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Issue 9 ， 2019
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Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner
Abstract：Ultra-precision grid encoder is the key technology of immersion lithography scanner for 32nm-7nm node. Firstly, by analyzing the requirement and layout of grid encoder position measurement system of immersion lithography scanner, the basic requirement of special grid encoder for immersion lithography scanner is proposed. Secondly, for the present grating encoder, the research of basic optical path, phase detection, resolution multiplication, off-axis/rotation tolerance and dead-path restrain scheme is reviewed and analyzed, then the key problems for present scheme to the application of lithography scanner are proposed. Thirdly, facing to the nanometer accuracy requirement, as for the instrumental error of grid encoder, the research of the nonlinearity, dead-path, thermal drift and wave-front distortion error are reviewed and analyzed, and the key problems to achieve the sub-nanometer accuracy for grid encoder are proposed. Finally, the above review is summarized, which provide a reference for the special grid encoder of immersion lithography scanner.Keywords：immersion lithography scanner;optical interferential grating encoder;displacement measurement- 69
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Published：2020-08-13 -
Review of ultra-precision optical interferential grating encoder displacement measurement technology for immersion lithography scanner
Abstract：The ultra-precision grid encoder is the key technology of the immersion lithography scanner for 32-7 nm node. Firstly, by analyzing the requirements and layout of the grid encoder position measurement system of the immersion lithography scanner, the basic requirement of a special grid encoder for the scanner is proposed. Secondly, for the present grating encoder, research on the basic optical path, phase detection, resolution multiplication, off-axis/rotation tolerance, and dead-path restrain scheme is revi Keywords：immersion lithography scanner;optical interferential grating encoder;displacement measurement- 175
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Published：2020-08-13 -
Micro-droplet split digital microfluidic device with fan-shaped electrode
Abstract：To address the low success rate of droplet separation and the inaccurate daughter droplet volume on the square electrode, a digital microfluidic chip with fan-shaped electrode was proposed and its separation effect was studied. After analyzing the factors affecting droplet separation on the square electrode, the fan-shaped electrode was designed in combination with the advantages of crescent electrodes, dumbbell electrode, and bow electrodes. Compared with traditional separation, the novel chip can adjust t Keywords：digital microfluidics;electrowetting-on-dielectric;fan-shaped electrode;splitting;volume inaccuracy;coefficient of variation- 152
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Published：2020-08-13 -
Micro-texture law of ceramic artificial hip ball ultra-precision grinding
Abstract：Ceramic hip ball is one of the important parts in artificial hip replacement surgery. In order to realize the high-efficiency and high-quality processing of ceramic hip ball, a rotating ultrasonic assisted spherical grinding device was built in this paper. According to the motion characteristics of the device, the equation of the trajectory of the abrasive particle is established. Through the analysis of the equation, the forming law of the spherical micro-texture is deeply studied. The research results show that when the rotation speed of the ceramic ball and the rotation speed of the grinding wheel are mutually prime, the texture distribution of the spherical surface is more uniform, which provides an important theoretical basis for the optimization of the processing parameters.Keywords：ultra-precision machining;ceramic hip ball;grinding;rotary ultrasonic machining- 56
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Published：2020-08-13 -
Micro-texture law of ceramic artificial hip ball ultra-precision grinding
Abstract：The ceramic hip ball is one of the important parts in artificial hip replacement surgery. In order to realize the high-efficiency and high-quality processing of the ceramic hip ball, a rotating ultrasonic-assisted spherical grinding device was built in this study. First, the basic principle of rotary ultrasonic-assisted spherical grinding was introduced. Then, according to the motion characteristics of the device, the equation of the trajectory of the abrasive particle was established. Combined with the kin Keywords：ultra-precision machining;ceramic hip ball;grinding;rotary ultrasonic machining- 141
