Abstract:The paper introduces the progress of international micro machine research works in recent 3-5 years,describes that the new micro fabrication technology is trending to make three dimension cubic structure of high thick high aspect ratio and to study fabrication method utilized to polymer or metal.The paper also presents the research situation of piezo electro as well as electro magnetic motor and some micro machine prototype or samples,it demonstrates that there are many investigation ways of micro machine in approch abroad and much effort is in progress for overcoming inherent special technical difficults of micro machine.
Abstract:Development process of fabrication technology for diffractive optical elements(DOE) is recalled in this paper.The fabrication technolgoy and its designing tendency in the future are introduced.
Abstract:Diffraction efficiency of Al-coated triangle and holographic sinusoidal grating used in UV region are calculated using the differential formalism of exact electromagnetic theory.The efficiency curves of blazed characteristic of sinusoidal grating is presented.And the influence of apex angle on diffraction efficiency of triangle grating is debated.
Abstract:The image acquired from synthetic aperture radar is a holographic image. It is transformed into visible light image through optical correlator.The content discussed in this paper is a device which transforms the light image information and displays it on common monitor. It consists of three parts: optic system array CCD camera and frame storage & real-time display system. The light is imaged on array CCD image pixels through optic system and transferred into electronical signal. This signal then is changed into video signal by frame storage & display system and real-time displayed on monitor. Different modes of displaying image are controlled by microcomputer.
Abstract:The formula of single tooth stiffness coefficient of the flexspline and the meshing stiffness of the harmonic drive is deduced firstly;then,the contribution of the meshing stiffness to the harmonic drive system stiffness is analyzed;at last,the technical route is provided to increase the harmonic drive system stiffness.
Abstract:The intensity of the grinding heat source during leadscrew grinding was analysed and calculated. The method to calculate the temperature field in the leadscrew was given and the thermal deformation law of the leadscrew was studied.Finally,some thermal phenomena related to leadscrew grinding processes were summerized through a calculation example.
Keywords:Leadscrew grinding;thermal deformation;Intensity of the heat source
Abstract:Shape Memory Alloy(SMA) is a kind of functional marterial which began to appear in 1960s.It has great applications in industry field.It used to be made as pipe connecter、engineering springs etc.We try to manufacture tiny part with SMA,and use it as functional clamp in MEMs assembly.Based on the constitutents of the alloy、clamp openess temperature corresponding relation and thermal elastic transformation,the work principles、dynamic characteristics of the SMA microclamp is introduced in this article.At last we discuss the energy tansform relation during the clamp working process.
Abstract:In this paper,the leading feature of existent micromachining technology of AFM force sensors is discussed.On the basis of those,two step corrosion with KOH solution are researched,using heavily boron doped silicon as etch stop layer.Cantilever beams with precise thickness are formed from single crystal silicon.By means of SiO 2 mask and SF 6 etching corrosive,the cantilever beam with tip is shaped by reactive ion etching once through operation.The probe has been shaped by wet corrosive and the tip radius is about 50 nm.A batch fabrication process based on micromachining technology is presented for cantilevers with integrated conical tips which are suitable for the AFM.
Keywords:Micromaching;atomic force microscope;Force sensor
Abstract:In this paper,micro electromagnetic force between microcoils,between microcoils and micromagnet in electromagnetic micromotor is studied,its distribution features are analyzed.Some important conclusions have been reached,which direct design and development of electromagnetic micromotor.
Keywords:Electromagnetic micromotor;Micro electromagnetic force;Micro size magnetic field
Lu Dunwu,Huang Huijie,Shen Beijun,Yang Liangmin,Liu Zengshui,He Wei
Vol. 5, Issue 2, Pages: 54-57(1997)
Abstract:The study establishes a glass suction needle fabrication apparatus and concludes a technique for fabrication of glass suction needle.In the end of the fabrication result is analysed and discussed.
