浏览全部资源
扫码关注微信
1.清华大学 深圳国际研究生院,广东 深圳 518055
2.清华大学 清华-伯克利深圳学院,广东 深圳 518055
[ "李星辉(1985-),男,河南洛阳人,副教授,2008年于武汉大学获得学士学位,2011年于西安交通大学获得硕士学位,2014年于日本东北大学获得博士学位,目前研究兴趣包括智能仪器、精密测量、计算机视觉和机器视觉。E-mail: li.xinghui@sz.tsinghua.edu.cn" ]
崔 璨(1999-),男,河南濮阳人,博士研究生,2020年、2023年于北京理工大学分别获得学士和硕士学位,主要从事精密测量方面的研究。E-mail: cuic23@mails.tsinghua.edu.cn
纸质出版日期:2024-09-10,
收稿日期:2024-04-17,
修回日期:2024-05-25,
移动端阅览
李星辉,崔璨.光栅干涉精密纳米测量技术[J].光学精密工程,2024,32(17):2591-2611.
LI Xinghui,CUI Can.Grating interferometric precision nanometric measurement technology[J].Optics and Precision Engineering,2024,32(17):2591-2611.
李星辉,崔璨.光栅干涉精密纳米测量技术[J].光学精密工程,2024,32(17):2591-2611. DOI: 10.37188/OPE.20243217.2591.
LI Xinghui,CUI Can.Grating interferometric precision nanometric measurement technology[J].Optics and Precision Engineering,2024,32(17):2591-2611. DOI: 10.37188/OPE.20243217.2591.
光栅干涉测量是一种重要的精密纳米测量技术,具有高分辨率、高抗干扰能力和多自由度扩展的优势,在先进节点光刻机、超精密机床等场景中发挥着至关重要的作用。对比介绍了光栅干涉、激光干涉与时栅测量技术,明确其应用场景和当前性能参数,阐述了光栅干涉测量中的零差和外差两种技术原理,并在此基础上分析了光栅干涉仪的国内外发展动态,包括代表性的设备厂商,和近年来国内外在纳米及亚纳米精度的单、多自由度系统方面的研究开发情况。进一步地,对光栅干涉测量的精度和误差进行了分析与讨论,介绍了误差来源、分类及针对性的补偿方法。最后,对光栅干涉仪的发展现状及未来前景进行了讨论,期望为光栅干涉仪系统的开发和优化提供参考。
Grating interferometry is a crucial technology in precision nanometrology
valued for its high resolution
robustness
and adaptability for multi-axis measurement systems. It is essential in advanced semiconductor manufacturing and ultra-precision machine tools. This review first compares grating interferometry with laser interferometry and time grating
detailing their applications and performance. It then explains the two main principles: homodyne and heterodyne grating interferometry. The review also analyzes global development trends
highlighting key manufacturers and advancements in achieving nanometric to sub-nanometric precision in single and multi-axis systems. In addition
it examines error sources
classifications
and compensation methods in grating interferometry. Finally
it discusses the current state and future prospects of grating interferometers
offering insights for developing and optimizing measurement systems based on this technology.
精密测量纳米测量光栅干涉仪多自由度误差补偿
precision measurementnano measurementgrating interferometermultiple degrees of freedomerror compensation
王保平, 罗乐. 芯片制造设备的价值评估:环境、挑战与推进策略: 以光刻机为例[J]. 国有资产管理, 2023(10): 56-61.
WANG B P, LUO L. Value Evaluation of Chip Manufacturing Equipment: environment, Challenges and Promotion Strategies-taking mask aligner as an Example[J]. State Assets Management, 2023(10): 56-61.(in Chinese)
徐余恒, 薛亮. 全球芯片产业发展概览[J]. 上海人大月刊, 2023(10): 51-53.
XU Y H, XUE L. Overview of global chip industry development[J]. Shanghai Renda Monthly, 2023(10): 51-53.(in Chinese)
谭久彬. 超精密测量技术与仪器是高端制造发展的前提与基础[J]. 激光与光电子学进展, 2023, 60(3): 1-2. doi: 10.3788/LOP0312001http://dx.doi.org/10.3788/LOP0312001
TAN J B. Ultra-precision measurement technologies and instruments are the premise and foundation for the development of high-end manufacturing[J]. Laser & Optoelectronics Progress, 2023, 60(3): 1-2.(in Chinese). doi: 10.3788/LOP0312001http://dx.doi.org/10.3788/LOP0312001
SHIMIZU Y, CHEN L C, KIM D W, et al. An insight into optical metrology in manufacturing[J]. Measurement Science and Technology, 2021, 32(4): 042003.
