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Bump height measurement of chip packaging based on white light triangulation
Bump height measurement of chip packaging based on white light triangulation
- Optics and Precision Engineering Vol. 31, Issue 13, Pages: 1890-1899(2023)
DOI: 10.37188/OPE.20233113.1890
Revised:2022-12-21
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Related Author
ZHOU Shunye
TANG Liang
CUI Han
QIU Lirong
ZHAO Weiqian
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Related Institution
School of Optics and Photonics, Beijing Institute of Technology
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Key Laboratory of Space Active Opto-Electronics Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences


