最新刊期

    32 13 2024

      Industrial Review

    • 中国仪器产业对经济社会高质量发展具有重要价值,全球仪器产业发展对经济至关重要。本文分析了中国仪器产业发展历程、现状及发展阻力,提出了突破瓶颈的思考,为产业发展提供理念、方法和措施,展望了产业未来。
      CUI Yuanci,ZHANG Song,TANG Han,CHEN Fubo,CHEN Yuqing,LI Chao,CAO Liangcai
      Vol. 32, Issue 13, Pages: 1965-2003(2024) DOI: 10.37188/OPE.20243213.1965
      摘要:This text highlights the value and importance of the instrument industry for economic and social development. It analyzes the current state of the global instrument industry and its economic contributions. Additionally, it discusses the challenges faced by the Chinese instrument industry, considering its historical development and existing issues. Strategies for overcoming current bottlenecks are presented, along with concepts and measures for the development focus of Chinese instrument enterprises. Finally, it outlines the opportunities and prospects for the Chinese instrument industry.  
      关键词:Instrument industry;Domestic instrument;Supply chain;Transformation of scientific and technological achievements;manufacturing process;Human resources   
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      发布时间:2024-08-19

      Modern Applied Optics

    • 在X射线显微镜领域,研究人员成功搭建了基于光谱共焦探针的离线检测装置,实现了Wolter型芯轴表面中低频轮廓的高精度测量,并通过校准测试过程,将误差降至23纳米,验证了检测方法的准确性。
      XUE Chunan,YU Jun,SHENG Pengfeng,WANG Haojie,WANG Zhanshan,WANG Dongfang
      Vol. 32, Issue 13, Pages: 2004-2016(2024) DOI: 10.37188/OPE.20243213.2004
      摘要:The Wolter-type X-ray microscope, known for its high resolution and collecting area, is replacing KB-type X-ray microscopy in advanced light sources and high-energy lasers. A notable method for fabricating Wolter-type X-ray mirrors is nickel electroforming, where the surface accuracy and quality of the replication mandrel crucially impact mirror performance. Preparing the mandrel requires high-precision inspection technology, yet traditional equipment struggles to measure the circumferentially symmetric surface profile of the Wolter type. To address this challenge, we developed an offline detection device using a non-contact probe to measure the mandrel's middle and low frequency surface profile. Systematic and random errors in the detection device were analyzed, and we employed a dual-probe calibration method with a standard mirror, reducing the peak-to-valley (PV) value of drift due to temperature and humidity to 23 nm. A comparative experiment between our detection device and the CGH interferometric detection method showed a deviation of approximately 60 nm in the PV value of the surface test results for the Wolter mandrel, validating the effectiveness and accuracy of our detection method.  
      关键词:optical measurement;Wolter-I X-ray microscope mandrel;off-machine measurement;spectral confocal probe;error analysis   
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    • 最新研究突破:高动态范围差分吸收成像光谱仪成功研制,有效提升探测能力,为环境监测提供新工具。
      WANG Yu,LU Yihuai,ZHOU Haijin,SI Fuqi,LIU Guohua,CHANG Zhen,LIN Fang,LIU Wenqing
      Vol. 32, Issue 13, Pages: 2017-2028(2024) DOI: 10.37188/OPE.20243213.2017
      摘要:Satellite-borne imaging Differential Optical Absorption Spectrometers typically operate in a polar, sun-synchronous orbit, capturing reflected light from the Earth to measure gas concentrations via absorption intensities at specific spectral lines. First-generation instruments often suffer from low dynamic range, leading to signal saturation in bright areas and insufficient readings in dim ones. The advent of advanced image detectors with deeper full-well capacities and higher readout frequencies allows for the development of second-generation high-dynamic range instruments. This article details the design and implementation of the imaging circuit for a high-dynamic range Satellite-borne imaging Differential Optical Absorption Spectrometer, including detector selection, design strategies, and real circuit testing and analysis. The article elaborates on high-dynamic range design, introduces the concept of maximum measurement value for a single point along with its calculation formula, analyzes the relationship between maximum single-point measurement value and dynamic range, and offers a method for evaluating detection capability in single-point measurements. Additionally, the article presents a strategy to further enhance dynamic range and serves as a reference for R&D in similar applications.  