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Published：2020-08-13 -
Control system for an electromagnetic suspension and electrostatically drive rotating micro mirror
Abstract：In order to realize the rotation control of an electromagnetic levitation micromirror from -180° to +180°, the electromagnetic levitation, electrostatic drive, and closed-loop angle control used in this system were studied. First, the stator and rotor structures were designed and fabricated. Then, the relationship between levitation height and the frequency and amplitude applied to the coil were simulated and tested. The experimental results showed good agreement with the simulation results. On the basis of Keywords：electromagnetic suspension;electrostatically drive;micro mirror;control system- 71
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Published：2020-08-13 -
Fluorescence-enhanced aptamer sensor for dopamine detection
Abstract：Based on the unique physical properties of noble metal nanoparticles, a fluorescence sensor with signal amplification function was designed for detecting the concentration of dopamine. Based on the effect of metal fluorescence enhancement, the fluorescence signal was amplified by adding a spacer layer between the gold nanoparticles and fluorophore. First, the aptamer chemically modified with an SH bond was mixed with a gold nanoparticle solution to form a stable Au-S bond structure. Then, the DNA labeled wi Keywords：biosensor;AuNPs;Metal-Enhanced Fluorescence (MEF);aptamer- 120
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Published：2020-08-13 -
Fluorescence-enhanced aptamer sensor for dopamine detection
Abstract：Based on the unique physical properties of noble metal nanoparticles, a fluorescence sensor with signal amplification function is designed.Method : First, the modified aptamers were assembled onto the gold surface with Au-S bond. Then, the DNA labeled with fluorescent groups are bound to due to the complementary base pairing. By adjusting the sequence of nucleic acid aptamers to further optimize the experimental conditions, the maximum fluorescence enhancement effect was obtained. Result: Experimental results indicate that at a certain concentration ratio between the gold nanoparticle solution and aptamer, the maximum fluorescence enhancement was 2.35 times at the isolation layer thickness was 27 base A. Conclusion: It can effectively regulate the isolation layer thickness at the nanometer level, providing a stable signal amplification strategy.Keywords：biosensor;AuNPs;Metal-Enhanced Fluorescence (MEF);aptamer- 68
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Published：2020-08-13 -
Electrochemical Corrosion Resistance Property of Nano Fe-Al/Cr3C2 Composite Coating
Abstract：The electrochemical corrosion resistance properties of nano Fe-Al/Cr3C2 composite coating were tested. The ideal amount of nano Fe-Al/Cr3C2 reunion-granulation particle to be added was determined. Using three-electrode system, the electrochemical corrosion resistance properties of five kinds Fe-Al/Cr3C2 composite coatings were tested. These were micro Fe-Al/Cr3C2 composite coating, nano Fe-Al/Cr3C2 composite coating, and composite coating with additional 5%, 10%, and 15% nano Fe-Al/Cr3C2 reunion-granulation particles, respectively. Zview software was used to fit the AC impedance spectrum in order to analyze the electrochemical corrosion resistance action of coatings. SEM was used to analyze the corrosion surface of coatings. The results indicate that the best electrochemical corrosion resistance property of composite coatings was obtained by adding 5% nano Fe-Al/Cr3C2 reunion-granulation particles. Compared with other coatings, the coating with added 5% nano Fe-Al/Cr3C2 reunion-granulation particles has maximum self-corrosion potential of -0.775 V and minimum self-corrosion current of 0.280 mA/cm2. When the content of nano granulated particles is lower than the optimum value, the electrochemical corrosion resistance properties of coatings are because the content of nano granulated particles is too low to improve density and reduce pore size. When the content of nano granulated particles is higher than the optimum value, the electrochemical corrosion resistance property of coatings are nano granulated particles makes surface of coatings showing high chemical energy.Keywords：Nano material;Fe-Al/Cr3C2;composite coating;electrochemical corrosion resistance property;property- 57
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Published：2020-08-13 -
Electrochemical corrosion resistance property of nano Fe-Al/Cr3C2 composite coating
