张二星. 一种精密X-Y扫描台的研究[J]. 光学精密工程, 1997,(2): 89-92

Zhang Erxing. Research on a Precision X-Y Scanning Stage[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 89-92

张二星. 一种精密X-Y扫描台的研究[J]. 光学精密工程, 1997,(2): 89-92 DOI：

Zhang Erxing. Research on a Precision X-Y Scanning Stage[J]. Editorial Office of Optics and Precision Engineering, 1997,(2): 89-92 DOI：