GAO W, KIM S W, BOSSE H, et al. Measurement technologies for precision positioning[J]. CIRP Annals, 2015, 64(2): 773-796. doi: 10.1016/j.cirp.2015.05.009http://dx.doi.org/10.1016/j.cirp.2015.05.009
HU P C, CHANG D, TAN J B, et al. Displacement measuring grating interferometer: a review[J]. Frontiers of Information Technology & Electronic Engineering, 2019, 20(5): 631-654. doi: 10.1631/fitee.1800708http://dx.doi.org/10.1631/fitee.1800708
IEEE. International Roadmap for Devices and Systems (IRDS) [EB/OL]. (2021-10-10) [2024-0311]. https://irds.ieee.org/editionshttps://irds.ieee.org/editions.
YE Y, ZHANG C Y, HE C L, et al. A review on applications of capacitive displacement sensing for capacitive proximity sensor[J]. IEEE Access, 2020, 8: 45325-45342. doi: 10.1109/access.2020.2977716http://dx.doi.org/10.1109/access.2020.2977716
徐欣, 谈宜东, 穆衡霖, 等. 空间引力波探测中的激光干涉多自由度测量技术[J]. 激光与光电子学进展, 2023, 60(3): 81-100. doi: 10.3788/LOP222694http://dx.doi.org/10.3788/LOP222694
XU X, TAN Y D, MU H L, et al. Laser interferometric multi-degree-of-freedom measurement technology in space gravitational-wave detection[J]. Laser & Optoelectronics Progress, 2023, 60(3): 81-100.(in Chinese). doi: 10.3788/LOP222694http://dx.doi.org/10.3788/LOP222694
杨宏兴, 付海金, 胡鹏程, 等. 超精密高速激光干涉位移测量技术与仪器[J]. 激光与光电子学进展, 2022, 59(9): 295-309.
YANG H X, FU H J, HU P CH, et al. Ultra-precision and high-speed laser interferometric displacement measurement technology and instrument[J]. Laser & Optoelectronics Progress, 2022, 59(9): 295-309.(in Chinese)
YANG H X, LU Y F, HU P C, et al. Measurement and control of the movable coil position of a joule balance with a system based on a laser heterodyne interferometer[J]. Measurement Science and Technology, 2014, 25(6): 064003. doi: 10.1088/0957-0233/25/6/064003http://dx.doi.org/10.1088/0957-0233/25/6/064003
WANG, H, PENG, K, LIU, X, et al. (2020). Design and realization of a compact high-precision capacitive absolute angular position sensor based on time grating[J]. IEEE Transactions on Industrial Electronics, 68(4):3548-3557. doi: 10.1109/tie.2020.2977540http://dx.doi.org/10.1109/tie.2020.2977540
PENG K, DENG Z Z, LIU X K, et al. Planar two-dimensional capacitive displacement sensor based on time grating[J]. IEEE Transactions on Industrial Electronics, 2024, 71(4): 4262-4272. doi: 10.1109/tie.2023.3277126http://dx.doi.org/10.1109/tie.2023.3277126
LAWALL J. Interferometry for accurate displacement metrology[J]. Optics and Photonics News, 2004, 15(10): 40-45. doi: 10.1364/opn.15.10.000040http://dx.doi.org/10.1364/opn.15.10.000040
WANG Y F, XU X, DAI Z R, et al. Frequency-swept feedback interferometry for noncooperative-target ranging with a stand-off distance of several hundred meters[J]. PhotoniX, 2022, 3(1): 21. doi: 10.1186/s43074-022-00067-zhttp://dx.doi.org/10.1186/s43074-022-00067-z
ZENG Z L, QU X M, TAN Y D, et al. High-accuracy self-mixing interferometer based on single high-order orthogonally polarized feedback effects[J]. Optics Express, 2015, 23(13): 16977-16983. doi: 10.1364/oe.23.016977http://dx.doi.org/10.1364/oe.23.016977
YU H Y, CHEN X L, LIU C J, et al. A survey on the grating based optical position encoder[J]. Optics & Laser Technology, 2021, 143: 107352. doi: 10.1016/j.optlastec.2021.107352http://dx.doi.org/10.1016/j.optlastec.2021.107352
