离轴照明Schwarzschild投影物镜的计算机辅助装调方法

林强; 金春水; 向鹏; 曹健林

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离轴照明Schwarzschild投影物镜的计算机辅助装调方法

现代光学仪器 | 更新时间：2020-08-12

- 离轴照明Schwarzschild投影物镜的计算机辅助装调方法
- Computer-aided alignment of Schwarzschildobjective with off-axis illumination
- 光学精密工程 2003年11卷第2期页码：144-150
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,130022
- 作者简介：
- 基金信息：
  
  国家自然科学基金重点项目(No.69938020)();中国科学院创新基金项目()
- DOI：
  中图分类号： TH703
- 收稿日期：2002-10-17，
  
  修回日期：2003-01-25，
  
  网络出版日期：2003-04-15，
  
  纸质出版日期：2003-04-15
- 稿件说明：
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林强, 金春水, 向鹏, 曹健林. 离轴照明Schwarzschild投影物镜的计算机辅助装调方法[J]. 光学精密工程, 2003,(2): 144-150

LIN Qiang, JIN Chun-shui, XIANG Peng, CAO Jian-lin. Computer-aided alignment of Schwarzschildobjective with off-axis illumination[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 144-150
林强, 金春水, 向鹏, 曹健林. 离轴照明Schwarzschild投影物镜的计算机辅助装调方法[J]. 光学精密工程, 2003,(2): 144-150 DOI：

LIN Qiang, JIN Chun-shui, XIANG Peng, CAO Jian-lin. Computer-aided alignment of Schwarzschildobjective with off-axis illumination[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 144-150 DOI：

摘要

介绍计算机辅助装调方法在离轴照明EUVL光学系统中的应用

阐述了一种基于奇异值分解(SVD)的牛顿迭代法来求解失调量。利用该方法对敏感矩阵进行分解

从中分析得到影响不同像差的结构参数的敏感性

并筛选出补偿器

求出相应失调量的大小。在此基础上进行多次模拟装调

证明各种情况都是收敛的

可以实现精密装调的目的。

Abstract

The application of computer-aided alignment in Schwarzschild objective system with off-axis illumination is described and a Newton's method based on the singular value decomposition (SVD) was used to calculate the value of misalignment. With the use of SVD to decompose the sensitivity matrix

the sensitivity of the configuration was obtained for the aberration and the compensators were sekected from the configuration. The simulation alignments were carried out in this way on a large number of random misalignments and all of them were converged.

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Keywords

references

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