Development of 6-DOF micro-driving stage with sub-nano driving resolution

HUANG Qiangxian; CHENG Baolin; ZHANG Chibin; ZHANG Fan; ZHANG Liansheng

doi:10.37188/OPE.20233113.1933

您当前的位置：

首页 >

文章列表页 >

Development of 6-DOF micro-driving stage with sub-nano driving resolution

Micro/Nano Technology and Fine Mechanics | 更新时间：2023-07-17

- Development of 6-DOF micro-driving stage with sub-nano driving resolution
- Optics and Precision Engineering Vol. 31, Issue 13, Pages: 1933-1940(2023)
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室，安徽合肥 230009
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233113.1933
  CLC： TH122
- Received：15 December 2022，
  
  Revised：18 January 2023，
  
  Published：10 July 2023
- 稿件说明：
移动端阅览
黄强先,程保林,张弛斌等.亚纳米驱动分辨力的六自由度微动台[J].光学精密工程,2023,31(13):1933-1940.

HUANG Qiangxian,CHENG Baolin,ZHANG Chibin,et al.Development of 6-DOF micro-driving stage with sub-nano driving resolution[J].Optics and Precision Engineering,2023,31(13):1933-1940.
黄强先,程保林,张弛斌等.亚纳米驱动分辨力的六自由度微动台[J].光学精密工程,2023,31(13):1933-1940. DOI： 10.37188/OPE.20233113.1933.

HUANG Qiangxian,CHENG Baolin,ZHANG Chibin,et al.Development of 6-DOF micro-driving stage with sub-nano driving resolution[J].Optics and Precision Engineering,2023,31(13):1933-1940. DOI： 10.37188/OPE.20233113.1933.

摘要

微位移工作台是实现高精度定位的关键部件，传统的工作台自由度少且分辨力不高，不能满足应用需求，因此提出一种六自由度高精度微位移工作台结构方案并验证了其性能。在整体结构上采用“串并联混合驱动”的方式和中空结构，将六个自由度的运动合理地分布在平动层，转动层和支撑层三层结构中，并设计开发了工作台的运动控制系统以及一套可搭配使用的运动控制软件。实验结果表明，

，

轴线位移分别优于20，20和37 μm，角位移行程分别优于39″，33″和27″；线位移分辨力均优于0.7 nm，角位移分辨力均优于0.1″。所提出的六自由度微位移工作台相比于传统工作台具有自由度多、极高分辨力等优点，有望在超精密加工，微电子制造等领域中获得广泛的应用。

Abstract

The micro-driving stage is the key component of high-precision positioning. The traditional work stage has few degrees of freedom （DOFs） and a low resolution； it struggles to adapt to the development needs of precision measurement and other fields. Thus， this paper presents a 6-DOF high-precision micro-driving stage and its experimental performance. The overall structure is hollow and is based on the series-parallel hybrid drive method. The movement of the six DOFs is distributed reasonably in the translational， rotating， and supporting plates. We also designed and developed a motion-control system for the micro-driving stage and motion-control software that can be used with it. Experimental results indicated that the linear displacement ranges of the

-，

-， and

-axis are better than 20， 20， and 37 μm， respectively， and the angular range is better than 39"， 33"， 27" in the pitch， roll， and yaw directions， respectively. The linear displacement resolution is better than 0.7 nm， and the angular displacement resolution is better than 0.1". Compared with the traditional work stage， the proposed 6-DOF micro-driving stage has the advantages of more DOFs and a higher resolution； thus， it is expected to be widely used in ultra-precision machining and lithography equipment.

关键词

Keywords

references

胡逸凡，章海军，倪凯佳 . 三角放大型压电陶瓷微纳米驱动机构［J］. 光学精密工程， 2022 ， 30 （ 17 ）： 2094 - 2099 . doi: 10.37188/OPE.20223000.0223 http://dx.doi.org/10.37188/OPE.20223000.0223

HU Y F ， ZHANG H J ， NI K J . Mini-piezo-element drive microactuator based on triangular amplification ［J］. Optics and Precision Engineering ， 2022 ， 30 （ 17 ）： 2094 - 2099 . （in Chinese） . doi: 10.37188/OPE.20223000.0223 http://dx.doi.org/10.37188/OPE.20223000.0223

张揽宇，高健 . 高速大行程宏微复合运动平台的振动抑制与精密定位方法研究［J］. 机械工程学报， 2020 ， 56 （ 11 ）： 131 .

