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2005 年第 4 期

Optical coatings:trends and challenges
Norbert Kaiser,Torsten Feigl,Olaf Stenzel,Ulrike Schulz,Ming-hong Yang
2005, 13(4): 389-396.

摘要：New applications in optoelectronics, photonics, telecommunication, displays, optical data processing, biomedicine, sensors, energy control, automobile, aerospace, and architecture stimulation are important developments in physics and technology of optical coatings. This paper will focus on the latest advances in the areas of new optical film systems and devices, new optical coating materials and film fabrication techniques, process control and monitoring, and different advanced applications. Particularly, focus is on optical films that combine optical design with microstructural features tailored on the nanometer and micrometer scales. Evaluation of film stability and integrity in harsh industrial environments and their compatibility with organic polymers are important as well.
关键词：optical coating;layer concept;nano-structure;multilayer optics;overview

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发布时间：2020-08-12
ITO thin films prepared by electron beam evaporation with End-Hall ion source assisted without heating to the substrate
GAO Jin-song,XU Ying,WANG Xiao-yi,WANG Tong-tong
2005, 13(4): 397-402.

摘要：ITO (indium oxide doped with tin) thin films were deposited on glass substrates by using ITO pellet with a composition of w(In₂O₃)=90% and w(SnO₂)=10% by electron beam evaporated with End-Hall ion source assisted without extra heating. The rate of deposition and flow rate of oxygen were measured and changed to obtain the best properties of ITO thin films. Furthermore, the post annealing process was done in vacuum at different annealing temperatures for 2 h and at 400℃ for different keeping time, respectively. The relation between optical, electrical properties and structure was discussed in detail.
关键词：ITO film;End-Hall ion source;optical transmittance;sheet resistance;annealing

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发布时间：2020-08-12
Optical broadband monitoring of thin film growth
H. Ehlers,T. Groβ,M. Lappschies,D. Ristau
2005, 13(4): 403-412.

摘要：This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. In this context, the present study gives a review on selected combinations of conventional and ion deposition techniques with different broadband online spectrophotometric systems. Besides two systems operating in the VIS- and NIR-spectral range in combination with ion processes, also a monochromator system developed for conventional deposition processes in the DUV/VUV-spectral range will be discussed. The considerations will be concluded by a comparison of the major advantages of the specific combinations of processes with online monitoring concepts and by a brief outlook concerning future challenges.
关键词：optical coating;optical broadband monitoring;ion assisted deposition;ion beam sputtering;DUV;VUV

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发布时间：2020-08-12
Determination of surface structure and the depth profile of silica glass by infrared spectroscopy
C. Z. Tan
2005, 13(4): 413-420.

摘要：The surface structure and properties are different from those of the bulk, depending on the substrate materials and deposition condition, and playing an important role in precise optical components. The conventional spectroscopic methods to monitor the surface structure are restricted only in several layers of molecules. It is known that the penetration depth of the incident light increases with its wavelength and decreases with the angle of incidence. Thus infrared spectroscopy provides a powerful means for determination of surface structure and the depth profile up to micrometers. By recording the reflection spectra at different angles of incidence, the surface structure and its depth profile can be monitored successively. Further, the incident field has the subcomponents parallel and perpendicular to the surface, which excite the transverse and longitudinal optic modes, respectively. Change of the polarization direction of the incident light provides a practical function to study anisotropic property of the surface and the interaction between the transverse and longitudinal optic modes. In this work, infrared spectrophotometer was applied to investigate the depth profile in microstructure of silica glass. Combining with the glass fiber system, this technique can be used for in-situ control of the deposition process. In comparing with ellipsometry, this method reveals both structural and constitutional information.
关键词：surface structure;depth profile;infrared spectroscopy;silica glass

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发布时间：2020-08-12
Multilayer optics for the EUV and soft X-rays
Torsten Feigl,Sergiy Yulin,Nicolas Benoit,Norbert Kaiser
2005, 13(4): 421-429.