      关键词:differential optical absorption spectrometer;CCD imaging circuit;high dynamic range;satellite-borne instrument   
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    • 在痕量元素高灵敏探测领域,科研人员构建了基于激光热烧蚀和流体动力学的理论模型,深入探讨了双脉冲激光诱导击穿光谱的信号增强机制,为实验研究和参数优化提供了重要理论基础。
      ZHAO Yunyi,SONG Zhen,WANG Junxiao,ZHANG Lei,MA Weiguang,DONG Lei,YIN Wangbao,JIA Suotang
      Vol. 32, Issue 13, Pages: 2029-2039(2024) DOI: 10.37188/OPE.20243213.2029
      摘要:Dual-pulse laser-induced breakdown spectroscopy (DP-LIBS) is essential for highly sensitive trace element detection. Although various mechanisms have been proposed for its signal enhancement, further investigation is needed regarding plasma radiation fluorescence characteristics, spatial distribution of plasma temperature, and particle number density. This study developed a theoretical model based on laser ablation and two-dimensional axisymmetric fluid dynamics to simulate the spatiotemporal evolution of plasma generation and irradiance in aluminum-magnesium alloy under single-pulse LIBS and coaxial dual-pulse DP-LIBS conditions. We compared spectral line intensity enhancements at different pulse intervals and analyzed the spatial distribution of plasma temperature, particle number densities, and plasma shielding effects to clarify the signal enhancement mechanism of DP-LIBS. Results indicate that the increased particle number density and plasma temperature from the second laser beam primarily drive the enhanced plasma radiation signals, while plasma shielding occurs mainly at the target surface boundary layer. This study offers a vital theoretical foundation for experimental research and signal enhancement in DP-LIBS, aiding researchers in optimizing experimental device parameters efficiently.  
      关键词:laser-induced plasma;radiation fluid dynamics model;double pulse laser-induced breakdown spectroscopy (DP-LIBS);laser ablation;signal enhancement mechanism   
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    • 在精密测量领域,研究人员提出了一种针对非同轴式并行彩色共聚焦测量系统的误差补偿方法。通过实验验证,该方法能有效消除因被测物表面倾斜产生的数据误差,提高测量精度至微米级。
      LI Shushu,YU Qing,ZHANG Yaozu,ZHANG Wei,WANG Yin,LIU Ting,ZHENG Weifeng,LI Lina
      Vol. 32, Issue 13, Pages: 2040-2051(2024) DOI: 10.37188/OPE.20243213.2040
      摘要:This paper presents a method to compensate for measurement errors in a non-coaxial parallel chromatic confocal system caused by the inclination angle of the surface being measured. The approach involves constructing steps using two standard measuring blocks as test objects. First, the sample is moved laterally, and the collected surface height data is fitted to a straight line to derive the linear formula for the tilted surface. The slope of this line is then used to determine the surface tilt angle, and a trigonometric relationship calculates the error value for each data point. Finally, these errors are corrected through compensation. To ensure adequate spectral signal capture by the color camera, the object's tilt angle is maintained within [-4°, 4°]. Experiments are conducted within this range at various tilt angles, with an example at 4° showing an average measured step height of 101.92 μm after compensation, resulting in a relative error of 3.00%. The system's measurement accuracy achieves micrometer-level precision.  
      关键词:optical measurement;chromatic confocal measurement;tilt angle;height measurement;error compensation   
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    • 最新研究进展显示,激光诱导击穿光谱技术结合PLSR与PCA方法,通过不同探测延时,显著提高了烧结混合料中TFe,CaO,SiO2,MgO的定量检测准确性,为烧结工艺优化提供指导。
      QIN Yunpeng,SUI Mingda,WEI Zihao,XUE Shilong,LU Yuan,TIAN Ye,GUO Jinjia
      Vol. 32, Issue 13, Pages: 2052-2060(2024) DOI: 10.37188/OPE.20243213.2052
      摘要:Sintered mixed materials are essential to the sintering process, and the precision of their component detection significantly influences outcomes. LIBS technology utilizes laser spectroscopy to analyze the elemental composition and concentration of these materials, offering real-time data. However, its quantitative detection capabilities still fall short compared to other laboratory methods. This study introduced a remote sensing LIBS device for detecting components in sintered mixed materials. By combining Partial Least Squares Regression (PLSR) and Principal Component Analysis (PCA), it quantitatively assessed TFe, CaO, SiO2, and MgO concentrations. Analysis of spectral data with delay times of 1.28 μs and 5 μs showed notable differences in R2 values for various substances. For low-concentration SiO2 and MgO, the 1.28 μs delay yielded R2 values of 0.937 and 0.985, respectively. Conversely, a 5 μs delay produced better results for higher concentrations, with TFe's R2 increasing from 0.903 to 0.987 and CaO's from 0.816 to 0.980. This approach enhanced detection accuracy by utilizing optimal delay times for different substances, streamlining the detection process and providing valuable insights for the sintering process.  
