ZHENG Houqiang,KANG Shengzheng,WANG Haowen,et al.Trajectory tracking control of piezoelectric positioning stage based on fractional-order sliding mode active disturbance rejection control[J].Optics and Precision Engineering,2026,34(02):218-230.
ZHENG Houqiang,KANG Shengzheng,WANG Haowen,et al.Trajectory tracking control of piezoelectric positioning stage based on fractional-order sliding mode active disturbance rejection control[J].Optics and Precision Engineering,2026,34(02):218-230. DOI: 10.37188/OPE.20263402.0218. CSTR: 32169.14.OPE.20263402.0218.