ZHANG Jing-he, FENG Xiao-guo, LIU Wei . Testing rotating errors of axis with reversal method[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 155-158
ZHANG Jing-he, FENG Xiao-guo, LIU Wei . Testing rotating errors of axis with reversal method[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 155-158DOI:
In addition to describing a course of testing rotating error of high precision axis with reversal method
the paper also introduces all kinds of testing methods
especially the testing process of the rotating error of axis in manufacturing laser direct writing of binary optics elements. The rotating error of the axis measured is 0.018μm. This paper gives the testing theory
the way to separate the error and the practical applications in detail. Several factors that affect the reduplication of consequence are summarized. Finally
the authors conclude that the method is not only simple and practical