Abstract:In this paper,some detection methods of Super-micro force sensor used in researchingscanning force microscopy are introduced,and their sensitivity,anti-viberation,operationscope,operation method,advantages and disadvantages are evaluated,and several new detection methods are illustrated.
Keywords:Scanning force microscope;Stiper-micro force;Detection
Abstract:With the rapid development of modern technologies,academic circles have paid more andmore attention to the research of micro machines.The micromachines are various,for exam-ple,self-controled micromachines can safeguard and inspect in some narrow and dangerousplaces;some of them can enter man's cavities even blood vessels to examine and operate thediseased parts;the microactuators in the scanning tunneling microscope(STM)and atomicforce microscope can reach a resolution in nm. Recently, in order to improve the research inmicromachines, microactuator and microrobot, contests which are composed of climbingmoutain. climbing cliff,selfshow etc.are held periodically in Japan. Because micromachinemust be movable,the microactuators become the most important in the domain of micromachines. This paper summarizes the principles of micromachines and microactuators,and thecontests at abroad.
Abstract:This paper describes briefly the design idea of a 6x zooming objective for a biocularstereoscopic microscope,which includes the determination of the performance parameters,the analysis and selection of configurations and the choice of varying and compensating type.
Abstract:The paper gives a new measuring method,which used for detecting the inclination angleof refracting component of matched mirror.By the method of minimum squares and regression curve,the function of inclination is presented.We see that every refracting componentof matched mirror is not a prism,it has a conicoid.The result is practical significance forstudy of matching property of motor vehicular lamps and supposition of design model.
Abstract:The data of spectral irradiaince distribution of a typical chinese solar simulator TM-500D are listed in this paper with two forms.These data show that the recommended solarsimulator is an ideal equipment for calibrating and duplicating reference solar cells. A newway for the evaluation of the spectral irradiance distribution of solar simulator is introdticed.
Abstract:A new method of measuring acceleration is put forward in this paper.The principle and experiment install are expanded here and possibility is verified both by theory and experiment.
Abstract:Several problems of dimensional precision,surface roughness and surface integrity mustbe solved to obtain three dimensional surface by laser ablation. The dimensional precision isimproved greatly by using focal system with shorter focal depth and choosing appropriatepeak power density at the focal spot. Laser ablation mechanism is understood by analysingheat transfer. Experimental results of laser ablation ceramics show that the analysis areright.
Abstract:We have studied theoretically and experimentally the coating characteristics via the tech-nology process of ZrO2 and ZrO2、MgF2 evaporation plating an the front and back cavity Sur-faces of Ga As/GaAlAs Laser.The transmission coefficient and reflective coefficient havebeen changed respectively from 68% and 32%,in the case without coatings,to above 94%and 95%. By this,the device cavity Surfaces have been protected,the out put power in-creased,and lifetime extended.
Abstract:This Paper describes the N=2M FFT algorithm for decimation in time,It contains thedemonstration of formulas,the FFT butterfly operation,the signal flow chart and the computer block diagram of the FFT algorithm and the calculation example.
Keywords:FFT;Butterfly;Pair node;Decimation in time
Abstract:It is important to study microfluid flow behaviour in microfluid control system. First,fluid flow in microchannel is discussed in the paper ,and a microfluid measuring system whichused the method of observing the surface image of fluid under microscope is then developed,which can measure some parameters related to microfluid flowing simply and precisely.Experiments on fluid flow in straight circular micro pipe of diameter 24~8μm using deionizedwater are presented here,the results are discussed at last.
Abstract:In the paper,we study the methods of grabing and releasing microelement and demands of optical observation system. We also design an assembly apparatus to assemble some micromotors.The result is satisfactory.
Abstract:A precision plating device applied to LIGA technology is introduced in this paper. The paper gives the technical parameters,the structure, the control Software and the initial experiment results of the device. This device is the first one for MEMS made in china.
Yao Jinsong,Wang Zhiqin,Wang Fei,Xuan Ming,Liang Jingqiu,Wang Yifan
Vol. 3, Issue 3, Pages: 64-66(1995)
Abstract:In three-dimensional micro-machining,LIGA process is the most prospective technologywhich is applied to micro-part machining in MEMS.But in our country the supplementarytechnology is not perfected,so LIGA process is restricted.We have adopted the quasi-SIGAprocess,Which is based on the Conventional ulltraviolet photoetching, to manufucture thehigh aspect ratio metal microgears Successfully.
Abstract:In this paper,surface texture is described,especially for the micro texture,which pro-duced by means of ultra-pricision machining with PCD tool.
Abstract:The aerostatic slideway of three coordinate measuring machine is designed.A newmethod for calculating of aerostatic slideway optimization design is presented in this paper.The calculating results of several parameters are given. The theoretical analysis and experimental studies of pressure distribution for gas-pad are described.The theoretical and experimental curves have been obtained in good agreement.
Abstract:The paper adopts time series AR(n)model to simulate the error curve of inductosyn NCequipment.The method occupies the less memory space in error compensation system andbetter deals with weak-periodic and random error.
Abstract:Stick-slip motion takes place when a machine travels at low speed.In Computor AidedTest(CAT) for stick-slip,one key problem is that fixed-intermission data collection of stick-slip grating signals take memory space in microcomputor and have to deal with a vast amountof processing work.In this paper both the theroctical and experimental approaches have beenmade.Aprinciple of variable-intermission data collection and the device with host Z80CPUfor CAT application have been proposed.
Abstract:The structure design and geometry of pads of precision three pad hydrodynamic journalbearings are analyzed,and their relevant geometry equations and calculating formulas are deviced.In the light of Reynold's equation, hydrodynamic regularity and some lubricant staticcharacteristics of fluid film of the bearings which depends on the distribution angle of padsare obtained by means of numerical calculating method.Comptited results can be used as datafor structure design and parameter determining of the precision bearings.
Keywords:Precision bearing system;Distribution angle of pads;Lubricant static characteristics
Abstract:A method of calculating the radius dimension of pads multilobe journal bearings,during its manufacture and measurement,is presented,and calculating formulas are deduced in this paper.
Abstract:This paper introduce the principle of measuring the coordinate of a space point from theway of crossing measurement by using two line array CCD,deduce the formula of the coordinate of the space point,and analyse the measuring precision of the special point in objective space,and point out the questions needing to consider in improving the measuring precision.
Abstract:In this paper,we introduce the application of homogeneous software design in a distributed control system,It is based on the following system structure,data structure,information interface,software running and scheduling, processing time sequence.
Abstract:An interferometric technique for accurately measuring motion loci in a relatively largespace is described.Using the technique,a target moving along a space curve can be traced andmeasured.The mathematical model and some principles which have to be followed in designare presented.
Abstract:High precision invariable levelling staff is essential equipment in survey,seismology,geology field.Up to mow,there are still no special equipments for machining invariable levelling staff in our coantry.The paper presents the principle and configuration of ILS-A equipment we developed,especially,including the key to the technology for designing and makingdie and the advantages of using the dynamic grating connecting technology. Finally,we putforeward the results detected by using laser interferometer and a discussion.