WANG S T, MA R, CAO F F, et al. A review: high-precision angle measurement technologies[J]. Sensors, 2024, 24(6): 1755. doi: 10.3390/s24061755http://dx.doi.org/10.3390/s24061755
朱俊豪, 汪盛通, 李星辉. 面向光刻机晶圆台的超精密光栅定位技术[J]. 激光与光电子学进展Laser & Optoelectronics Progress, 2022, 59(9): 0922019. doi: 10.3788/LOP202259.0922019http://dx.doi.org/10.3788/LOP202259.0922019
ZHU J H, WANG SH T, LI X H. Ultra-precision grating positioning technology for photolithography wafer stage[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922019.(in Chinese). doi: 10.3788/LOP202259.0922019http://dx.doi.org/10.3788/LOP202259.0922019
KIMURA A, GAO W, KIM W, et al. A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement[J]. Precision Engineering, 2012, 36(4): 576-585. doi: 10.1016/j.precisioneng.2012.04.005http://dx.doi.org/10.1016/j.precisioneng.2012.04.005
GAO W, KIMURA A. A three-axis displacement sensor with nanometric resolution[J]. CIRP Annals, 2007, 56(1): 529-532. doi: 10.1016/j.cirp.2007.05.126http://dx.doi.org/10.1016/j.cirp.2007.05.126
LEE J Y, CHEN H Y, HSU C C, et al. Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution[J]. Sensors and Actuators A: Physical, 2007, 137(1): 185-191. doi: 10.1016/j.sna.2007.02.017http://dx.doi.org/10.1016/j.sna.2007.02.017
DE VINE G, RABELING D S, SLAGMOLEN B J J, et al. Picometer level displacement metrology with digitally enhanced heterodyne interferometry[J]. Optics Express, 2009, 17(2): 828-837. doi: 10.1364/oe.17.000828http://dx.doi.org/10.1364/oe.17.000828
YANG H X, YIN Z Q, YANG R T, et al. Design for A highly stable laser source based on the error model of high-speed high-resolution heterodyne interferometers[J]. Sensors, 2020, 20(4): 1083. doi: 10.3390/s20041083http://dx.doi.org/10.3390/s20041083
Heidenhain [EB/OL]. [2024-03-11]. https://www.heidenhain.com/https://www.heidenhain.com/. doi: 10.1016/s0016-5085(01)87903-8http://dx.doi.org/10.1016/s0016-5085(01)87903-8
Magnescale [EB/OL]. [2024-03-11]. https://www.magnescale.com/zh/https://www.magnescale.com/zh/. doi: 10.1089/glre.2016.201011http://dx.doi.org/10.1089/glre.2016.201011
LF 185 Incremental sealed linear encoder with large cross section for highest repeatability [EB/OL]. [2024-03-11]. https://www.heidenhain.com/products/search/product-details/sealed-linear-encoders/682433-01https://www.heidenhain.com/products/search/product-details/sealed-linear-encoders/682433-01. doi: 10.1007/s00138-020-01147-5http://dx.doi.org/10.1007/s00138-020-01147-5
LIP 382 Incremental exposed linear encoder for high accuracy [EB/OL]. [2024-03-11]. https://www.heidenhain.com/products/search/product-details/exposed-linear-encoders/334809-A1https://www.heidenhain.com/products/search/product-details/exposed-linear-encoders/334809-A1.
Incremental exposed two-coordinate encoder. [EB/OL]. [2024-03-11]. https://www.heidenhain.com/products/search/product-details/expose-d-linear-encoders/361145-01https://www.heidenhain.com/products/search/product-details/expose-d-linear-encoders/361145-01.
TTR ECA 4402 Scale drum for absolute angle encoder without integral bearing [EB/OL]. [2024-03-11]. https://www.heidenhain.com/products/search/product-details/modular-angle-encoders/1042970-01https://www.heidenhain.com/products/search/product-details/modular-angle-encoders/1042970-01.
Magnescale SQ47/57 [EB/OL]. [2024-03-11]. https://www.magnescale.com/zh/products/sq47-57/https://www.magnescale.com/zh/products/sq47-57/.
