Development of integrated torque sensor for harmonic reducer and Error Compensation

GAO Hailong; SHEN Wenqiang; DU Zhijie; CAO Jiajun; WANG Xiaodong; LOU Zhifeng

doi:10.37188/OPE.20243212.1857

您当前的位置：

首页 >

文章列表页 >

Development of integrated torque sensor for harmonic reducer and Error Compensation

Micro/Nano Technology and Fine Mechanics | 更新时间：2024-07-26

- Development of integrated torque sensor for harmonic reducer and Error Compensation
- Optics and Precision Engineering Vol. 32, Issue 12, Pages: 1857-1867(2024)
- 作者机构：
  
  大连理工大学机械工程学院，辽宁大连 116024
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20243212.1857
  CLC： TP242;TH823
- Published：25 June 2024，
  
  Received：09 March 2024，
  
  Revised：11 April 2024，
- 稿件说明：
移动端阅览
高海龙,沈文强,杜志杰等.谐波减速器转矩原位测量及误差补偿[J].光学精密工程,2024,32(12):1857-1867.

GAO Hailong,SHEN Wenqiang,DU Zhijie,et al.Development of integrated torque sensor for harmonic reducer and Error Compensation[J].Optics and Precision Engineering,2024,32(12):1857-1867.
高海龙,沈文强,杜志杰等.谐波减速器转矩原位测量及误差补偿[J].光学精密工程,2024,32(12):1857-1867. DOI： 10.37188/OPE.20243212.1857.

GAO Hailong,SHEN Wenqiang,DU Zhijie,et al.Development of integrated torque sensor for harmonic reducer and Error Compensation[J].Optics and Precision Engineering,2024,32(12):1857-1867. DOI： 10.37188/OPE.20243212.1857.

摘要

为实现协作机器人精准力控，利用谐波减速器柔轮变形研制了一种原位集成转矩传感器。提出了基于傅里叶级数模型的剩余纹波补偿方法提高测量精度。提出了基于傅里叶级数模型的剩余纹波补偿方法提高测量精度。首先，分析了柔轮底部应变规律，通过正弦叠加的原理设计了应变敏感栅结构；然后建立纹波与波发生器角度之间的傅里叶级数模型，补偿剩余纹波；最后，研制了测试平台进行加载测试，结果表明，在波发生器静止状态下施加瞬时激励和阶跃负载，自制转矩传感器与标准转矩传感器输出误差为0.988%和0.253%；在波发生器旋转状态下施加阶梯变化、正弦变化、正弦变化过程中人为碰撞三种形式的负载，自制转矩传感器与标准转矩传感器输出误差为3.822%，4.247%和4.456%。本文提出的补偿方法能有效降低剩余纹波对传感器输出的干扰，有利于推动关节转矩精准测量的实现。

Abstract

In order to achieve precise force control of collaborative robot， an in-situ integrated torque sensor is developed by using the deformation of the flexspline of the harmonic reducer. Proposed a residual ripples compensation method based on Fourier series model to improve measurement accuracy. Firstly， the strain law at the bottom of the flexspline was analyzed， and the sensitive grid structure of the strain gauge was designed based on the principle of sinusoidal superposition； Then the Fourier series model between the remain ripples and the angle of the wave generator was established to compensate the residual ripple； Finally， a test platform is developed for loading test， the results show that the output errors of the self-made torque sensor and the standard torque sensor are 0.988% and 0.253% when the instantaneous excitation and step load are applied under the static state of the wave generator； Under the rotating state of the wave generator， three kinds of loads， i.e. step change， sinusoidal change and man-made collision in the process of sinusoidal change， are applied. The output errors between the self-made torque sensor and the standard torque sensor are 3.822%， 4.247% and 4.456%. The compensation method proposed in this paper can effectively reduce the interference of residual ripple on the sensor output， which is conducive to the realization of accurate measurement of joint torque.

