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Micro-positioning error monitoring and piezoelectric correction of plane grating ruling machine
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-08-15

    • Micro-positioning error monitoring and piezoelectric correction of plane grating ruling machine

    • “In the field of grating engraving, experts have proposed a composite control error compensation method based on the segmented Prandtl Ishlinskii model, which effectively improves the indexing positioning accuracy and stability of grating engraving.”
    • Optics and Precision Engineering   Vol. 33, Issue 14, Pages: 2220-2230(2025)

    • DOI：10.37188/OPE.20253314.2220    

      CLC： TH74
    • CSTR：32169.14.OPE.20253314.2220    

    • Received：11 March 2025，

      Revised：29 April 2025，

      Published：25 July 2025

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  • YANG Chunji,LI Wenhao,YU Hongzhu,et al.Micro-positioning error monitoring and piezoelectric correction of plane grating ruling machine[J].Optics and Precision Engineering,2025,33(14):2220-2230. DOI： 10.37188/OPE.20253314.2220. CSTR： 32169.14.OPE.20253314.2220.

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