      关键词:remote sensing observation;laser induced breakdown spectroscopy(LIBS);sintering mix;partial least squares regression(PLSR);time-delayed change   
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      Micro/Nano Technology and Fine Mechanics

    • 在多束电子束曝光系统领域,研究人员设计并制作了3×3微型阵列束闸,成功实现了电子束的快速开/关控制。通过优化设计和MEMS工艺制备,验证了控制器的偏转速度和功能完整性。实验结果表明,阵列束闸控制器偏转速度达到43.5 MHz,电子束偏转距离在25~30 μm,串扰小于3%。该研究为提高多束电子束曝光精度和效率提供了重要基础。
      ZHANG Lixin,SUN Botong,LIU Xingyun,YIN Bohua,LIU Junbiao,HAN Li
      Vol. 32, Issue 13, Pages: 2061-2069(2024) DOI: 10.37188/OPE.20243213.2061
      摘要:The micro-arrayed beam blanker is essential for the multi-beam electron beam lithography system, enabling the rapid exposure of complex graphics by controlling the electron beam's opening and closing. In this study, a 3×3 micro-arrayed beam blanker was designed and fabricated, followed by an experiment on multi-beam electron beam deflection. Based on prior optimization, the structural design and MEMS-based processing technology were developed, resulting in successful fabrication of the beam blanker. A controller capable of independently managing the multi-beam was then created and connected to the beam blanker to validate its deflection speed and functionality. The deflection experiment conducted on a multi-beam test platform examined crosstalk effects. Results indicate that the controller's deflection speed reaches 43.5 MHz, exceeding the design target of 10 MHz. The beam blanker independently opens and closes the electron beam, with a deflection range of 25-30 μm, which is below the predicted 43.29 μm. Crosstalk levels were all under 3%. While the designed micro-arrayed beam blanker effectively controls the multi-beam electron beam, further optimization is needed for deflection accuracy and processing technology.  
      关键词:electron beam lithography;Arrayed beam blanker;multi-beam electron beam;crosstalk;Deflection speed   
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    • 最新研究突破:采用Zigzag柔性簧片导向的并联式XY二自由度精密定位平台,实现3 mm×3 mm大行程、60 Hz高频响、1.3 μm高分辨率的精密运动控制,为精密制造领域提供创新解决方案。
      ZHAO Linfeng,LING Mingxiang,XUE Liwei,SHEN Hao,CHEN Liguo
      Vol. 32, Issue 13, Pages: 2070-2080(2024) DOI: 10.37188/OPE.20243213.2070
      摘要:A parallel XY precision positioning platform utilizing a Zigzag flexure hinge as a guiding mechanism is presented, designed for large strokes, high precision, high frequency, and low stress to meet precision motion requirements. The implementation features a flexure-based motion platform with the Zigzag flexure hinge as the core guiding beam, driven by a voice coil motor, achieving a motion range of 3 mm×3 mm and a natural frequency exceeding 60 Hz. Finite element simulations compared the Zigzag flexure hinge with traditional straight beam hinges, demonstrating the Zigzag's superiority. Additionally, a decoupling design was employed to minimize parasitic errors from coupled motion. Finite element analysis optimized the platform's configuration to mitigate fatigue damage from high-frequency movement, resulting in reduced maximum stress. The findings indicate that the platform satisfies the required motion and decoupling performance, with a parasitic error of 0.012%. It supports large travel, high-frequency motion, rapid response, and excellent dynamic characteristics. Experimental results confirm a natural frequency of 60 Hz, an open-loop resolution of 1.3 μm, and successful movement of ±1.5 mm in the XY direction.  
