camera
Abstract：In order to meet the design requirements of the optical system of a three-line array airborne mapping camera with large field-of-view, high resolution, low distortion, and high environmental adaptability, the structural design of a new optical system was developed. First, according to the overall requirements and the characteristics of stable platform installation, a single-lens technical solution was determined. Then, various parameters of the optical system were analyzed and calculated; the Lagrange Helmh Keywords：mapping camera;modulation transfer function;airborne environment adaptability;optical design;semi-telecentric structure- 95
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Published：2020-08-13
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