Abstract：The electrochemical corrosion resistance properties of nano Fe-Al/Cr3C2 composite coating were tested. The ideal amount of nano Fe-Al/Cr3C2 reunion-granulation particle to be added was determined. Using three-electrode system, the electrochemical corrosion resistance properties of five kinds Fe-Al/Cr3C2 composite coatings were tested. These were micro Fe-Al/Cr3C2 composite coating, nano Fe-Al/Cr3C2 composite coating, and composite coating with additional 5%, 10%, and 15% nano Fe-Al/Cr3C2 reunion-granulation Keywords：nano material;Fe-Al/Cr3C2;composite coating;electrochemical corrosion resistance property- 111
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Published：2020-08-13 -
Inductive oil detecting sensor based on magnetic nanomaterial
Abstract：In order to increase the stability of the inductive oil contaminant detection sensor and improve the detection accuracy of ferromagnetic and non-ferromagnetic contaminants. In this paper, an inductive oil contaminant detection sensor with built-in magnetic nanoparticles is designed. The solenoid coil is filled with a nano-particle layer, which adsorbs the pollutant particles and enhances the magnetic field strength of the detection area, enhancing the magnetization and eddy current effects. Method : A 300 μm microchannel was made using the model material, which passed through the sensing unit. Ferromagnetic and non-ferromagnetic contaminants can be distinguished when contaminants pass through the microchannel through the sensing unit. At the same time, two sets of contrast experiments were carried out using two sensors with or without magnetic nanoparticle layers. Result: The experimental results show that the inductive oil detection sensor of magnetic nano-material has higher detection accuracy and lower detection limit. The detection accuracy of ferromagnetic particles of 20-70μm are improved by 20-25%, and for non- ferromagnetic particles of 80-130μm are improved by 20-25%. Conclusion: The method is based on microfluidic detection technology, and has the advantages of small volume and high detection precision. At the same time, it provides technical support for rapid detection of hydraulic oil contaminants, which have a great significance for fault diagnosis and life prediction of hydraulic systems.Keywords：microfluidic;inductive sensor;magnetic nanomaterial;contaminants detection- 50
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Published：2020-08-13 -
Inductive oil detecting sensor based on magnetic nanomaterial
Abstract：In order to increase the stability of the inductive oil contaminant detection sensor and improve the detection accuracy of ferromagnetic and nonferromagnetic contaminants, an inductive oil contaminant detection sensor with built-in magnetic nanoparticles was designed in this paper. The solenoid coil was filled with a nanoparticle layer which adsorbs the pollutant particles and enhanced the magnetic field strength of the detection area, enhancing the magnetization and eddy current effects. A 300 μm microchan Keywords：microfluidic;inductive sensor;magnetic nanomaterial;contaminants detection- 110
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Published：2020-08-13 -
Z-type piezoelectric vibration energy harvesting device
Abstract：In order to solve the problem that the piezoelectric vibration energy harvesting structure is difficult to meet the acquisition requirements of wide frequency band, 3D and high efficiency at the same time, a piezoelectric vibration energy harvester structure with the concentrated mass replaced by Z-type beam was proposed. Nonlinear mass was introduced by the Z-type beam structure, which enabled more modal of the harvester to be concentrated in the low frequency range, increased the acquisition frequency ban Keywords：piezoelectric vibration;energy harvesting;Z-type beam structure;wide frequency band;3D acquisition;nonlinear mass- 130
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Published：2020-08-13 -
Z-type piezoelectric vibration energy harvesting device
Abstract：In order to solve the problem that the piezoelectric vibration energy harvesting structure is difficult to meet the acquisition requirements of wide frequency band, 3D and high efficiency at the same time, a piezoelectric vibration energy harvester structure with the concentrated mass replaced by Z-type beam was proposed. Nonlinear mass was introduced by the Z-type beam structure, which enabled more modal of the harvester to be concentrated in the low frequency range, increased the acquisition frequency band, and realized the 3D energy harvesting function of the harvester by the instability of the horizontal and longitudinal Z-type beam structure. The dynamic characteristics of the Z-type beam after increasing the width were analyzed, and the energy acquisition performance of the piezoelectric array was discussed. Models and experimental platforms were built for simulation and experimental verification. Then, the dynamic characteristics of the Z-type piezoelectric beam was compared with those of the spiral beam structure and classic