MEI De-qing, CHEN Zi-chen . Research on Precision Isolation System of Micro Manufacturing Platform[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 506-510
MEI De-qing, CHEN Zi-chen . Research on Precision Isolation System of Micro Manufacturing Platform[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 506-510DOI:
a structure model of the precision isolation system of micro manufacturing platform is presented. The isolation mechanics and organic texture of a woodpecker brain which has good isolation characteristics are studied
and then the structure model of the isolation system of the micro manufacturing platform is established based on bionics mechanics. In order to reduce thermal distortion caused by temperature rise of coil
a constant temperature cooling system is designed for giant magnetostrictive actuator. Considering complex vibration environment and self-nonlinearity of the micro manufacturing platform
the authors have designed a two dimensional fuzzy control system with two regulation factors. Finally
a set of precision isolation system is established which can be used effectively in micro manufacturing.
Yoshiya Nakamura,Masanao Nakayama,Keiji Masuda,et al. Development of active 6-DOF microvibration control system using giant magnetostrictive actuator[J].SPIE,1999,3671:229-240.