激光等离子体软X射线光源的一种诊断方法

尼启良; 陈波; 巩岩; 曹健林

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激光等离子体软X射线光源的一种诊断方法

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- 激光等离子体软X射线光源的一种诊断方法
- Diagnostic method for laser plasma soft X-ray source
- 光学精密工程 2002年10卷第3期页码：235-238
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点项目(No.69938020)()
- DOI：
  中图分类号： O433.4
- 收稿日期：2002-01-29，
  
  修回日期：2002-03-29，
  
  网络出版日期：2002-06-15，
  
  纸质出版日期：2002-06-15
- 稿件说明：
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尼启良, 陈波, 巩岩, 曹健林. 激光等离子体软X射线光源的一种诊断方法[J]. 光学精密工程, 2002,(3): 235-238

NI Qi-liang, CHEN Bo, GONG Yan, CAO Jian-lin. Diagnostic method for laser plasma soft X-ray source[J]. Editorial Office of Optics and Precision Engineering, 2002,(3): 235-238
尼启良, 陈波, 巩岩, 曹健林. 激光等离子体软X射线光源的一种诊断方法[J]. 光学精密工程, 2002,(3): 235-238 DOI：

NI Qi-liang, CHEN Bo, GONG Yan, CAO Jian-lin. Diagnostic method for laser plasma soft X-ray source[J]. Editorial Office of Optics and Precision Engineering, 2002,(3): 235-238 DOI：

摘要

激光等离子体软X射线光源是脉冲式光源

对这类光源的光谱诊断有几种方法.文章介绍了一种新的、实用的测量激光等离子体软X射线光源光谱的方法.此方法以低噪声的通道电子倍增器探测来自光源的ns量级的脉冲光信号

并由低噪声、响应快的电荷灵敏前置放大器进一步将其放大

前放的输出电荷与输入的脉冲信号的峰值成正比.使用这种方法测量了铜靶激光等离子体光源和氧、氪气体靶激光等离子体软X射线源在8～30nm波段的光谱.

Abstract

Laser plasma soft X-ray source is a kind of pulsed light source. There are several diagnostic methods for this kind of light source. This paper discusses a new and practical way to measure the spectrum of the laser plasma soft X-ray source. A low noise channel electron multiplier(CEM) is used for detecting nanosecond pulsed light signals generated by the laser plasma source

CEM's output signal is fed to a low-noise and fast responsive charge-sensitive preamplifier for further amplification.Output charges from the preamplifier are proportional to the peak of its input pulse. And the spectra from the laser plasma soft X-ray source with copper target and O

Kr gas target are measured in 8～30nm region

respectively by means of the above-mentioned way.

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references

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