cantilever beam mass structure. The simulation and experimental results show that when the beam has seven folded layers, the number of modes with frequency within 50 Hz can reach nine, and in the 1-100 Hz range and 1 Hz harmonic excitation, the peaks of the forward acquisition voltage-frequency curve reaches up to four and are mainly concentrated in the 0-40 Hz range. The maximum open circuit voltage is up to 16 V, greatly widening the acquisition frequency band. The maximum open circuit voltage peaks in both the horizontal and vertical directions are above 10 V, while the peaks of the horizontal and vertical acquisition voltage-frequency curves are greater than four, achieving 3D energy acquisition. The maximum output power reaches 0.18 mW when the load is 10 kΩ. When the width of the Z-type beam is increased to 100 mm, the number of modes is greater than 30 in the range of 200 Hz. The peak number of acquisition voltage curves of double patch in series is up to four. The maximum voltage reached 14 V, which proves that the Z-beam is suitable for the arrangement of the piezoelectric array.Keywords：piezoelectric vibration;energy harvesting;Z-type beam structure;wide frequency band;3D acquisition;nonlinear mass- 58
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Published：2020-08-13 -
Fabrication and characterization of anti-fouling and self-cleaning surface for aluminum alloy
Abstract：A method for controllable fabrication of an anti-fouling and self-cleaning surface with micro/nano lotus-like structures on 6061-T6 aluminum alloy was developed in this paper. The facile and low-cost fabrication process consisted of shot blasting, electrochemical oxidation, and surface modification with fluoroalkylsilane. The micro-pit structure was fabricated by shot blasting the aluminum alloy surface. The nano-coral structure was prepared by electrochemical oxidation. Then, the anti-fouling and self-clea Keywords：aluminum alloy;shot blasting;electrochemical oxidation;anti-fouling and self-cleaning- 71
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Published：2020-08-13 -
Design and performance analysis of piezoelectric micro-spray dispensing system based on compliant mechanism
Abstract：A novel piezoelectric microspray dispensing system was designed based on a compliant mechanism. The system consisted of a glue supply device, driving device, and pin-impact valve. The motion characteristic of the dispensing system was that the elastic deformation of the compliant mechanism drived the colliding needle to move in a straight line to and fro, so that the opening and closing of the colliding needle valve could perform the function of microspray dispensing. The driving force, output displacement, Keywords：micro-spray dispensing system;compliant mechanism;piezoelectric actuator;pseudo rigid body method- 95
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Published：2020-08-13 -
Flexible interdigital piezoelectric vibration generator based on BaTiO3/GO/PDMS lead-free composite
Abstract：Traditional piezoelectric capturing systems have the disadvantages of narrow work bandwidths and fragile piezoelectric ceramic materials, which are unable to meet the requirements of wearable, miniaturized, or portable devices. This paper reports on high performance composite films based on BaTiO3/Graphene Oxide/polydimethyl siloxane (BaTiO3/GO/PDMS) with different GO content. GO with a large specific surface and strong fluidity was employed as a carbon-based conductive phase material to form micro-capacito Keywords：piezoelectric vibration generator;BaTiO3/GO/PDMS;lead-free composite;flexible interdigital structure- 107
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Published：2020-08-13 -
Flexible interdigital piezoelectric vibration generator based on BaTiO3/GO/PDMS lead-free composite
Abstract：Traditional piezoelectric capturing system has the defects including narrow work bandwidth and fragile with piezoelectric ceramics materials, which is unable to meet the new requirements of wearable, miniaturization, portable devices and so on. This paper report the high performance composite films based on BaTiO3/Graphene Oxide/polydimethyl siloxane (BaTiO3/GO/PDMS) with different GO content. GO with large specific surface and strong fluidity was employed as a carbon-based conductive phase material to form micro-capacitors in the ferroelectric composite and thus enhance the piezoelectric performance of the sample. The as-prepared BaTiO3/GO/PDMS composite films with 0.6 wt% GO showed a dielectric constant of 185 and a conductivity of 8.5 10-5 S/m. A remanent polarization of 13.47 μC/cm2 can be obtained, which is 28% higher than that of the pure BaTiO3/PDMS films. Meanwhile, the synthesized BaTiO3/GO/PDMS composite film exhibits a maximum output voltage of ～7.71 V, which is almost 2.78 times higher than that without GO. The performance of lead-free piezoelectric nanogenerators is significantly enhanced after compounding with GO materials. Moreover, the unsymmetrical interdigital harvester with BaTiO3/GO/PDMS piezoelectric materials has been fabricated. The results indicated that the output voltage of the harvester compounding with GO increased and -3dB bandwidth of harvesters increased from 8.7 Hz (without GO) to 11.2 Hz (with GO). The proposed BaTiO3/GO/PDMS lead-free composite piezoelectric nanogenerator has great prospect in flexible energy harvesting.Keywords：BaTiO3/GO/PDMS;lead-free composite;Flexible interdigital etructure;piezoelectric vibration generator- 42