摘要：The demand to enhance the optical resolution, to structure and observe ever smaller details, has pushed the way towards the EUV and soft X-rays. Induced mainly by the production of more powerful electronic circuits with the aid of projection lithography, optics developments in recent years can be characterized by the use of electromagnetic radiation with smaller wavelength. The good prospects of the EUV and soft X-rays for next generation lithography systems (λ=13.5 nm), microscopy in the "water window" (λ=2.3~4.4 nm), astronomy (λ=5~31 nm), spectroscopy, plasma diagnostics and EUV/soft X-ray laser research have led to considerable progress in the development of different multilayer optics. Since optical systems in the EUV/soft X-ray spectral region consist of several mirror elements a maximum reflectivity of each multilayer is essential for a high throughput. This paper covers recent results of the enhanced spectral behavior of Mo/Si, Cr/Sc and Sc/Si multilayer optics.
关键词：Mo/Si;Cr/Sc;Sc/Si;optics;multilayer mirror;magnetron sputtering;EUV;soft X-ray

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发布时间：2020-08-12
Weak absorption test and defect analysis of optical coatings
HE Hong-bo,LI Xia,FAN Shu-hai,ZHAO Yuan-an,SHAO Jian-da,FAN Zheng-xiu
2005, 13(4): 430-434.

摘要：Surface thermal lensing technique was developed into a high-sensitive apparatus for weak absorption test and defect analysis of optical coatings. A continuous-wave 1 064 nm Nd:YAG laser and a He-Ne laser were employed as pump source and probe source, respectively. Low noise photoelectrical components and a lock-in amplifier were used for photo-thermal deformation signal detection. In order to improve sensitivity, the apparatus configuration was optimized by choosing appropriate parameters, including pump beam spot size, chopper frequency, detection distance, waist radius and position of probe beam. Coating samples were mounted on a x-y stage. Different procedures, such as single spot, linear scan and 2-dimension area scan, could be performed manually or automatically. Various optical coatings were prepared by both electron beam evaporation and ion beam sputtering deposition. High sensitivity was obtained and low to 1×10^-7 weak absorption was tested in low-loss coating samples. For the sensitivity extreme of the system, 1×10^-8 absorption was reason out to be measured by surface thermal lensing technique. Very small standard deviation was achieved for the reproducibility evaluation. Moreover, a spatial resolution of 25 micron was proved according to the area scan which traced out the profile of photo-thermal defects inside optical coatings. The system was employed in the analyses of optical absorption, absorption uniformity and defect characterization, and revealed the relationship between laser-induced damage and absorption of optical coatings.
关键词：surface thermal lens;absorption;coating defect;optical coating;sensitivity

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发布时间：2020-08-12
Standardization in optical coating characterisation
D. Ristau
2005, 13(4): 435-453.

摘要：In the rapid development course of laser technology and modern optics, optical metrology continuously gains importance for the quality management in the industrial production environment and also for research in optical coatings. Besides absorption and scatter losses, the spectral characteristics and laser induced damage thresholds are considered as common quality factors for coated optical components and often define the optimization targets for new products and applications. Also, these quality parameters are the basis for the comparison of commercial optics and can be found in the product catalogues of most manufacturers of optical components. As a consequence, standardization of characterisation procedures for these fundamental properties evolved to a crucial point for the optics industry. During the last decade, adapted standard measurement techniques have been elaborated and discussed by representatives from many industrial companies and research institutes within working groups of the International Organisation for Standardization (ISO). In this contribution, the current state of standardized characterisation techniques for optical coatings is summarised. Selected standards for the measurement of absorption (ISO 11551), scattering (ISO 13696) and laser induced damage thresholds (ISO 11254, Parts 1 and 2) will be described and discussed in view of their applicability and reproducibility. The report will be concluded by an outlook on the current projects and future tasks of standardization in optics characterisation.
关键词：optical coating;standardization;optics characterisation;absorption;scattering;laser induced damage threshold;round-robin test

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发布时间：2020-08-12
Study on superprism effect in the multilayer optical thin film stack
SUN Xue-zheng,GU Pei-fu,CHEN Hai-xing,JIN Bo,LI Hai-feng,LIU Xu
2005, 13(4): 454-458.