Keywords:MEMS;Fabrication technique for glass needle
Abstract:The experimental analysis of the coupling efficiency of an optical fiber from three meters long of 0 6 mm optical fiber wick diameter with output 100 W CW Nd:YAG laser.The quantity in relation to the coupling efficiency of an optical fiber:lasing mode、divergence angle、numerical aperture、focal diameter and precision optical fiber coupler are discussed.The results of experiment:three meters optical fiber output 0~100 W laser,typical coupling efficiency ≥87%,optimum value is 90% are given.
Abstract:The plano-concave cylinder lens and prism properties of angular magnification in light scanning are analysed in the paper.Experinient shows that the cylinder lens linear range of angular magnification is wider than the prism's.
Abstract:In this paper,FSGJ-1,the first Chinese machine for aspheres automatic fabriction and on line testing was introduced.Technical difficulties encountered in research stage and their solutions were addressed.In addition,a fabrication practice and the comparisons with the world advanced technologies were presented.
Abstract:We studied the characteristics of surface profiles of the convential optical ements and the features of the characteristic parameters of the surface microprofile and mutual relations between them,and tested the characteristic parameters of the surface profile of a great number of otpical ements so as to determine the features and ranges of the surface microprofile.
Abstract:Main factors of influencing photoresist thickness for dip coating is analysed in this paper.The thickness of photoresist is determined by it .A relation between photoresist thickness and pulling speed is obtained by means of the experiment,and the pulling speed is selected according to the experimental curve.These relialbe technological parameteres is provided for actual operation.
Abstract:This paper researches on a precision X-Y scanning stage,deals with its main technical specifications,introduces its design features,and also makes theoretical analysis,and finally discusses its utilization.
Abstract:At present,CCD is widely applied in many fields.Here,we introduce you a special linear area CCD camera which use Time-Delay-Integration(TDI) technique to provide high sensitivity,high speed,high spatial resolution and wide dynamic range performance under low light condition.In order to apply the TDI method and verify the effect,we do an experiment of grabbing moving image using CT-E1 2048X96 TDI Line Scan CCD camera produced by DALSA INC..We design a grabber and make a complete system .Which includes: Camera,Camera Control,Frame Grabber,Rolling platform,PC.The result indicates that when the line-shift-rate of the CCD camera is not synchronized with the rate of moving object,the image that we obtain is not clear.But when we use phase-shift-compensation technique and make the line-shift-rate of the camera match the rate of the image,we can get very distinct image.
Fan Tianquan,Xie Changwen,Lu Deji,Geng Lihong,Gao Xuedong
Vol. 5, Issue 2, Pages: 98-103(1997)
Abstract:In this article,the reason of the systematical error in measurement result when indexing error is measured by permutation intercomparision method is described in theory.It is mainly due to the inclination of collimator's graticule & polygon or instrument and the different inclination of each reflection surface.It is proved by experiment.A method for reducing and eliminating this systematical error is described in the paper.
Abstract:Better results of subdivided error of Moire fringe subdividing meter of the goniometer of high precision could be obtained by using the comparison phase method of phase shift.In this paper the measuring principle,the measuring accuracy as well as the contrast results with real measurements are described.
Lin Qirong,Xie Shusen,Zhou Chuanzhao,Li Buhong,Zheng Wei,Li Hui
Vol. 5, Issue 2, Pages: 109-115(1997)
Abstract:The non diffracted laser-CCD measuring of diameter of a wire can not by now obtain practical use because of the failure of the practical method to overcome the measurement errors caused by non linear deformation of optical lens.The auto amendment method for measurement errors by microcomputer presented in this paper can solve this problem effectively.On this basis,a measurement of diameter of a wire with advantages of small volume,low cost,wide measuring range and high precision has been produced.Our system will solve the problem of real-time,non-contact and dynamic measurement of diameter of a wire especially in the real manufacturing line of enamelled wire.
Keywords:Measurement of diameter of a wire;On line detection;Error amendment by microcomputer