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Published：2020-08-13 -
Effect of nozzle cavity on polishing ability of light coupled colloid jet
Abstract：In order to achieve ultra-precision polishing of the workpiece surface, a UV-induced nanoparticle colloid jet processing system was established. The hydrodynamic characteristics, polishing process, and ultra-smooth surface morphology of the UV-induced nanoparticle colloid jet processing of two nozzles with different cavity structures were studied. Firstly, conical and cosine opto-hydraulic coupling nozzles were designed according to the requirements of opto-hydraulic coupling. Then, three-phase flow simulat Keywords：ultra-smooth surface;jet polishing;light-liquid coupled nozzle;titanium dioxide nanoparticles;surface roughness- 124
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Published：2020-08-13 -
Effect of Nozzle Cavity on Machining Performance of Light Coupled Colloid Jet
Abstract：Objetive: In order to achieve ultra-precision polishing of workpiece surface, an UV induced nanoparticle colloid jet processing system has been established. The hydrodynamic characteristics, polishing process and ultra-smooth surface morphology of UV induced nanoparticle colloid jet processing were studied. Methods: Firstly, conical and cosine opto-hydraulic coupling nozzles were designed according to the requirements of opto-hydraulic coupling. Then, three-phase flow simulation of non-submerged jet was carried out for two kinds of opto-hydraulic coupling nozzles, and the flow track and flow field distribution of nanoparticles were compared and analyzed. Then, light coupled colloid jet polishing experiments were carried out on the same single crystal silicon workpiece with two kinds of nozzles using titanium dioxide nanoparticle colloid as polishing fluid. Finally, the surface before and after polishing was characterized and compared. Results: The results show that the combined velocity (20.73m/s) and dynamic pressure (2.5MPa) obtained by the cosine nozzle are higher than that of the conical nozzle combined velocity (7.12m/s) and dynamic pressure (0.2MPa), and the average residence time of nanoparticles in the cosine nozzle (0.005s) is shorter than that of the conical nozzle (0.023s). Under the same polishing parameters， the surface roughness (Rq 0.810 nm, Ra 0.651 nm) of the workpiece polished by cosine nozzle is lower than that of conical nozzle. Conclusion: Using cosine nozzle in UV induced nanoparticle colloid jet processing can obtain higher polishing efficiency and lower surface roughness than conical nozzle.Keywords：ultra-smooth surface;jet polishing;light-liquid coupled nozzle;Titanium dioxide nanoparticles;Colloid- 41
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Published：2020-08-13 -
Design and fabrication of device for cell dynamic culture in microfluidic chip
Abstract：Cell culture is the basis of cell research. In order to realize long-term dynamic culture and real-time observation of cells in a microfluidic chip, a microfluidic cell dynamic culture device was designed and fabricated. First, based on the "split" arrangement idea, a three-dimension model of the culture box, control box, and pump box were set up using the software, SolidWorks; hardware and software were designed taking the functional demands into consideration. Second, based on the Comsol software platform Keywords：dynamic culture;split-body type;temperature and humidity control;stability- 102
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Published：2020-08-13 -
Study on transmission reliability of long life space electric slip ring
Abstract：The life of a satellite electric slip ring is approximately 100, 000 rounds. To verify the reliability of a column slip ring at the end of one million rounds, we performed a two-million-round life test. As slip rings contain both a single brush wire and a brush bunch, this test compareed the transmission error of different types of signals that pass through single brush wires and brush bunches. The structure of the brush wire was vital in determining the transmitting stability of a space electric slip ring. Keywords：satellite electric slip ring;brush structure;friction pair;dynamic contact resistance;transmission error- 88