Magnescale RS97 [EB/OL]. [2024-03-11]. https://www.magnescale.com/zh/products/rs97/https://www.magnescale.com/zh/products/rs97/. doi: 10.1089/glre.2016.201011http://dx.doi.org/10.1089/glre.2016.201011
TEIMEL A. Technology and applications of grating interferometers in high-precision measurement[J]. Precision Engineering, 1992, 14(3): 147-154. doi: 10.1016/0141-6359(92)90003-fhttp://dx.doi.org/10.1016/0141-6359(92)90003-f
孔令雯, 蔡文魁, 施立恒, 等. 基于利特罗式激光反馈光栅干涉的微位移测量技术[J]. 中国激光, 2019, 46(4): 0404012. doi: 10.3788/cjl201946.0404012http://dx.doi.org/10.3788/cjl201946.0404012
KONG L W, CAI W K, SHI L H, et al. Micro-displacement measurement technology based on littrow-configured laser feedback grating interference[J]. Chinese Journal of Lasers, 2019, 46(4): 0404012.(in Chinese). doi: 10.3788/cjl201946.0404012http://dx.doi.org/10.3788/cjl201946.0404012
SHI Y P, ZHOU Q, LI X H, et al. Design and testing of a linear encoder capable of measuring absolute distance[J]. Sensors and Actuators A: Physical, 2020, 308: 111935. doi: 10.1016/j.sna.2020.111935http://dx.doi.org/10.1016/j.sna.2020.111935
夏豪杰. 高精度二维平面光栅测量系统及关键技术研究[D]. 合肥: 合肥工业大学, 2006.
XIA H J. Research on Precise 2-D Plane Grating Measurement System and Key Technology[D].Hefei: Hefei University of Technology, 2006. (in Chinese)
KIMURA A, WEI G, ARAI Y, et al. Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness[J]. Precision Engineering, 2010, 34(1): 145-155. doi: 10.1016/j.precisioneng.2009.05.008http://dx.doi.org/10.1016/j.precisioneng.2009.05.008
KIMURA A, WEI G, ZENG L J. Position and out-of-straightness measurement of a precision linear air-bearing stage by using a two-degree-of-freedom linear encoder[J]. Measurement Science and Technology, 2010, 21(5): 054005. doi: 10.1088/0957-0233/21/5/054005http://dx.doi.org/10.1088/0957-0233/21/5/054005
KIMURA A, HOSONO K, KIM W, et al. A two-degree-of-freedom linear encoder with a mosaic scale grating[J]. International Journal of Nanomanufacturing, 2011, 7(1): 73-91. doi: 10.1504/ijnm.2011.039964http://dx.doi.org/10.1504/ijnm.2011.039964
LI X H, WANG H H, NI K, et al. Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating[J]. Optics Express, 2016, 24(19): 21378-21391. doi: 10.1364/oe.24.021378http://dx.doi.org/10.1364/oe.24.021378
SHI Y P, NI K, LI X H, et al. Highly accurate, absolute optical encoder using a hybrid-positioning method[J]. Optics Letters, 2019, 44(21): 5258-5261. doi: 10.1364/ol.44.005258http://dx.doi.org/10.1364/ol.44.005258
GAO W, SAITO Y, MUTO H, et al. A three-axis autocollimator for detection of angular error motions of a precision stage[J]. CIRP Annals, 2011, 60(1): 515-518. doi: 10.1016/j.cirp.2011.03.052http://dx.doi.org/10.1016/j.cirp.2011.03.052
SHIMIZU Y, ITO T, LI X H, et al. Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating[J]. Measurement Science and Technology, 2014, 25(9): 094002. doi: 10.1088/0957-0233/25/9/094002http://dx.doi.org/10.1088/0957-0233/25/9/094002
LIN J, GUAN J, WEN F, et al. High-resolution and wide range displacement measurement based on planar grating[J]. Optics Communications, 2017, 404: 132-138. doi: 10.1016/j.optcom.2017.03.012http://dx.doi.org/10.1016/j.optcom.2017.03.012
WANG S T, LIAO B Q, SHI N N, et al. A compact and high-precision three-degree-of-freedom grating encoder based on a quadrangular frustum pyramid prism[J]. Sensors, 2023, 23(8): 4022. doi: 10.3390/s23084022http://dx.doi.org/10.3390/s23084022
WANG S T, ZHU J H, SHI N N, et al. Modeling and test of an absolute four-degree-of-freedom (DOF) grating encoder[C]. Optical Metrology and Inspection for Industrial Applications IX. December 5-12, 2022. Online Only, China. SPIE, 2022, 12319: 72-78.
LUO L B, GAO L Y, WANG S T, et al. An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors[C]. Optical Metrology and Inspection for Industrial Applications IX. December 5-12, 2022. Online Only, China. SPIE, 2022, 12319: 57-65.
