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Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes
Precision Measurement and Sensing | 更新时间:2024-10-17
    • Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes

    • 在复合测量领域,专家提出了坐标统一方法,设计新型标定器,实现高精度坐标统一与数据融合,提升器件测量能力。
    • Optics and Precision Engineering   Vol. 32, Issue 17, Pages: 2698-2707(2024)
    • DOI:10.37188/OPE.20243217.2698    

      CLC: TH72
    • Published:10 September 2024

      Received:10 May 2024

      Revised:09 June 2024

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  • CHENG Zhenying,XU Dongjian,ZHANG Chengyao,et al.Coordinate unification and data fusion for composite measurement with contact and white light interferometric probes[J].Optics and Precision Engineering,2024,32(17):2698-2707. DOI: 10.37188/OPE.20243217.2698.

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