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Published：2020-08-13 -
Study on the Transmission Reliability of Long Life Space Electric Slip Ring
Abstract：The life of satellite electric slip ring is about one hundred thousand, in order to verify the reliability of column slip ring at the end of one million rounds, we hold a two million rounds life test. Slip ring contains both single brush wire and brush bunch. This test compares the transmission error of different kind of signals passing through single brush wire and brush bunch. The structure of brush wire is of great value for the transmitting stability of space electric slip ring. Besides, this paper verifies the main influencing factors such as different temperature, revolving speed, and vacuum. Therefore, the experiment demonstrates that CAN and RS422 signals transmission error shows brush bunch rings, which has 0.6 percent of voltage drop and no transmission error, is more stable than single brush wire rings in the vacuum，and the signal transmission speed is 500kbps。The single brush rings’ maximum voltage drop is over 100 percent and transmission errors is about 16.1 percent. It proves that the design of brush bunch can effectively improve the reliability of signal transmission and prolong the service life of slip rings which is of great value for the reliability of satellites.Keywords：satellite electric slip ring;Brush Structure;Friction pair;Dynamic contact resistance;Transmission error- 58
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Published：2020-08-13 -
Research on optical fiber multi-wavelength laser for measuring displacement precisely
Abstract：Three types of optical fiber lasers that can emit one, two, or three wavelengths simultaneously were researched and experimented on. The three types of lasers could be applied to measure displacement, step height, and absolute distance, respectively. By employing the characteristic that a fiber Bragg grating could only reflect a Bragg wavelength, fiber Bragg gratings have been used as the reflective mirrors of the laser resonant cavities and wavelength selectors. As such, a single laser resonant cavity and Keywords：optical fiber laser;multiple wavelength laser;wavelength stability;displacement measurement- 95
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Published：2020-08-13 -
Design and research of high-sensitivity wear debris detection sensor
Abstract：A wear debris detection sensor used to detect inductance and resistance parameters was presented, which could improve the detection sensitivity of the inductive sensor for nonferromagnetic metal particles. The designed sensor mainly consisted of a ring silicon steel sheet and planar coil. The silicon steel sheet enhanced the magnetic field strength of the detection region, making the magnetization effect and eddy current effect of the metal particles more intense, thereby improving the sensitivity of induct Keywords：inductance parameter;resistance parameter;high sensitivity;hydraulic oil- 96
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Published：2020-08-13 -
Spindle radial motion error measurement using a circular grating and a autocollimator
Abstract：The purpose of this paper is to propose an online noncontact method for measuring the radial rotation error of the spindle and verify the accuracy of the method. This method used a circular grating, two reading heads, an annular plane mirror, and a laser autocollimator. First, the circular grating and annular plane mirror were mounted on the spindle, and the installation error was calibrated in the double center device. Then, the spindle was mounted on the turntable, the double reading head was mounted on t Keywords：circular grating;dual reading-head;auto-collimator;radial motion error;error separation- 109
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Published：2020-08-13 -
Preparation and properties of novel highly flexible and stretchable conductive film electrode
Abstract：In order to solve the problem that the tactile sensors for complex three-dimensional carrier surfaces or moving joint parts of robot are difficult to achieve high flexibility and flexibility, a new method based on nano-materials combined with horseshoe shape and pre-stretching process was proposed. Silver nanowires were implanted with a horseshoe shape into the surface of the pre-stretching-treated PDMS film. Then, a type of conductive composite material with high flexibility and stretchability was obtained Keywords：high flexibility and stretchability;silver nanowires;Polydimethylsiloxane(PDMS);conductivity;pre-stretch- 112
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Published：2020-08-13
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