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Optimization of process parameters of multi-spectral ZnS CMP with high surface quality
Modern Applied Optics | 更新时间：2025-11-04

    • Optimization of process parameters of multi-spectral ZnS CMP with high surface quality

    • “In the field of multispectral zinc sulfide surface treatment, experts have achieved synergistic control of surface high precision and high quality by optimizing chemical mechanical polishing process parameters, providing technical support for high-performance optical device applications.”
    • Optics and Precision Engineering   Vol. 33, Issue 18, Pages: 2868-2881(2025)

    • DOI：10.37188/OPE.20253318.2868    

      CLC： TP394.1;TH691.9
    • CSTR：32169.14.OPE.20253318.2868    

    • Received：10 July 2025，

      Revised：2025-07-29，

      Published：25 September 2025

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  • REN Jiatong,QIN Lin,ZHU Beibei,et al.Optimization of process parameters of multi-spectral ZnS CMP with high surface quality[J].Optics and Precision Engineering,2025,33(18):2868-2881. DOI： 10.37188/OPE.20253318.2868. CSTR： 32169.14.OPE.20253318.2868.

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