变栅距衍射光栅的原理及应用

时轮; 郝德阜

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变栅距衍射光栅的原理及应用

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- 变栅距衍射光栅的原理及应用
- Theory and applications of varied line-space gratings
- 光学精密工程 2001年9卷第3期页码：284-287
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 吉林工学院机电学院,吉林长春,130012
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： O436.1
- 收稿日期：2001-02-23，
  
  修回日期：2001-04-16，
  
  网络出版日期：2001-06-15，
  
  纸质出版日期：2001-06-15
- 稿件说明：
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时轮, 郝德阜. 变栅距衍射光栅的原理及应用[J]. 光学精密工程, 2001,(3): 284-287

SHI Lun, HAO De-fu . Theory and applications of varied line-space gratings[J]. Editorial Office of Optics and Precision Engineering, 2001,(3): 284-287
时轮, 郝德阜. 变栅距衍射光栅的原理及应用[J]. 光学精密工程, 2001,(3): 284-287 DOI：

SHI Lun, HAO De-fu . Theory and applications of varied line-space gratings[J]. Editorial Office of Optics and Precision Engineering, 2001,(3): 284-287 DOI：

摘要

变栅距衍射光栅(VLS)在像差校正等方面具有突出优点

采用不同的栅距变化规律的变栅距光栅具有不同的光谱特性

因而在众多的高技术领域获得了广泛应用.本文从VLS的像差校正原理出发

较全面地阐述了VLS在真空紫外和软X射线、高分辨率光电探测器、表面干涉计量以及光纤通讯等领域的应用

并针对其技术特点指出了它的发展趋势.

Abstract

Varied line space gratings(VLS) have great advantages in aberration correction

and the different spectral properties will be gained using the VLS with different rules of spacing. In this paper

the aberration correction principles of the gratings and their applications in the areas of vacuum ultraviolet

soft X-ray

high resolution photoelectric detectors

surface metrology and optical fiber communication is described. Finally

the potential of the gratings in the future is discussed.

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Keywords

references

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