The paper introduces the progress of international micro machine research works in recent 3-5 years

describes that the new micro fabrication technology is trending to make three dimension cubic structure of high thick high aspect ratio and to study fabrication method utilized to polymer or metal.The paper also presents the research situation of piezo electro as well as electro magnetic motor and some micro machine prototype or samples

it demonstrates that there are many investigation ways of micro machine in approch abroad and much effort is in progress for overcoming inherent special technical difficults of micro machine.