ZHANG L Y ， GAO J . Vibration reduction mechanism and precision positioning method for high-speed large-stroke macro-micro composite motion stage ［J］. Journal of Mechanical Engineering ， 2020 ， 56 （ 11 ）： 131 . （in Chinese）

李冲，童玉健，梁康，等 . 压电驱动微型精密夹持机构设计与实验研究［J］. 中国机械工程， 2022 ， 33 （ 11 ）： 1302 - 1308， 1385 . doi: 10.3969/j.issn.1004-132X.2022.11.006 http://dx.doi.org/10.3969/j.issn.1004-132X.2022.11.006

LI CH ， TONG Y J ， LIANG K ， et al . Design and experimental study of piezoelectric actuated micro precision clamping mechanisms ［J］. China Mechanical Engineering ， 2022 ， 33 （ 11 ）： 1302 - 1308， 1385 . （in Chinese） . doi: 10.3969/j.issn.1004-132X.2022.11.006 http://dx.doi.org/10.3969/j.issn.1004-132X.2022.11.006

韩世泽，杨栋，胡晓宁，等 . 基于涡旋光与平面波干涉的微位移测量［J］. 光学精密工程， 2022 ， 30 （ 17 ）： 2058 - 2066 . doi: 10.37188/OPE.20223000.0219 http://dx.doi.org/10.37188/OPE.20223000.0219

HAN SH Z ， YANG D ， HU X N ， et al . Micro-displacement measurement based on interference of vortex beams and plane wave ［J］. Optics and Precision Engineering ， 2022 ， 30 （ 17 ）： 2058 - 2066 . （in Chinese） . doi: 10.37188/OPE.20223000.0219 http://dx.doi.org/10.37188/OPE.20223000.0219

CHEN F . Design and test of a compact large-stroke dual-drive linear-motion system ［J］. Mechanical Systems and Signal Processing ， 2022 ， 180 ： 109438 . doi: 10.1016/j.ymssp.2022.109438 http://dx.doi.org/10.1016/j.ymssp.2022.109438

CHEN N ， LIU X F . Dynamic modeling and attitude decoupling control for a 3-DOF flexible piezoelectric nano-positioning stage based on ADRC ［J］. Micromachines ， 2022 ， 13 （ 10 ）： 1591 . doi: 10.3390/mi13101591 http://dx.doi.org/10.3390/mi13101591

WU Z ， XU Q . Design， optimization and testing of a compact XY parallel nanopositioning stage with stacked structure ［J］. Mechanism and Machine Theory ， 2018 ， 126 ： 171 - 188 . doi: 10.1016/j.mechmachtheory.2018.04.008 http://dx.doi.org/10.1016/j.mechmachtheory.2018.04.008

TIAN Y ， MA Y ， WANG F ， et al . A novel XYZ micro/nano positioner with an amplifier based on L-shape levers and half-bridge structure ［J］. Sensors and Actuators A： Physical ， 2020 ， 302 ： 111777 . doi: 10.1016/j.sna.2019.111777 http://dx.doi.org/10.1016/j.sna.2019.111777

CHEN X G ， LI Y M ， XIE Y L ， et al . Design and analysis of new ultra compact decoupled XYZθ stage to achieve large-scale high precision motion ［J］. Mechanism and Machine Theory ， 2022 ， 167 ： 104527 . doi: 10.1016/j.mechmachtheory.2021.104527 http://dx.doi.org/10.1016/j.mechmachtheory.2021.104527

CHEN F X ， DONG W ， YANG M ， et al . A PZT actuated 6-DOF positioning system for space optics alignment ［C］. IEEE/ASME Transactions on Mechatronics . 20，2019 ， IEEE ， 2019 ： 2827 - 2838 . doi: 10.1109/tmech.2019.2942645 http://dx.doi.org/10.1109/tmech.2019.2942645

H-860六轴运动六足位移台［Z/OL］. https：//www.pi-china.cn/zh_cn/products/parallel-kinematic-hexapods/h-860-high-dynamics-motion-hexapod-700891 ， 2021 . doi: 10.3969/j.issn.2095-509X.2021.08.003 http://dx.doi.org/10.3969/j.issn.2095-509X.2021.08.003

H-860 six-axis motion hexapod stage ［Z/OL］. https：//www.pi-china.cn/zh_cn/products/parallel-kinematic-hexapods/h-860-high-dynamics-motion-hexapod-700891 ， 2021 . （in Chinese） . doi: 10.3969/j.issn.2095-509X.2021.08.003 http://dx.doi.org/10.3969/j.issn.2095-509X.2021.08.003

王耿，魏维宁，代军，等 . 线性偏摆复合型压电微动平台［J］. 光学精密工程， 2022 ， 30 （ 9 ）： 1058 - 1070 . doi: 10.37188/OPE.20223009.1058 http://dx.doi.org/10.37188/OPE.20223009.1058

WANG G ， WEI W N ， DAI J ， et al . Linear yaw compound piezoelectric micro-motion platform ［J］. Optics and Precision Engineering ， 2022 ， 30 （ 9 ）： 1058 - 1070 . （in Chinese） . doi: 10.37188/OPE.20223009.1058 http://dx.doi.org/10.37188/OPE.20223009.1058

Views

263

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

HUANG Qiangxian

ZHANG Liansheng

Related Institution

No data

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