摘要：Researches show that multilayer optical thin film stack can exhibit superprism effect due to their large abnormal dispersions. We investigated and simulated this effect numerically in a 1-D non-periodic film structure-Fabry-Perot filters (FPF), which possess drastic change in phase and large group delay around wavelength of peak transmittance, and fabricated this device to realize remarkable superprism effect. We tested experimentally with the maximum spatial separation shift up to 65 μm, and the experimental result is in good agreement with the theory. Compared with the traditional prism, the total thickness of our structure is only 3.3 μm, and our prism shows a stronger angular resolution of 1.8°/nm.
关键词：multilayer optical thin film;photonic crystal;superprism effect;Fabry-Perot filter;group delay

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发布时间：2020-08-12
Optical coating and nano-structuring on plastics
U. Schulz,P. Munzert,A. Kaless,N. Kaiser
2005, 13(4): 459-464.

摘要：The coating of plastics for optical applications is intended to improve the mechanical durability of soft polymers and to serve an antireflection function. Usually a classic four-layer antireflection system is added on top of a single-layer hard coating. With needle optimisation,an alternative coating design has been developed. Plasma ion assisted deposition was used to deposit coatings upon polymers. Uniform antireflection and high scratch resistance have been achieved.
关键词：optical coating;nano-structure;plastic substrate

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发布时间：2020-08-12
Research and development of VUV optical coatings for micro mirror applications
Ming-hong Yang,Alexandre Gatto,Norbert Kaiser
2005, 13(4): 465-470.

摘要：This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors.
关键词：vacuum UV;thin film;micro mirror;spatial light modulator

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发布时间：2020-08-12
Investigation of high power laser coatings
SHAO Jian-da,FAN Zheng-xiu
2005, 13(4): 471-479.

摘要：High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage, including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage, and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed, and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore, some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity, and the thickness uniformity can be amended to less than 1% in the range of Φ650 mm. Preliminary investigation related to surface deformation was also conducted.
关键词：high power laser coating;laser induced damage threshold (LIDT);defect;thickness uniformity;oxygen-plasma post-treatment;large aperture;surface deformation

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发布时间：2020-08-12
Optical coatings for fiber lasers
HONG Dong-mei,ZHU Zhen,YUE Wei
2005, 13(4): 480-482.

摘要：Fiber laser is the future development direction for the high energy lasers. This paper describs two kinds of optical coatings for fiber laser, including long and short wave pass filters. The one characteristic of fiber laser coatings lies in that coatings should separate two closely wavelength light including laser pump wavelength (980 nm) and laser irradiation wavelength(1 050~1 100 nm). At the same time, the coatings should have high laser damage threshold.
关键词：fiber laser;edge filter;plasma ion assisted deposition

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发布时间：2020-08-12
Infrared optical coatings in SITP
LIU Ding-quan,ZHANG Feng-shan
2005, 13(4): 483-486.

摘要：Infrared optical coatings in SITP (Shanghai Institute of Technical Physics) mainly cover the spectrum range from 0.7 μm to 15 μm, and visible and near-UV range are also been included. The coatings are mainly used for metal-reflectance mirrors, Anti-reflection(AR) lens and windows, filters, and dichroic beam splitters. Coatings passed some dependability tests. These optical coated devices usually consist in a remote observing instrument. Most coating materials are commercial products. And one kind of special material PbTe is made by ourselves. Some main results of our research department are reported.
关键词：optical coating;infrared;remote observing instrument

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发布时间：2020-08-12
A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data
S. Wilbrandt,O. Stenzel,D. G bler,N. Kaiser
2005, 13(4): 487-491.