SAITO Y, ARAI Y, GAO W. Detection of three-axis angles by an optical sensor[J]. Sensors and Actuators A: Physical, 2009, 150(2): 175-183. doi: 10.1016/j.sna.2008.12.019http://dx.doi.org/10.1016/j.sna.2008.12.019
LEE C, KIM G H, LEE S K. Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage[J]. Measurement Science and Technology, 2011, 22(10): 105901. doi: 10.1088/0957-0233/22/10/105901http://dx.doi.org/10.1088/0957-0233/22/10/105901
LEE C B, KIM G H, LEE S K. Uncertainty investigation of grating interferometry in six degree-of-freedom motion error measurements[J]. International Journal of Precision Engineering and Manufacturing, 2012, 13(9): 1509-1515. doi: 10.1007/s12541-012-0199-8http://dx.doi.org/10.1007/s12541-012-0199-8
LI X H, GAO W, MUTO H, et al. A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage[J]. Precision Engineering, 2013, 37(3): 771-781. doi: 10.1016/j.precisioneng.2013.03.005http://dx.doi.org/10.1016/j.precisioneng.2013.03.005
LI X H, SHIMIZU Y, ITO T, et al. Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder[J]. Optical Engineering, 2014, 53: 122405-122405. doi: 10.1117/1.oe.53.12.122405http://dx.doi.org/10.1117/1.oe.53.12.122405
YU K N, ZHU J H, YUAN W H, et al. Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics[J]. Optics Express, 2021, 29(14): 21113-21128. doi: 10.1364/oe.427307http://dx.doi.org/10.1364/oe.427307
WANG S T, LUO L B, ZHU J H, et al. An ultra-precision absolute-type multi-degree-of-freedom grating encoder[J]. Sensors, 2022, 22(23): 9047. doi: 10.3390/s22239047http://dx.doi.org/10.3390/s22239047
喻晓, 吕梦洁, 张旭, 等. 基于铷原子调制转移光谱技术的1560nm光纤激光器频率锁定研究[J]. 中国激光, 2022, 49(3): 0301002. doi: 10.3788/CJL202249.0301002http://dx.doi.org/10.3788/CJL202249.0301002
YU X, LÜ M J, ZHANG X, et al. Research on frequency locking of 1560nm fiber laser based on rubidium atomic modulation transfer spectroscopy technology[J]. Chinese Journal of Lasers, 2022, 49(3): 0301002.(in Chinese). doi: 10.3788/CJL202249.0301002http://dx.doi.org/10.3788/CJL202249.0301002
HSIEH H L, LEE J Y, WU W T, et al. Quasi-common-optical-path heterodyne grating interferometer for displacement measurement[J]. Measurement Science and Technology, 2010, 21(11): 115304. doi: 10.1088/0957-0233/21/11/115304http://dx.doi.org/10.1088/0957-0233/21/11/115304
王磊杰, 张鸣, 朱煜, 等. 超精密外差利特罗式光栅干涉仪位移测量系统[J]. 光学 精密工程, 2017, 25(12): 2975. doi: 10.3788/ope.20172512.2975http://dx.doi.org/10.3788/ope.20172512.2975
WANG L J, ZHANG M, ZHU Y, et al. A displacement measurement system for ultra-precision heterodyne Littrow grating interferometer[J]. Opt. Precision Eng., 2017, 25(12): 2975-2985.(in Chinese). doi: 10.3788/ope.20172512.2975http://dx.doi.org/10.3788/ope.20172512.2975
HSU C C, WU C C, LEE J Y, et al. Reflection type heterodyne grating interferometry for in-plane displacement measurement[J]. Optics Communications, 2008, 281(9): 2582-2589. doi: 10.1016/j.optcom.2007.12.098http://dx.doi.org/10.1016/j.optcom.2007.12.098
WANG L J, ZHANG M, ZHU Y, et al. A novel heterodyne grating interferometer system for in-plane and out-of-plane displacement measurement with nanometer resolution[C]. Proceedings of the 29th Annual Meeting of the American Society for Precision Engineering. 2014: 173-177.
LIN C B, YAN S H, DU Z G, et al. High-efficiency gold-coated cross-grating for heterodyne grating interferometer with improved signal contrast and optical subdivision[J]. Optics Communications, 2015, 339: 86-93. doi: 10.1016/j.optcom.2014.11.059http://dx.doi.org/10.1016/j.optcom.2014.11.059
YANG F Z, ZHANG M, ZHU Y, et al. Two degree-of-freedom fiber-coupled heterodyne grating interferometer with milli-radian operating range of rotation[J]. Sensors, 2019, 19(14): 3219. doi: 10.3390/s19143219http://dx.doi.org/10.3390/s19143219
YIN Y F, LIU Z W, JIANG S, et al. High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving[J]. Optics and Lasers in Engineering, 2022, 158: 107167. doi: 10.1016/j.optlaseng.2022.107167http://dx.doi.org/10.1016/j.optlaseng.2022.107167
HSIEH H L, PAN S W. Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry[J]. Applied Optics, 2013, 52(27): 6840-6848. doi: 10.1364/ao.52.006840http://dx.doi.org/10.1364/ao.52.006840
林杰, 关健, 金鹏,等. 一种使用双频激光的三维光栅位移测量系统: CN103644848A[P]. doi: 10.1117/12.2082475http://dx.doi.org/10.1117/12.2082475
LIN J, GUAN J, JIN P, et al. A three-dimensional grating displacement measurement system using dual-frequency laser: CN103644848A [P]. (in Chinese). doi: 10.1117/12.2082475http://dx.doi.org/10.1117/12.2082475
谭久彬, 陆振刚, 魏培培. 一种使用双频激光和衍射光栅的三维位移测量装置: CN104567695A[P].
