“The research team proposed a dual LaNiO3 buffer layer collaborative strain control method to address the engineering challenge of balancing high orientation and low defects in the low-temperature preparation of PZT thin films. This method enables high-performance thin film preparation at ≤ 500 ℃, and piezoelectric MEMS micro mirrors achieve ± 40 ° optical scanning angle under 25 Vpp driving, providing a feasible technical path for the integration of high-performance PZT thin films with silicon-based MEMS.”