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上海大学 精密机械工程系 上海,200072
收稿日期:2001-08-20,
修回日期:2001-09-01,
网络出版日期:2001-12-15,
纸质出版日期:2001-12-15
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李国培, 于瀛洁, 陈明仪. 误差均化的拼接技术[J]. 光学精密工程, 2001,(6): 561-564
LI Guo-pei, YU Ying-jie, CHEN Ming-yi . Stitching Technique by Error Averaging[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 561-564
利用相关拼接技术实现光学波面检测
可以用较小的测量口径实现较大面积的测量
并保持高的测量精度、高的空间分辨率和系统的低成本.获得高精度的子孔径波面分布和有效的拼接方法是这一技术的关键.最简单的两两拼接的方法由于在拼接过程中存在误差积累
对全孔径拼接精度有很大的影响.采用误差均化的拼接方法
要求所有拼接区中相差值的平方和同时达到最小.从本质上看
这是一种并行算法.给出了在平面直角坐标系下误差均化拼接的数学模型和求解方法
进行了计算机仿真.结果证明该方法是切实有效的.
In the measurement of optical wave front
a large scale area can be measured with an interferometer of small aperture by correlative stitching technique
in which high measurement precision
high spatial resolution and low price can be maintained. In this technique
a way to get high precision phase distributions of sub-apertures and effective stitching method are important. Stitching between two sub-apertures is simple
but its accumulation error may reduce stitching precision greatly. The paper presents an error averaging method
which requires that the sum of the squared differences of all common areas should be minimized simultaneously. This method is a parallel one in essence. A math model and a solution in Cartesian coordinates are presented. Their validity has been examined by computer simulation.
Chen Ming-Yi, et al., Multi-aperture overlap-scanning technique for large aperture test[J]. SPIE, 1991,1553:626-635.
Bray Michael. Stitching interferometry:side effects and PSD[J]. SPIE,1999,3782:443-452.
Cheng Weiming, Chen Mingyi. Transformation and connection of subapertures in the multi-aperture overlap scanning technique for large optics tests[J]. Opt. Eng. 1993,32:1947-1950.
郭红卫, 陈明仪. 圆柱坐标系下的多孔径扫描拼接技术[J]. 光学学报, 2000,20:1047-1052.
程维明, 林有略, 陈明仪. 多孔径扫描波面恢复技术的精度评定及影响因素[J]. 光学学报, 1993,13:711-716.
Otsubo M, Okada K. Measurement of large plane surface shapes by connecting small-aperture interferograms[J]. Opt. Eng, 1994,33(2):608-613.
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