A new kind of stage which can be positioned accurately and quickly is presented in this paper. Magnetic levitation (maglev.)

linear drive and control technologies are applied in the stage. With a maglev system providing normal lift force and plane guiding force

the structure of the stage is simple and it can be controlled easily. By using linear synchronous motor

vibration caused by linear induction motor disappears

which benefits the maglev controlling system. Because of levitation and non-contact driving

there are no friction

wearing

metal particle

grease pollution and linking gap

and the total weight of the stage is lighter. All above improve its dynamic response frequency and the positioning accuracy. This stage meets the requirements of modern information industry to super-clean condition

high accuracy and high efficiency in micro-electron manufacturing field.