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Flatness measurement and error compensation model based on co-frame parallel dual-probe measurement system
Precision Optics Empowering Modern Astronomy Research\—Frontier Technologies and Methods in Astronomical Optics | 更新时间：2026-09-18

    • Flatness measurement and error compensation model based on co-frame parallel dual-probe measurement system

    • Optics and Precision Engineering   Vol. 34, Issue 17, Pages: 2670-2685(2026)

    • DOI：10.3724/OPE.20263417.2670    

      CLC： TN215
    • CSTR：32169.14.OPE.20263417.2670    

    • Received：26 June 2026，

      Revised：2026-07-20，

      Published：10 September 2026

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  • ZHANG Shengbo,WANG Zhiyi,WANG Jianli,et al.Flatness measurement and error compensation model based on co-frame parallel dual-probe measurement system[J].Optics and Precision Engineering,2026,34(17):2670-2685.

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YAO Kainan
SUN Zhengqi
LIU Changhua
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Related Institution

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Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
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Changchun Institute of Optics,Fine Mechanics and Physics, Chinese Academy of Sciences
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