Fabrication of glass microprism <italic style="font-style: italic">via</italic> interfacial erosion induced quasi-anisotropic wet etching

LI Feier; YU Jiajia; DU Liqun; WU Mengxi; LIU Junshan

doi:10.37188/OPE.20243209.1384

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Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

Micro/Nano Technology and Fine Mechanics | 更新时间：2024-05-13

- Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching
- Optics and Precision Engineering Vol. 32, Issue 9, Pages: 1384-1394(2024)
- 作者机构：
  
  1.大连理工大学高性能精密制造全国重点实验室，辽宁大连 116024
  2.大连理工大学辽宁省微纳米技术及系统重点实验室，辽宁大连 116024
- 作者简介：
  
  E-mail： liujs@dlut.edu.cn
- 基金信息：
- DOI：10.37188/OPE.20243209.1384
  CLC： TP391.73;TN03
- Published：10 May 2024，
  
  Received：11 January 2024，
  
  Revised：20 February 2024，
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李菲尔,余佳珈,杜立群等.界面钻蚀主导的准各向异性湿法刻蚀法制备玻璃微棱镜阵列[J].光学精密工程,2024,32(09):1384-1394.

LI Feier,YU Jiajia,DU Liqun,et al.Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J].Optics and Precision Engineering,2024,32(09):1384-1394.
李菲尔,余佳珈,杜立群等.界面钻蚀主导的准各向异性湿法刻蚀法制备玻璃微棱镜阵列[J].光学精密工程,2024,32(09):1384-1394. DOI： 10.37188/OPE.20243209.1384.

LI Feier,YU Jiajia,DU Liqun,et al.Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching[J].Optics and Precision Engineering,2024,32(09):1384-1394. DOI： 10.37188/OPE.20243209.1384.

摘要

玻璃微棱镜具有耐腐蚀、耐高温、寿命长等优点，但在玻璃上加工微棱镜阵列目前仍是一个难题。因此，提出了界面钻蚀主导的玻璃准各向异性湿法刻蚀方法，制备了高质量的微棱镜阵列器件。在元胞自动机中引入界面性质调控，模拟了界面钻蚀与各向同性侧蚀的竞争行为，探究了刻蚀横截面形貌的变化规律，构建了准各向异性湿法刻蚀模型。在此指导下，加工了横截面为梯形的微结构，设计并制备了间距、形状、尺寸均可调控的微棱镜阵列，重复性达到98%。验证了微棱镜阵列对LED灯扩散效果，光亮度提升了4.6倍。本文改变了传统玻璃湿法刻蚀各向同性的固有认识，创新性地开发了准各向异性刻蚀工艺，为玻璃微棱镜阵列等相关器件提供了高效低成本的制备方法。

Abstract

Microprism arrays are extensively utilized across various industries. Glass-based microprisms

in comparison to polymers

offer superior corrosion resistance

thermal stability

and durability. However

the isotropic nature of glass makes micromachining into prism-like structures challenging. In this paper

we introduce a novel interfacial erosion-induced quasi-anisotropic wet etching technique to manufacture glass microprism arrays efficiently and cost-effectively. For the first time

interfacial erosion is analyzed within a metacellular automaton to study the wet etching process

uncovering the dynamics between side etching and interfacial erosion and their impact on the side wall profiles. This approach yields varied microstructures with tilted morphologies. Leveraging quasi-anisotropic etching characteristics

we successfully produce microprism arrays with adjustable spacing

shape

and size

achieving 98% repeatability between arrays. Our method significantly enhances LED lamp diffusion

increasing average brightness by 4.6 times. This research not only pioneers a new direction in glass wet etching but also incorporates quasi-anisotropic properties into the traditional isotropic framework

presenting a straightforward

economical technique for fabricating glass microprism arrays and similar devices.

关键词

微棱镜湿法刻蚀硼硅玻璃界面钻蚀准各向异性刻蚀

Keywords

micro prism arrayswet etchingborosilicate glassinterfacial erosionquasi-anisotropic etching

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WU Mengxi

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Related Institution

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School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology

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Fabrication of glass microprism via interfacial erosion induced quasi-anisotropic wet etching

DOI：10.37188/OPE.20243209.1384

摘要

Abstract

关键词

Keywords

references