      关键词:macro-micro positioning platform;voice coil motor;compliant mechanism;low stress   
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    • 在精密加工领域,专家建立了考虑磨粒三维微切削的材料去除均匀性模型,为改善钽酸锂晶片双面研磨材料的去除均匀性提供了指导。
      XUE Saisai,GUO Xiaoguang,JIA Yufan,GAO Shang,KANG Renke
      Vol. 32, Issue 13, Pages: 2081-2090(2024) DOI: 10.37188/OPE.20243213.2081
      摘要:To enhance the uniformity of material removal for lithium tantalate (LiTaO3, LT) wafers, a model based on the three-dimensional micro-cutting of abrasive particles was developed. The model starts by analyzing the brittle and plastic removal mechanisms of LiTaO3 crystals, alongside the distribution of abrasive particles on the lapping pad. Using a force balance equation, it calculates the penetration depth and chip cross-section for each abrasive particle. A kinematic analysis subsequently derives the trajectory of these particles during double-sided lapping, leading to the establishment of the material removal uniformity model. Simulations were conducted to assess the effects of the speed ratios between the gear ring and the sun wheel (m) and between the gear ring and the lower plate (n) on material removal uniformity. Following this, experiments were performed on LiTaO3 wafers, measuring the Total Thickness Variation (TTV) across different speed ratios m and n to validate the model. Results indicate that the uniformity of material removal is significantly influenced by these speed ratios, achieving optimal uniformity at m=0.85 and n=1.3, resulting in a TTV of 0.83 μm. The experimental findings align with the simulation, demonstrating the model's potential to guide improvements in the double-sided lapping uniformity of LiTaO3 wafers.  
      关键词:fixed abrasive lapping;lithium tantalate;particle trajectory;material removal planarization   
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    • 电化学增材制造技术在微纳金属结构制造领域取得新突破,通过添加剂调控电化学微流束3D打印技术,成功制造出高精度微铜结构,具有重要工程应用前景。
      LIU Yong,XU Shengyang,CHEN Lixiaoxue,LI Wanlu,DONG Pengfei
      Vol. 32, Issue 13, Pages: 2091-2102(2024) DOI: 10.37188/OPE.20243213.2091
      摘要:Electrochemical additive manufacturing technology has garnered significant attention for fabricating micro/nano metal structures due to its high precision, low porosity, and elimination of thermal stress. This paper presents a method for additive-regulated electrochemical microjet 3D printing of copper structures, optimizing process parameters. It first analyzes the impact of additive components on copper crystallization. Then, it theoretically derives the deposition rate on the cathode surface and investigates energy transfer and material transport during deposition using numerical simulations. The process parameters are initially screened through Taguchi experiments, illustrating their interactions. Based on these results, response surface experiments further refine the parameters and clarify their interrelations. Utilizing the optimized parameters from both Taguchi and response surface experiments, 3D printing of copper microcolumns of varying sizes and spiral structures is conducted, resulting in an average surface roughness of 0.065 μm for the different-sized columns, and a range of 0.106 μm to 0.159 μm for the spiral workpieces. The experimental findings confirm that additive-regulated electrochemical microjet 3D printing technology can accurately produce complex metal 3D structures and components, presenting promising engineering applications.  
      关键词:electrochemical deposition;microfluidic beam;3D printing;additives;metal additive manufacturing   
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      Information Sciences

    • 在航天领域,研究人员提出了一种基于动态阈值的距离搜索算法,用于改进初轨确定的成功率和精度。该算法通过动态调整搜索阈值,实现了更精准高效的初轨确定,满足了空间目标初轨确定的需求。利用LEO、MEO和GEO目标的实测数据进行测试,结果表明算法具有高成功率和定轨精度,为监测数据质量提供了有效解决方案。
      LEI Xiangxu,LAO Zhendi,WANG Dongya,WANG Kunpeng,CHEN Junyu,ZHAO You,LI Yaya
      Vol. 32, Issue 13, Pages: 2103-2111(2024) DOI: 10.37188/OPE.20243213.2103
      摘要:This study proposes an enhanced initial orbit determination algorithm utilizing dynamic threshold distance search methods to improve success rates and accuracy compared to traditional algorithms. By dynamically adjusting the search threshold, the algorithm aims for more precise and efficient initial orbit determination, addressing current needs for tracking space objects. Testing is conducted using measured angular data from Low Earth Orbit (LEO), Medium Earth Orbit (MEO), and Geosynchronous (GEO) objects.The methodology begins with a detailed exploration of the dynamic threshold distance search algorithm's implementation. Drawing on extensive data processing experience, dynamic thresholds are strategically integrated into the orbit screening phase of the initial orbit parameter quality control process. A comprehensive breakdown of the algorithm's implementation is provided, highlighting its intricacies and operational nuances. Evaluation of the Initial Orbit Determination (IOD) parameters is performed using Two Line Elements (TLE) derived from angular data across various orbital zones. Rigorous testing is conducted using angular data from the Zhulong Observation Network for low to medium orbit targets and from the Changchun Observatory, Chinese Academy of Sciences for GEO objects. The results indicate impressive success rates for initial orbit determination, with approximately 94% for LEO, 75% for MEO, and 89% for GEO objects. Additionally, the algorithm shows mean semi-major axis errors of about 9, 12, and 50 km for LEO, MEO, and GEO objects, respectively. In conclusion, the proposed algorithm demonstrates high applicability, achieving significant success rates and exceptional orbit determination accuracy. These findings highlight the algorithm's effectiveness in leveraging monitoring data for precise and reliable initial orbit determination processes.  
