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YANG Yongkang,LIU Anqi,ZHANG Wenxi,et al.Research on centering error measurement technology based on full-field heterodyne[J].Optics and Precision Engineering,2025,33(08):1179-1189. DOI: 10.37188/OPE.20253308.1179. CSTR: 32169.14.OPE.20253308.1179.