The movement-controlling system in the micro-electronic equipment is one of the most important units

which influences its manufacturing quality and efficiency. It has many characteristics such as high precisioin

high speed

high efficiency and reliability. Especially

when its hardwares encounter any breakdowns or wrong operation

the self-examination and self-diagnosis of the system become more important. 6K6 multi-axis controller is the movement-controlling system kernel of a laser trimming system

which can control 8 axes at most through agility programmers. This paper introduces the design and control of the speed and location precision of the linear servo motor

alternative-current servo motor

directive-current servo motor by adopting 6K6 multi-task real-time controller according to the way of event-drive-response

control of on/off of the electric valve of the pneumatic kits to make the mechanical arms run smoothly through the export interface module

and supervision of many kinds of sensors through the import interface module

which endows the movement system with more reliability

higher precision and super high speed

and realizes auto-feeding of products and finishes all relative movements in production. The technology is useful for reducing the cost

enhancing the equipment efficiency and competition power

and promises large-scale production. It has filled the gap domestically.