      关键词:space debris;commercial space;very short arc angle data;initial orbit determination;Optical telescope   
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    • 在水下图像增强领域,研究者提出了一种基于深度学习的新型网络结构,通过结合纹理感知网络和颜色直方图特征提取网络,有效提升了图像质量,缩短了处理时间,为水下视觉增强任务提供了高效解决方案。
      YUAN Guoming,LIU Haijun,LI Xiaoli,ZHANG Ruilei,SHAN Weifeng
      Vol. 32, Issue 13, Pages: 2112-2127(2024) DOI: 10.37188/OPE.20243213.2112
      摘要:While deep learning methods show promising visual results, current end-to-end networks often lack tailored architectures to address common issues like color distortion and texture blurriness. To improve their effectiveness, we propose an underwater image enhancement network that utilizes joint texture perception and color histogram features. The network comprises a texture-aware module, a color histogram extraction module, and a color-texture fusion enhancement module. The texture-aware network incorporates a deformable transformer module, leveraging spatially aware deformable convolution to enhance multi-head attention and extract texture features. The color histogram extraction module harnesses histograms from real underwater images to compute the loss function. Subsequently, the color-texture fusion module merges the color and texture features, which are then processed by the enhancement network to produce the final results. This approach effectively preserves texture structures, corrects color distortions, and maintains information consistency. Extensive experiments demonstrate that our method surpasses existing underwater image enhancement algorithms, achieving a 10% increase in the UIQM metric and reducing processing time to just 0.051 s per image. Our model successfully meets the demands of underwater visual enhancement tasks.  
      关键词:image enhancement;multi-head attention mechanism;texture perception;Convolutional Neural Network(CNN);deep learning   
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    • 在高速星地保密通信领域,专家利用无线光信道特性,建立了空间分集密钥生成系统,为通信安全提供高效保障。通过研究大气湍流对光信号传输特性的影响,分析了相关性因素,为建立密钥提取系统提供参考。
      LI Hui,LOU Yan,ZHAO Yiwu,CHEN Chunyi,HOU Yihao,ZHAO Shengya,QIN Xinyi
      Vol. 32, Issue 13, Pages: 2128-2140(2024) DOI: 10.37188/OPE.20243213.2128
      摘要:Leveraging the unique properties of wireless optical channels can enhance secure and efficient high-speed communication between satellites and ground stations through optical key generation and distribution. This paper examines the correlation of adjacent sub-channels in a wireless optical channel spatial multiplexing key generation system. A MIMO model is constructed using phase screens created by power spectrum inversion based on Kolmogorov atmospheric turbulence, simulating Gaussian beam propagation through atmospheric conditions via Monte Carlo methods. We analyze the impact of varying turbulence intensities, transmission distances, and beam diameters on optical intensity distribution, as well as their effects on the correlation between adjacent sub-channels considering factors like turbulence intensity, distance between receiving apertures, aperture sizes, transmission distances, and optical wavelengths. The findings indicate that the correlation of optical signal power received by adjacent apertures increases with the diameter and wavelength of those apertures but decreases with the distance between them, transmission distance, and turbulence intensity. In near-ground horizontal link scenarios with an atmospheric refractive index constant Cn2=5×10-14 m-2/3, a receiver aperture radius of 0.015 m, and a transmission distance of 2 000 m, the correlation of optical signal power between adjacent channels is nearly zero at a distance of 0.07 m, suggesting the independence of the two channels. These insights can improve the performance of optical channel key extraction systems in atmospheric conditions.  
      关键词:wireless optical communication;multiple-input multiple-output(MIMO);channel correlation;key extraction;turbulence phase screen   
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