Cui Tianhong, Wu Qingwen, Wang Liding, Lu Qiongying. Fem and Experiment or Piezoelectric Micromotors[J]. Editorial Office of Optics and Precision Engineering, 1995,(6): 40-43
Cui Tianhong, Wu Qingwen, Wang Liding, Lu Qiongying. Fem and Experiment or Piezoelectric Micromotors[J]. Editorial Office of Optics and Precision Engineering, 1995,(6): 40-43DOI:
The piezoelectric micromotor is a new project in the field of Micro Electro Mechanical Systems
In this paper
FFM of the piezoelectric micromotor has been conducted in dynamicsin order to get some important results such as resonance frequencies
shearing force on thestator surface
etc.. The experiment of the piezoelectric micromotor has also been carriedout so that the FEM results of the piezoelectric micromotor has been proved.This has laid asolid foundation for the piezoelectric micromotor optimum design.