TAN J B, LU ZH G, WEI P P. A three-dimensional displacement measurement device using dual-frequency laser and diffraction grating: CN104567695A [P].(in Chinese)
ZHU J H, WANG G C, WANG S T, et al. A reflective-type heterodyne grating interferometer for three-degree-of-freedom subnanometer measurement[J]. IEEE Transactions on Instrumentation Measurement, 2022, 71: 3213005. doi: 10.1109/tim.2022.3213005http://dx.doi.org/10.1109/tim.2022.3213005
PAN S W, HSIEH H L, WANG W C. 6-DOF displacement and angle measurements using heterodyne laser encoder[C]. SPIE Proceedings, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII. San Diego, California, USA. SPIE, 2013, 8819: 38-45. doi: 10.1117/12.2024082http://dx.doi.org/10.1117/12.2024082
HSIEH H L, PAN S W. Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements[J]. Optics Express, 2015, 23(3): 2451-2465. doi: 10.1364/oe.23.002451http://dx.doi.org/10.1364/oe.23.002451
WEICHERT C, KÖCHERT P, KÖNING R, et al. A heterodyne interferometer with periodic nonlinearities smaller than ±10 pm[J]. Measurement Science and Technology, 2012, 23(9): 094005. doi: 10.1088/0957-0233/23/9/094005http://dx.doi.org/10.1088/0957-0233/23/9/094005
YE W N, ZHANG M, ZHU Y, et al. Ultraprecision real-time displacements calculation algorithm for the grating interferometer system[J]. Sensors, 2019, 19(10): 2409. doi: 10.3390/s19102409http://dx.doi.org/10.3390/s19102409
KANG H J, CHUN B J, JANG Y S, et al. Real-time compensation of the refractive index of air in distance measurement[J]. Optics Express, 2015, 23(20): 26377-26385. doi: 10.1364/oe.23.026377http://dx.doi.org/10.1364/oe.23.026377
LIU H W, XIANG H, CHEN J H, et al. Measurement and compensation of machine tool geometry error based on Abbe principle[J]. The International Journal of Advanced Manufacturing Technology, 2018, 98(9): 2769-2774. doi: 10.1007/s00170-018-2471-2http://dx.doi.org/10.1007/s00170-018-2471-2
CHEN G H, ZHANG L, WANG X J, et al. Modeling method of CNC tooling volumetric error under consideration of Abbé error[J]. The International Journal of Advanced Manufacturing Technology, 2022, 119(11): 7875-7887. doi: 10.1007/s00170-021-08494-1http://dx.doi.org/10.1007/s00170-021-08494-1
XUE G P, LU H O, LI X H, et al. Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd’s mirrors based interference lithography[J]. Optics Express, 2020, 28(2): 2179-2191. doi: 10.1364/oe.382178http://dx.doi.org/10.1364/oe.382178
LI X H, GAO W, SHIMIZU Y, et al. A two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional diffraction gratings[J]. CIRP Annals, 2014, 63(1): 461-464. doi: 10.1016/j.cirp.2014.02.001http://dx.doi.org/10.1016/j.cirp.2014.02.001
LI X H, SHIMIZU Y, ITO S, et al. Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes[J]. International Journal of Precision Engineering and Manufacturing, 2013, 14(11): 1979-1988. doi: 10.1007/s12541-013-0269-6http://dx.doi.org/10.1007/s12541-013-0269-6
LI X H, NI K, ZHOU Q, et al. Fabrication of a concave grating with a large line spacing via a novel dual-beam interference lithography method[J]. Optics Express, 2016, 24(10): 10759-10766. doi: 10.1364/oe.24.010759http://dx.doi.org/10.1364/oe.24.010759
LI X H, LU H O, ZHOU Q, et al. An orthogonal type two-axis lloyd’s mirror for holographic fabrication of two-dimensional planar scale gratings with large area[J]. Applied Sciences, 2018, 8(11): 2283. doi: 10.3390/app8112283http://dx.doi.org/10.3390/app8112283
MA D H, ZHAO Y X, ZENG L J. Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment[J]. Scientific Reports, 2017, 7: 926. doi: 10.1038/s41598-017-01099-3http://dx.doi.org/10.1038/s41598-017-01099-3
