Development of 6-DOF micro-driving stage with sub-nano driving resolution

HUANG Qiangxian; CHENG Baolin; ZHANG Chibin; ZHANG Fan; ZHANG Liansheng

doi:10.37188/OPE.20233113.1933

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Development of 6-DOF micro-driving stage with sub-nano driving resolution

Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-12

- Development of 6-DOF micro-driving stage with sub-nano driving resolution
- Optics and Precision Engineering Vol. 31, Issue 13, Pages: 1933-1940(2023)
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室，安徽合肥 230009
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233113.1933
  CLC： TH122
- Received：15 December 2022，
  
  Revised：2023-01-18，
  
  Published：10 July 2023
- 稿件说明：
移动端阅览
黄强先,程保林,张弛斌等.亚纳米驱动分辨力的六自由度微动台[J].光学精密工程,2023,31(13):1933-1940.

HUANG Qiangxian,CHENG Baolin,ZHANG Chibin,et al.Development of 6-DOF micro-driving stage with sub-nano driving resolution[J].Optics and Precision Engineering,2023,31(13):1933-1940.
黄强先,程保林,张弛斌等.亚纳米驱动分辨力的六自由度微动台[J].光学精密工程,2023,31(13):1933-1940. DOI： 10.37188/OPE.20233113.1933.

HUANG Qiangxian,CHENG Baolin,ZHANG Chibin,et al.Development of 6-DOF micro-driving stage with sub-nano driving resolution[J].Optics and Precision Engineering,2023,31(13):1933-1940. DOI： 10.37188/OPE.20233113.1933.

摘要

微位移工作台是实现高精度定位的关键部件，传统的工作台自由度少且分辨力不高，不能满足应用需求，因此提出一种六自由度高精度微位移工作台结构方案并验证了其性能。在整体结构上采用“串并联混合驱动”的方式和中空结构，将六个自由度的运动合理地分布在平动层，转动层和支撑层三层结构中，并设计开发了工作台的运动控制系统以及一套可搭配使用的运动控制软件。实验结果表明，

，

轴线位移分别优于20，20和37 μm，角位移行程分别优于39″，33″和27″；线位移分辨力均优于0.7 nm，角位移分辨力均优于0.1″。所提出的六自由度微位移工作台相比于传统工作台具有自由度多、极高分辨力等优点，有望在超精密加工，微电子制造等领域中获得广泛的应用。

Abstract

The micro-driving stage is the key component of high-precision positioning. The traditional work stage has few degrees of freedom （DOFs） and a low resolution； it struggles to adapt to the development needs of precision measurement and other fields. Thus， this paper presents a 6-DOF high-precision micro-driving stage and its experimental performance. The overall structure is hollow and is based on the series-parallel hybrid drive method. The movement of the six DOFs is distributed reasonably in the translational， rotating， and supporting plates. We also designed and developed a motion-control system for the micro-driving stage and motion-control software that can be used with it. Experimental results indicated that the linear displacement ranges of the

-，

-， and

-axis are better than 20， 20， and 37 μm， respectively， and the angular range is better than 39"， 33"， 27" in the pitch， roll， and yaw directions， respectively. The linear displacement resolution is better than 0.7 nm， and the angular displacement resolution is better than 0.1". Compared with the traditional work stage， the proposed 6-DOF micro-driving stage has the advantages of more DOFs and a higher resolution； thus， it is expected to be widely used in ultra-precisi

on machining and lithography equipment.

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references

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