关键词

转矩传感器谐波减速器傅里叶级数误差补偿

Keywords

torque sensorharmonic reducerFourier serieserror compensation

references

张奇，牛廉政，范亚南，等. 机器人关节扭矩测试传感器的设计［J］. 传感技术学报， 2020， 33（4）： 506-510. doi: 10.3969/j.issn.1004-1699.2020.04.005http://dx.doi.org/10.3969/j.issn.1004-1699.2020.04.005

ZHANG Q， NIU L Z， FAN Y N， et al. Design of robot joint torque measurement sensor［J］. Chinese Journal of Sensors and Actuators， 2020， 33（4）： 506-510.（in Chinese）. doi: 10.3969/j.issn.1004-1699.2020.04.005http://dx.doi.org/10.3969/j.issn.1004-1699.2020.04.005

PERRONE M， MELL S P， MARTIN J， et al. Machine learning-based prediction of hip joint moment in healthy subjects， patients and post-operative subjects［J］. Computer Methods in Biomechanics and Biomedical Engineering， 2024： 1-5. doi: 10.1080/10255842.2024.2310732http://dx.doi.org/10.1080/10255842.2024.2310732

马志举，吴海彬. 无外部传感器的机器人碰撞检测［J］. 测试技术学报， 2013， 27（3）： 254-259. doi: 10.3969/j.issn.1671-7449.2013.03.014http://dx.doi.org/10.3969/j.issn.1671-7449.2013.03.014

MA Z J， WU H B. Sensorless collision detection for robot manipulator［J］. Journal of Test and Measurement Technology， 2013， 27（3）： 254-259.（in Chinese）. doi: 10.3969/j.issn.1671-7449.2013.03.014http://dx.doi.org/10.3969/j.issn.1671-7449.2013.03.014

姚斌，张建勋，代煜，等. 用于微创外科手术机器人的多维力传感器解耦方法研究［J］. 仪器仪表学报， 2020， 41（1）： 147-153. doi: 10.19650/j.cnki.cjsi.J1905479http://dx.doi.org/10.19650/j.cnki.cjsi.J1905479

YAO B， ZHANG J X， DAI Y， et al. Research on decoupling method of multi-dimensional force sensor used in minimally invasive surgical robot［J］. Chinese Journal of Scientific Instrument， 2020， 41（1）： 147-153.（in Chinese）. doi: 10.19650/j.cnki.cjsi.J1905479http://dx.doi.org/10.19650/j.cnki.cjsi.J1905479

FU B， CAI G W. Design and calibration of a joint torque sensor for robot compliance control［J］. IEEE Sensors Journal， 2021， 21（19）： 21378-21389. doi: 10.1109/jsen.2021.3104351http://dx.doi.org/10.1109/jsen.2021.3104351

ZHANG H W， AHMAD S， LIU G J. Torque estimation for robotic joint with harmonic drive transmission based on position measurements［J］. IEEE Transactions on Robotics， 2015， 31（2）： 322-330. doi: 10.1109/tro.2015.2402511http://dx.doi.org/10.1109/tro.2015.2402511

杨聪彬，郭庆旭，刘志峰，等. 谐波传动柔轮变形测量误差分析与补偿［J］. 光学精密工程， 2021， 29（4）： 793-801. doi: 10.37188/ope.20212904.0793http://dx.doi.org/10.37188/ope.20212904.0793

YANG C B， GUO Q X， LIU Z F， et al. Research on error analysis and compensation method for deformation measurement of flexible wheel of harmonic drive［J］. Opt. Precision Eng.， 2021， 29（4）： 793-801.（in Chinese）. doi: 10.37188/ope.20212904.0793http://dx.doi.org/10.37188/ope.20212904.0793

王雪竹，崔龙，李洪谊，等. 谐波力矩测量技术分析和优化设计［J］. 宇航学报， 2015， 36（8）： 885-892. doi: 10.3873/j.issn.10001328.2015.08.004http://dx.doi.org/10.3873/j.issn.10001328.2015.08.004

WANG X Z， CUI L， LI H Y， et al. Analysis and optimization of torque measurement technique for harmonic drive［J］. Journal of Astronautics， 2015， 36（8）： 885-892.（in Chinese）. doi: 10.3873/j.issn.10001328.2015.08.004http://dx.doi.org/10.3873/j.issn.10001328.2015.08.004

HASHIMOTO M， KIYOSAWA Y， PAUL R P. A torque sensing technique for robots with harmonic drives［J］. IEEE Transactions on Robotics and Automation， 1993， 9（1）： 108-116. doi: 10.1109/70.210802http://dx.doi.org/10.1109/70.210802

TAGHIRAD H D， BELANGER P R. Torque ripple and misalignment torque compensation for the built-in torque sensor of harmonic drive systems［J］. IEEE Transactions on Instrumentation and Measurement， 1998， 47（1）： 309-315. doi: 10.1109/19.728840http://dx.doi.org/10.1109/19.728840

TAGHIRAD H D， HELMY A， BELANGER P R. Intelligent built-in torque sensor for harmonic drive systems［C］. IEEE Instrumentation and Measurement Technology Conference Sensing， Processing， Networking. IMTC Proceedings. Ottawa， ON， Canada. IEEE， 1997： 969-974.

GODLER I， HORIUCHI M， HASHIMOTO M， et al. Accuracy improvement of built-in torque sensing for Harmonic Drives［J］. IEEE/ASME Transactions on Mechatronics， 2000， 5（4）： 360-366. doi: 10.1109/3516.891047http://dx.doi.org/10.1109/3516.891047

GODLER I， HASHIMOTO M， HORIUCHI M， et al. Performance of gain-tuned harmonic drive torque sensor under load and speed conditions［J］. IEEE/ASME Transactions on Mechatronics， 2001， 6（2）： 155-160. doi: 10.1109/3516.928730http://dx.doi.org/10.1109/3516.928730

GODLER I. A method to compensate periodic errors by gain tuning in instrumentation［J］. IEEE Transactions on Instrumentation and Measurement， 2002， 51（1）： 37-42. doi: 10.1109/19.989894http://dx.doi.org/10.1109/19.989894

JUNG B J， KIM B， KOO J C， et al. Joint torque sensor embedded in harmonic drive using order tracking method for robotic application［J］. IEEE/ASME Transactions on Mechatronics， 2017， 22（4）： 1594-1599. doi: 10.1109/tmech.2017.2694039http://dx.doi.org/10.1109/tmech.2017.2694039

潘新安，王洪光，姜勇. 一种机器人谐波减速器内嵌扭矩传感器的研制［J］. 仪器仪表学报， 2014， 35（1）： 154-161. doi: 10.3969/j.issn.0254-3087.2014.01.022http://dx.doi.org/10.3969/j.issn.0254-3087.2014.01.022

PAN X A， WANG H G， JIANG Y. Development of a built-in torque sensor in harmonic drive gears for robots［J］. Chinese Journal of Scientific Instrument， 2014， 35（1）： 154-161.（in Chinese）. doi: 10.3969/j.issn.0254-3087.2014.01.022http://dx.doi.org/10.3969/j.issn.0254-3087.2014.01.022

马罗文，刘宁，胡心语，等. FFT幅相联合的快速高精度频率估计方法［J］. 计测技术， 2022， 42（6）： 34-39. doi: 10.11823/j.issn.1674-5795.2022.06.05http://dx.doi.org/10.11823/j.issn.1674-5795.2022.06.05

MA L W， LIU N， HU X Y， et al. Fast and high-precision frequency estimation via the combination of FFT amplitude and phase information［J］. Metrology & Measurement Technology， 2022， 42（6）： 34-39.（in Chinese）. doi: 10.11823/j.issn.1674-5795.2022.06.05http://dx.doi.org/10.11823/j.issn.1674-5795.2022.06.05

Views

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Development of integrated torque sensor for harmonic reducer and Error Compensation

Design and testing of harmonic reducer integrated with torque sensor

Grating interferometric precision nanometric measurement technology

Parallelism measurement and trajectory planning of multi-channel double crystal monochromator

Error analysis and correction of surface inclination angle of non-coaxial parallel chromatic confocal measurement system

Related Author

GAO Hailong

WANG Xiaodong

DU Zhijie

SHEN Wenqiang

GAO Hailong

LIU Yujie

LOU Zhifeng

LI Xinghui

Related Institution

Shenzhen International Graduate School， Tsinghua University

Tsinghua-Berkeley Shenzhen Institute， Tsinghua University

School of Power and Mechanical Engineering， Wuhan University

Advanced Light Source Research Center， Wuhan University

Institute of High Energy Physics， Chinese Academy of Sciences

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