X射线超反射镜设计

张众; 王占山; 王风丽; 秦树基; 陈玲燕

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X射线超反射镜设计

光学设计 | 更新时间：2020-08-12

- X射线超反射镜设计
- Design of X-ray supermirrors
- 光学精密工程 2003年11卷第1期页码：49-54
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 同济大学, 精密光学工程技术研究所上海,200092
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.60178021)()
- DOI：
  中图分类号： TH703
- 收稿日期：2002-09-17，
  
  修回日期：2002-11-19，
  
  网络出版日期：2003-02-15，
  
  纸质出版日期：2003-02-15
- 稿件说明：
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张众, 王占山, 王风丽, 秦树基, 陈玲燕. X射线超反射镜设计[J]. 光学精密工程, 2003,(1): 49-54

ZHANG Zhong, WANG Zhan-shan, WANG Feng-li, QIN Shu-ji, CHEN Ling-yan . Design of X-ray supermirrors[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 49-54
张众, 王占山, 王风丽, 秦树基, 陈玲燕. X射线超反射镜设计[J]. 光学精密工程, 2003,(1): 49-54 DOI：

ZHANG Zhong, WANG Zhan-shan, WANG Feng-li, QIN Shu-ji, CHEN Ling-yan . Design of X-ray supermirrors[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 49-54 DOI：

摘要

阐述了一种新的X射线超反射镜的设计方法

它是基于经验理论公式的解析设计方法和基于计算机的数值优化设计方法相结合的产物。利用前者提供比较好的初始膜系

再利用后者对该初始膜系进行优化处理

从而获得比较好的设计结果

并大大减少了计算时间。讨论了实际制作出的多层膜存在的表面粗糙度及膜层材料间的相互扩散对多层膜反射性能的影响

并给出了模拟计算的结果。依据上述方法

在比较大的掠入射角情况下

设计出了具有较宽反射带宽的W/CX射线超反射镜。

Abstract

A new method of designing X-ray supermirrors based semi-empirical formulas and optimization by computer has been proposed to produced an optimized be tter initial multilayer in dramatically reduced computational time. The saturation effect of interfacial roughness of mu ltilayers actually produced in X-ray supermirrors on per formance of multilayers is further discussed with simulated results. W/C X-ray supermirrors with wider sp ecial band of reflection have been designed using the proposed method for a grea ter grazing incident angle.

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references

YAMASHITA K, SERLEMITSOS P J, TUELLER J,et al. Supermirror hard-x-ray telescope[J]. Appl Opt, 1998, 37(34):8067-8073.

KOZHEVNIKOV I V, BUKREEVA I N, ZIEGLER E. Design of X-ray supermirrors[J]. Nuclear Institutes and Metheds in Physics Research,2001,A 460:424-443.

JIMENEZ-GARATE M A.Hailey W W.Christensen F E. Fabrication,performance, and figure metrology of epoxy-replicated aluminum foils for hard X-ray focusing multilayer-coated segmented conical optics[J].Opt Eng,2000,11:2982-2994.

PROTOPOPOV V V, KALNOV V A. X-ray multilayer mirrors with a extended angular range[J]. Optics Communications, 1998, 158:127-140.

YAMASHITA K, AKIYAMA K,HAGA K. et al.Fabrication and characterization of multilayer supermirrors for hard X-ray optics[J]. Journal of Synchrotron Radiation, 1998, ISSN: 0909-0495.

EBERHARD S. Soft X-ray optics [M]. SPIE, The International Society for optical Engineering: Bellingham, Washing ton USA:1994,108-115,173-174.

张俊平,曹健林,马月英,等.软X射线激光用多层膜反射镜的设计与性能模拟计算[J].光学学报1995,15(8):1088-1093.ZHANG J P, CAO J L, MA Y Y,et al. The design and performance simulation of multilayered mirrors for soft X-ray laser[J]. ACTA Optica Sinica,1995,15(8):1088-1093.(in Chinese)

唐晋发,郑权.应用薄膜光学[M].上海:上海科学技术出版社,1984.TANG J F, ZHENG Q. Applied thin film optics[M].Shanghai: Shanghai Science and Techolgoy Publishing Company,1984.(in Chinese)

WANG ZH SH,CAO J L,MICHETTE A G. Depth-graded multilayer X-ray optics with broad angular response[J].Optics Communications, 2000,177:25-32.

柯常军,王占山,郑咏梅,等.宽带平坦型软X射线多层反射膜的设计[J].光学精密工程,1999,7(3):19-22.KE CH J, ZHANG Y M, ZHANG T Q. The design of soft X-ray broadband and flat multilayer[J].Optic and Precision Engineering,1999,7(3):19-22.(in Chinese)

雷欧 S S.工程最优化原理与应用[M].北京:北京理工大学出版社,1990.213-219.RAO S S. Optimization theory and application[M]. Beijing: Institute of Technology Publishing Company,1990.213-219. (in Chinese)

PETFORD LONG A K, STEARNS M B, CHANG C H, et al. High resolution electron microscopy study of x-ray multilayer structures[J]. J Appl Phys, 1987,61(8):1422-1428.

金春水,王占山,曹健林,等.软X射线投影刻原理装置的设计[J].光学精密工程,2000,8(1):66-70.JIN CH SH, WANG ZH SH, CAO J L,et al. Development of elementary arrangement for soft X-ray projection lithography[J]. Optics and Precision Engineering,2000,8(1):66-70.(in Chinese)

STREARNS D G.The scattering of X-rays from nonideal multilayer structures[J]. J Appl Phys,1989,65(2):13-18.

柯常军,王占山,张铁强,等.软X射线多层膜的一种新型设计方法[J].光学精密工程,1997,7(4):17-20.KE CH J, WANG ZH SH, ZHANG T Q,et al.The design of multilayered mirros as reflector for soft X-ray random number[J].Optic and Precision Engineering,1999,7(4):17-20.(in Chinese)

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