This paper describes our design considerations for the Soft X-ray Lithograph Beamline constructed for Synchrotron Radiation Lab of BEPC by our Institute during the period of Seventh 5-year plan. The key technical problems in are solved the physical designs of the beamline
scanning and adjusting mechanism of the mirror
laser-simulating source
vacuum system
electronics and microcomputer control system. In addition
it is presented that experimemtal results of pressure-resisting intensity in accord with theory calculation
for the ultra-thin Berylium window that is one of the key diveces in the beamline.