崔天宏, 王立鼎, 吕琼莹, 汪洪涛. IH工艺在微机械中的应用[J]. 光学精密工程, 1994,(6): 18-23

Cui Tianhong, Wang Liding, Lu Qiongying, Wang Hongtao. IH PROCESS IN THE APPLICATION OF MEMS[J]. Editorial Office of Optics and Precision Engineering, 1994,(6): 18-23

崔天宏, 王立鼎, 吕琼莹, 汪洪涛. IH工艺在微机械中的应用[J]. 光学精密工程, 1994,(6): 18-23 DOI：

Cui Tianhong, Wang Liding, Lu Qiongying, Wang Hongtao. IH PROCESS IN THE APPLICATION OF MEMS[J]. Editorial Office of Optics and Precision Engineering, 1994,(6): 18-23 DOI：