GAO W, KIMURA A. A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating[J]. CIRP Annals, 2010, 59(1): 505-508. doi: 10.1016/j.cirp.2010.03.035http://dx.doi.org/10.1016/j.cirp.2010.03.035
QUAN L E, SHIMIZU Y, SATO R, et al. Design and testing of a compact optical angle sensor for pitch deviation measurement of a scale grating with a small angle of diffraction[J]. International Journal of Automation Technology, 2022, 16(5): 572-581. doi: 10.20965/ijat.2022.p0572http://dx.doi.org/10.20965/ijat.2022.p0572
LI X H, SHI Y P, XIAO X, et al. Design and testing of a compact optical prism module for multi-degree-of-freedom grating interferometry application[J]. Applied Sciences, 2018, 8(12): 2495. doi: 10.3390/app8122495http://dx.doi.org/10.3390/app8122495
XIONG X, YIN C G, QUAN L, et al. Self-calibration of a large-scale variable-line-spacing grating for an absolute optical encoder by differencing spatially shifted phase maps from a fizeau interferometer[J]. Sensors, 2022, 22(23): 9348. doi: 10.3390/s22239348http://dx.doi.org/10.3390/s22239348
JOO K N, CLARK E, ZHANG Y Q, et al. A compact high-precision periodic-error-free heterodyne interferometer[J]. Journal of the Optical Society of America A, 2020, 37(9): B11. doi: 10.1364/josaa.396298http://dx.doi.org/10.1364/josaa.396298
HU P C, BAI Y, ZHAO J L, et al. Toward a nonlinearity model for a heterodyne interferometer: not based on double-frequency mixing[J]. Optics Express, 2015, 23(20): 25935-25941. doi: 10.1364/oe.23.025935http://dx.doi.org/10.1364/oe.23.025935
FU H J, WANG Y, HU P C, et al. Nonlinear errors resulting from ghost reflection and its coupling with optical mixing in heterodyne laser interferometers[J]. Sensors, 2018, 18(3): 758. doi: 10.3390/s18030758http://dx.doi.org/10.3390/s18030758
XING X, CHANG D, HU P C, et al. Spatially separated heterodyne grating interferometer for eliminating periodic nonlinear errors[J]. Optics Express, 2017, 25(25): 31384-31393. doi: 10.1364/oe.25.031384http://dx.doi.org/10.1364/oe.25.031384
CHANG D, XING X, HU P C, et al. Double-diffracted spatially separated heterodyne grating interferometer and analysis on its alignment tolerance[J]. Applied Sciences, 2019, 9(2): 263. doi: 10.3390/app9020263http://dx.doi.org/10.3390/app9020263
WANG G C, GAO L Y, HUANG G Y, et al. A wavelength-stabilized and quasi-common-path heterodyne grating interferometer with sub-nanometer precision[J]. IEEE Transactions on Instrumentation and Measurement, 2024, 73: 1-9. doi: 10.1109/tim.2024.3372212http://dx.doi.org/10.1109/tim.2024.3372212
FU H J, JI R D, HU P C, et al. Measurement method for nonlinearity in heterodyne laser interferometers based on double-channel quadrature demodulation[J]. Sensors, 2018, 18(9): 2768. doi: 10.3390/s18092768http://dx.doi.org/10.3390/s18092768
DE JONG F, VAN DER PASCH B, CASTENMILLER T, et al. Enabling the lithography roadmap: an immersion tool based on a novel stage positioning system[C]. SPIE Proceedings, Optical Microlithography XXII. San Jose, California, USA. SPIE, 2009, 7274: 608-617. doi: 10.1117/12.814254http://dx.doi.org/10.1117/12.814254
CASTENMILLER T, VAN DE MAST F, DE KORT T, et al. Towards ultimate optical lithography with NXT: 1950i dual stage immersion platform[C]. SPIE Proceedings, Optical Microlithography XXIII. San Jose, California. SPIE, 2010, 7640: 623-634. doi: 10.1117/12.847025http://dx.doi.org/10.1117/12.847025
YE W N, ZHANG M, ZHU Y, et al. Translational displacement computational algorithm of the grating interferometer without geometric error for the wafer stage in a photolithography scanner[J]. Optics Express, 2018, 26(26): 34734-34752. doi: 10.1364/oe.26.034734http://dx.doi.org/10.1364/oe.26.034734
