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1.武汉大学 动力与机械学院,湖北 武汉 430072
2.武汉大学 先进光源研究中心,湖北 武汉 430072
3.中国科学院 高能物理研究所,北京 100049
[ "鲁浩林(2001-),男,湖北黄冈人,硕士研究生,2022年于武汉大学获得学士学位,主要研究方向为单色器运动控制。E-mail: luhaolin@whu.edu.cn" ]
[ "肖晓晖(1969-),女,湖南益阳人,教授,博士生导师,1991年、1998年于武汉大学分别获得学士学位、硕士学位,2005年于华中科技大学获得博士学位,主要研究方向为微/纳米机器人运动控制。E-mail: xhxiao@whu.edu.cn" ]
纸质出版日期:2024-08-10,
收稿日期:2024-04-03,
修回日期:2024-05-31,
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鲁浩林,刘卯卯,何思宇等.多通道双晶单色器平行度测量与运动轨迹规划[J].光学精密工程,2024,32(15):2374-2386.
LU Haolin,LIU Maomao,HE Siyu,et al.Parallelism measurement and trajectory planning of multi-channel double crystal monochromator[J].Optics and Precision Engineering,2024,32(15):2374-2386.
鲁浩林,刘卯卯,何思宇等.多通道双晶单色器平行度测量与运动轨迹规划[J].光学精密工程,2024,32(15):2374-2386. DOI: 10.37188/OPE.20243215.2374.
LU Haolin,LIU Maomao,HE Siyu,et al.Parallelism measurement and trajectory planning of multi-channel double crystal monochromator[J].Optics and Precision Engineering,2024,32(15):2374-2386. DOI: 10.37188/OPE.20243215.2374.
针对双转轮多通道双晶单色器的平行度误差补偿问题,提出一种基于光电自准直仪的多通道双晶单色器准静态双晶衍射面平行度测量方法以及一种S型曲线轨迹规划方法。分析多通道单色器的结构及运动特点,基于光电自准直仪提出多通道双晶单色器平行度测量系统的总体框架及测量具体流程。结合多通道双晶单色器运动特点,提出一种S型曲线轨迹规划方法,并基于平行度测量结果对单色器运动轨迹进行优化设计。最后,在搭建的实验平台上开展准静态平行度测量实验及运动轨迹跟踪实验。结果表明:所搭建的平行度测量系统的平行度分辨率达0.5″,相邻两组晶体角度跃迁差值在百角秒量级;所提S型曲线轨迹规划算法将轨迹跟踪误差抑制在6.1″,相比传统5阶多项式及未规划轨迹,跟踪误差分别降低58.7%和63.9%。实验结果验证了所提方法有效性,对改进双转轮多通道双晶单色器性能具有良好的实际应用价值。
To address parallelism error compensation in a dual-rotation multi-channel double crystal monochromator (DCM)
we propose a method using an autocollimator to measure the quasi-static parallelism of diffraction surfaces and an S-curve trajectory planning method. First
we analyze the structure and motion of the monochromator. Then
we present a measurement system framework using the autocollimator. We also propose an S-curve trajectory planning algorithm to optimize the motion trajectory based on parallelism measurements. Finally
experiments on the constructed platform show that the measurement system achieves a 0.5" resolution
with crystal angle transitions varying by hundreds of arcseconds. The S-curve planning algorithm reduces trajectory tracking error by 58.7% and 63.9% compared to a 5th order polynomial and unplanned trajectories
respectively
with a 6.1" tracking error. These results confirm the method's efficacy in enhancing the performance of the monochromator.
同步辐射X射线双晶单色器误差补偿平行度测量轨迹规划
synchrotron radiation X raydouble crystal monochromatorerror compensationparallelism measurementtrajectory planning
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