Your Location:
Home >
Browse articles >
Precision displacement measurement based on vortex beam interferometry: progress, challenges, and perspectives
Precision displacement measurement based on vortex beam interferometry: progress, challenges, and perspectives
- “Ultra precision optical displacement measurement is a core supporting technology for nano basic research, ultra precision machining, and semiconductor equipment manufacturing. This article introduces its research progress in the field of ultra precision optical metrology, and the research team systematically reviews the conjugate vortex optical rotation interference displacement measurement technology, explores six mainstream technical routes, and lays the foundation for the construction of a new generation of ultra precision optical metrology systems.”
- Optics and Precision Engineering Vol. 34, Issue 19, Pages: 3027-3055(2026)
DOI: 10.3724/OPE.20263419.3027
- CSTR: 32169.14.OPE.20263419.3027
Revised:2026-09-03
Scan QR Code
Full Text(HTML)
Figs( 18 ) Tabs( 1 )
References
Publication Info
Metrics
20
Views
13
Downloads
0
CSCD
Alert me when the article has been cited
Submit
Tools
- BibTeXDownload
- EndnoteDownload
- RefMan Download
- NoteExpressDownload
- NoteFirstDownload
Related Articles
Research progress on vortex lasers and realization in the mid-infrared band
Hybrid optimization evaluation and application of ultra-high precision flatness error
Advances in micro/nano CMM
Miniature high-precision grating displacement sensor design and error compensation
Development and error analysis of cross-scale micro-nano coordinate measuring machine
Related Author
ZHANG Yuyang
HAO Chenjun
SU Lechen
LI Haoxiang
WANG Chencheng
MIAO Yu
GAO Xiumin
SONG Bo
Related Institution
School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Chang Guang Satellite Technology Co., Ltd
College of Metrology Measurement and Instrument, China Jiliang University
School of Instrument Science and Opto-electronic Engineering, Hefei University of Technology