MATSUKUMA H, ISHIZUKA R, FURUTA M, et al. Reduction in cross-talk errors in a six-degree-of-freedom surface encoder[J]. Nanomanufacturing and Metrology, 2019, 2(2): 111-123. doi: 10.1007/s41871-019-00039-1http://dx.doi.org/10.1007/s41871-019-00039-1
CHANG D, YIN Z Q, SUN Y K, et al. Spatially separated heterodyne grating interferometer for In-plane and out-of-plane displacement measurements[J]. Photonics, 2022, 9(11): 830. doi: 10.3390/photonics9110830http://dx.doi.org/10.3390/photonics9110830
HONG Y F, SATO R, SHIMIZU Y, et al. Reduction of crosstalk errors in a surface encoder having a long Z-directional measuring range[J]. Sensors, 2022, 22(23): 9563. doi: 10.3390/s22239563http://dx.doi.org/10.3390/s22239563
HAN Y D, NI K, LI X H, et al. An FPGA platform for next-generation grating encoders[J]. Sensors, 2020, 20(8): 2266. doi: 10.3390/s20082266http://dx.doi.org/10.3390/s20082266
YE W N, ZHANG M, ZHU Y, et al. Real-time displacement calculation and offline geometric calibration of the grating interferometer system for ultra-precision wafer stage measurement[J]. Precision Engineering, 2019, 60: 413-420. doi: 10.1016/j.precisioneng.2019.06.012http://dx.doi.org/10.1016/j.precisioneng.2019.06.012
KIM H S, SCHMITZ T L, BECKWITH J F, et al. A new heterodyne interferometer with zero periodic error and tunable beat frequency[J]. Proc. 23rd American Society of Precision Engineering (ASPE)(Portland, Oregon), 2008.
PISANI M, YACOOT A, BALLING P, et al. Comparison of the performance of the next generation of optical interferometers[J]. Metrologia, 2012, 49(4): 455-467. doi: 10.1088/0026-1394/49/4/455http://dx.doi.org/10.1088/0026-1394/49/4/455
GUAN J, KÖCHERT P, WEICHERT C, et al. A differential interferometric heterodyne encoder with 30 picometer periodic nonlinearity and sub-nanometer stability[J]. Precision Engineering, 2017, 50: 114-118. doi: 10.1016/j.precisioneng.2017.04.019http://dx.doi.org/10.1016/j.precisioneng.2017.04.019
ZHU J H, WANG G C, XUE G P, et al. Heterodyne three-degree-of-freedom grating interferometer for ultra-precision positioning of lithography machine[C]. 2021 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems. April 8-10, 2022. Online Only, China. SPIE, 2022, 12282: 21-32.
HSU C C. The Applications of the Heterodyne Interferoemetry[M]. Interferometry-Research and Applications in Science and Technology. IntechOpen, 2012: 31-64. doi: 10.5772/34535http://dx.doi.org/10.5772/34535
KUNZMANN H, PFEIFER T, FLÜGGE J. Scales vs. laser interferometers performance and comparison of two measuring systems[J]. CIRP Annals, 1993, 42(2): 753-767. doi: 10.1016/s0007-8506(07)62538-4http://dx.doi.org/10.1016/s0007-8506(07)62538-4
LIN C B, YAN S H, DING D, et al. Two-dimensional diagonal-based heterodyne grating interferometer with enhanced signal-to-noise ratio and optical subdivision[J]. Optical Engineering, 2018, 57: 064102. doi: 10.1117/1.oe.57.6.064102http://dx.doi.org/10.1117/1.oe.57.6.064102
KAZIEVA T V, GUBSKIY K L, KUZNETSOV A P, et al. 3D push-pull heterodyne interferometer for SPM metrology[J]. Applied Optics, 2019, 58(15): 4000-4006. doi: 10.1364/ao.58.004000http://dx.doi.org/10.1364/ao.58.004000
LOU Y T, LI Z Y, YAN L P, et al. A phase differential heterodyne interferometer for simultaneous measurement of straightness error and displacement[J]. Optics Communications, 2021, 497: 127195. doi: 10.1016/j.optcom.2021.127195http://dx.doi.org/10.1016/j.optcom.2021.127195
BADAMI V, DE GROOT P. Displacement measuring interferometry[J]. Handbook of optical dimensional metrology, 2013, 4.
0
浏览量
67
下载量
0
CSCD
关联资源
相关文章
相关作者
相关机构