摘要:Solar-blind uv induced transmission filters (SBU-ITF) fabricated by ion-beam sputtering were
investigated. Firstly, solar-blind uv induced transmission filters (SBU-ITF) were designed and analyzed by theory,
and the fabrication of ZrO2, SiO2 and Al film by ion beam sputtering were optimized. The optical constants of ZrO2
and SiO2 films were derived from the transmitting and reflecting spectrum. The optical constants of Al film was
determined by the inversion of the variable incidence ellipsometer spectrum of sample
JGS1/SiO2/Al/SiO2/air(SAS).On the base of the above research, the SBU-ITF were fabricated by using the three
above films and the optical performance was measured. The measured transmittance of SBU-ITF show that, the
peak transmittance at the 264nm center wavelength of transmittance of the filter was larger than 60%, the
transmittance band width (FWHM) was about 13nm, the optical density in the 300-350nm cutoff spectral region
was 2.6.The analyses of the transmittance show that the main factors limiting the performance of SBU-ITF
included the slow deposition speed of Al film by ion-beam sputtering and the small amount of O2 content in the
chamber during deposition of Al film.