Soft X-ray and VUV reflectometer system consists of VUV source
monochromator
reflectometer
electronics unit and microcomputer. The evaluation of optical mirrors
gratings and image system can be completed by this system. The vacuum chamber of the reflectometer is 800mm in diameter by 1200mm in length. The system can be operated from 25nm to 100nm. The sample stage permits rotation with respect to incident beam with resolution of 0.03 degree and a travel range extending between 0 and 90 degree.