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Precision displacement measurement based on vortex beam interferometry: progress, challenges, and perspectives
Modern Applied Optics | Updated:2026-10-20
    • Precision displacement measurement based on vortex beam interferometry: progress, challenges, and perspectives

    • “Ultra precision optical displacement measurement is a core supporting technology for nano basic research, ultra precision machining, and semiconductor equipment manufacturing. This article introduces its research progress in the field of ultra precision optical metrology, and the research team systematically reviews the conjugate vortex optical rotation interference displacement measurement technology, explores six mainstream technical routes, and lays the foundation for the construction of a new generation of ultra precision optical metrology systems.”
    • REN Kaili , DU Yi , DUAN Yuting , XU Yong , LI Siqi , LIU Jihong , WANG Guoxi
    • Optics and Precision Engineering Vol. 34, Issue 19, Pages: 3027-3055(2026)
    • DOI: 10.3724/OPE.20263419.3027     

      CLC:
    • CSTR: 32169.14.OPE.20263419.3027     
    • Revised:2026-09-03 ,

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