摘要：Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband monitoring system was developed to measure the transmittance of the growing film directly at the rotating substrate. For characterization of these coatings, a new model was developed, which significantly reduces the number of parameters. The refractive index profile may be described by a proper number of equally spaced volume fraction values using the Bruggeman effective media approach. A good initial approximation of the refractive index profile can be generated based on deposition rates for both materials recorded with quartz crystal monitor during manufacturing. During the optimization process, a second order minimization algorithm was used to vary the refractive index profile of the whole coating and film thickness of the intermediate stages. Finally, a significantly improved accuracy of the modelled transmittance was achieved.
关键词：inhomogenenous coating;refractive index profile;broadband monitoring;hybrid algorithm

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发布时间：2020-08-12
A novel absorptive thin film for laser welding in optoelectronic device capsulation
JIANG Shao-ji,JIN Tao,LI Wei-duo,WANG He-zhou
2005, 13(4): 492-499.

摘要：A kind of absorptive thin film was designed and used in laser welding of SiO₂, Si and LiNbO₃. This absorptive thin film of three-layer metal-dielectric-metal structure is designed for further reducing the high reflectance of the Nd:YAG laser beam on the surface of the tin layer that is utilized as solder between the transparent parent materials. The actual absorption of laser energy in experiment exceeds 99%. This combination of absorber and solder transformed the laser energy into heat efficiently and decreased the minimum necessary incident laser power transmitting through the transparent parent materials. As a result, the damage of the parent materials, which is suffered from laser transmission, was avoided; On the other hand, mechanical stability of the welded materials had been improved. Experiment had been made to show the difference between welding with and without the absorptive thin film.
关键词：absorber;absorptive thin films;laser welding;wave-guide;optical components;MEMS

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发布时间：2020-08-12
High laser damage threshold coatings and damage testing technology
MA Ping,HU Jian-ping,CHEN Song-lin,TANG Ming,WANG Zhen,LI Wei,XU Qiao
2005, 13(4): 500-504.

摘要：The laser-induced damage threshold(LIDT) of optical coating is a limited factor for development of a high peak power laser. The automatic damage testing facility was built to determine the LIDT of optics at 1 064 nm and 355 nm.. The cleanning and processing procedure of the substrate and coating technique were improved, and the damage resistance of high-reflective coating at 1 064 nm was increased.
关键词：laser coating;laser damage threshold;damage testing

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发布时间：2020-08-12
Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅
R. Leitel,O. Stenzel,S. Wilbrandt,D. G bler,V. Janicki,N. Kaiser
2005, 13(4): 505-511.

摘要：Gradient index layers and rugate structures were fabricated on a Leybold Syrus pro deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To obtain information about the compositional profiles of the produced layers, cross sectional transmission electron microscopy was used in assistance to deposition rate data recorded by two independent crystal monitors during the film preparation. The depth dependent concentration profiles were transformed to refractive index gradients by means of effective medium approximation. Based on the refractive index gradients the corresponding samples` transmission and reflection spectra could be calculated by utilizing matrix formalism. The relevance of the established refractive index profiles could be verified by comparison of the calculated spectra with the measured ones.
关键词：physical vapor deposition;effective medium approximation;rugate structure

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发布时间：2020-08-12
Research of multilayers in EUV;soft X-ray and X-ray
WANG Zhan-shan,WANG Feng-li,ZHANG Zhong,WANG Hong-chang,WU Wen-juan,ZHANG Shu-min,XU
2005, 13(4): 512-518.

摘要：To develop beam splitters for soft X-ray laser Michelson interferometer at 13.9 nm, Mo/Si multilayers of 100 nm thickness deposited on both sides of silicon nitride were fabricated by using DC magnetron sputtering. Initial evaluation of their reflectivity and transmission showed that reflectivity and transmission were above 10% and 25%. The broadband analyzers have been designed, fabricated and characterized for 13~20 nm polarization measurements. The measured results are in good agreement with the design. The supermirrors with different angular intervals at 0.154 nm have been designed, fabricated and characterized.
关键词：multilayer;analyzer;broadband;supermirror

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