Fan Tianquan, Xie Changwen, Lu Deji, Geng Lihong, Gao Xuedong. Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 98-103
Fan Tianquan, Xie Changwen, Lu Deji, Geng Lihong, Gao Xuedong. Research on the Systematical Error of Permutation Intercomparision Method Using in Superprecision Angle Measurement[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 98-103DOI:
the reason of the systematical error in measurement result when indexing error is measured by permutation intercomparision method is described in theory.It is mainly due to the inclination of collimator's graticule & polygon or instrument and the different inclination of each reflection surface.It is proved by experiment.A method for reducing and eliminating this systematical error is described in the paper.